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    • 4. 发明授权
    • Semiconductor device comprising MISFETS and method of manufacturing the
same
    • 包括MISFET的半导体器件及其制造方法
    • US5986313A
    • 1999-11-16
    • US988776
    • 1997-12-11
    • Tetsuya UedaTakashi UeharaKousaku YanoSatoshi Ueda
    • Tetsuya UedaTakashi UeharaKousaku YanoSatoshi Ueda
    • H01L21/336H01L21/8234H01L29/417H01L29/76H01L29/94H01L31/062H01L31/113
    • H01L29/6659H01L21/823475H01L29/41775H01L29/41783H01L29/66545
    • There is formed an isolation which surrounds an active region of a semiconductor substrate. Formed over the active region and on the isolation, respectively, are a gate electrode and two gate interconnections on both sides thereof. Between the gate electrode and the gate interconnections are located two first interspaces each of which is smaller in width than a specified value and a second interspace which is larger in width than the specified value and interposed between the two first interspaces. In forming side walls on both side faces of the gate electrode and gate interconnections by depositing an insulating film on the substrate, the first interspaces are buried with the insulating film. Thereafter, a metal film is deposited on the substrate, followed by chemical mechanical polishing till the gate electrode, gate interconnections, and side walls become exposed. By the process, withdrawn electrodes from a source/drain region for ccntact with the active region is formed by self alignment, while the withdrawn electrodes are insulated from the gate electrode and gate interconnections by the side walls.
    • 形成围绕半导体衬底的有源区的隔离。 分别在有源区和隔离层上形成栅电极和两侧栅极互连。 在栅极电极和栅极互连之间设置两个第一空间,每个空间的宽度小于指定值,第二空间的宽度大于指定值并插入在两个第一间隙之间。 在通过在衬底上沉积绝缘膜来形成栅电极的两个侧面上的侧壁和栅极互连时,第一间隙被绝缘膜掩埋。 然后,将金属膜沉积在基板上,然后进行化学机械抛光,直到栅极,栅极互连和侧壁变得暴露。 通过该处理,通过自对准来形成用于与有源区域成反射的源极/漏极区域的引出电极,而引出的电极通过侧壁与栅电极和栅极互连绝缘。
    • 5. 发明授权
    • Semiconductor device with a field-effect transistor having a lower
resistance impurity diffusion layer, and method of manufacturing the
same
    • 具有具有较低电阻杂质扩散层的场效应晶体管的半导体器件及其制造方法
    • US5733812A
    • 1998-03-31
    • US571131
    • 1995-12-12
    • Tetsuya UedaTakashi UeharaKousaku YanoSatoshi Ueda
    • Tetsuya UedaTakashi UeharaKousaku YanoSatoshi Ueda
    • H01L21/336H01L21/8234H01L29/417H01L21/265
    • H01L29/6659H01L21/823475H01L29/41775H01L29/41783H01L29/66545
    • There is formed an isolation which surrounds an active region of a semiconductor substrate. Formed over the active region and on the isolation, respectively, are a gate electrode and two gate interconnections on both sides thereof. Between the gate electrode and the gate interconnections are located two first interspaces each of which is smaller in width than a specified value and a second interspace which is larger in width than the specified value and interposed between the two first interspaces. In forming side walls on both side faces of the gate electrode and gate interconnections by depositing an insulating film on the substrate, the first interspaces are buried with the insulating film. Thereafter, a metal film is deposited on the substrate, followed by chemical mechanical polishing till the gate electrode, gate interconnections, and side walls become exposed. By the process, withdrawn electrodes from a source/drain region for contact with the active region is formed by self alignment, while the withdrawn electrodes are insulated from the gate electrode and gate interconnections by the side walls.
    • 形成围绕半导体衬底的有源区的隔离。 分别在有源区和隔离层上形成栅电极和两侧栅极互连。 在栅极电极和栅极互连之间设置两个第一空间,每个空间的宽度小于指定值,第二空间的宽度大于指定值并插入在两个第一间隙之间。 在通过在衬底上沉积绝缘膜来形成栅电极的两个侧面上的侧壁和栅极互连时,第一间隙被绝缘膜掩埋。 然后,将金属膜沉积在基板上,然后进行化学机械抛光,直到栅极,栅极互连和侧壁变得暴露。 通过该处理,通过自对准形成来自用于与有源区接触的源极/漏极区域的引出电极,而引出的电极通过侧壁与栅电极和栅极互连绝缘。
    • 9. 发明申请
    • IMAGE FORMING APPARATUS
    • 图像形成装置
    • US20140029961A1
    • 2014-01-30
    • US13951007
    • 2013-07-25
    • Naoto UEDAMakoto NakuraShingo TakaiSatoshi UedaKoichi Kudo
    • Naoto UEDAMakoto NakuraShingo TakaiSatoshi UedaKoichi Kudo
    • G03G15/00
    • G03G15/0131G03G15/0189G03G15/6567
    • An image forming apparatus includes an image forming unit that forms an image on a recording medium; a width detector that detects positions of side edges of the recording medium in a width direction, which is orthogonal to a conveying direction in which the recording medium is conveyed, at multiple detection positions along the conveying direction; a shape calculator that calculates angles between the conveying direction and straight lines each connecting the positions of the same side edge detected at the multiple detection positions and calculates a shape of the recording medium based on the angles; and a correction unit that corrects image data of the image to be formed by the image forming unit based on the calculated shape of the recording medium.
    • 图像形成装置包括在记录介质上形成图像的图像形成单元; 宽度检测器,沿着所述传送方向检测与所述记录介质被传送的传送方向正交的宽度方向上的所述记录介质的侧边缘的位置; 计算器,其计算输送方向与连接在多个检测位置检测到的同一侧边缘的位置的直线之间的角度,并基于角度计算记录介质的形状; 以及校正单元,其基于计算出的记录介质的形状校正由图像形成单元形成的图像的图像数据。