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    • 1. 发明授权
    • Semiconductor device comprising MISFETS and method of manufacturing the
same
    • 包括MISFET的半导体器件及其制造方法
    • US5986313A
    • 1999-11-16
    • US988776
    • 1997-12-11
    • Tetsuya UedaTakashi UeharaKousaku YanoSatoshi Ueda
    • Tetsuya UedaTakashi UeharaKousaku YanoSatoshi Ueda
    • H01L21/336H01L21/8234H01L29/417H01L29/76H01L29/94H01L31/062H01L31/113
    • H01L29/6659H01L21/823475H01L29/41775H01L29/41783H01L29/66545
    • There is formed an isolation which surrounds an active region of a semiconductor substrate. Formed over the active region and on the isolation, respectively, are a gate electrode and two gate interconnections on both sides thereof. Between the gate electrode and the gate interconnections are located two first interspaces each of which is smaller in width than a specified value and a second interspace which is larger in width than the specified value and interposed between the two first interspaces. In forming side walls on both side faces of the gate electrode and gate interconnections by depositing an insulating film on the substrate, the first interspaces are buried with the insulating film. Thereafter, a metal film is deposited on the substrate, followed by chemical mechanical polishing till the gate electrode, gate interconnections, and side walls become exposed. By the process, withdrawn electrodes from a source/drain region for ccntact with the active region is formed by self alignment, while the withdrawn electrodes are insulated from the gate electrode and gate interconnections by the side walls.
    • 形成围绕半导体衬底的有源区的隔离。 分别在有源区和隔离层上形成栅电极和两侧栅极互连。 在栅极电极和栅极互连之间设置两个第一空间,每个空间的宽度小于指定值,第二空间的宽度大于指定值并插入在两个第一间隙之间。 在通过在衬底上沉积绝缘膜来形成栅电极的两个侧面上的侧壁和栅极互连时,第一间隙被绝缘膜掩埋。 然后,将金属膜沉积在基板上,然后进行化学机械抛光,直到栅极,栅极互连和侧壁变得暴露。 通过该处理,通过自对准来形成用于与有源区域成反射的源极/漏极区域的引出电极,而引出的电极通过侧壁与栅电极和栅极互连绝缘。
    • 2. 发明授权
    • Semiconductor device with a field-effect transistor having a lower
resistance impurity diffusion layer, and method of manufacturing the
same
    • 具有具有较低电阻杂质扩散层的场效应晶体管的半导体器件及其制造方法
    • US5733812A
    • 1998-03-31
    • US571131
    • 1995-12-12
    • Tetsuya UedaTakashi UeharaKousaku YanoSatoshi Ueda
    • Tetsuya UedaTakashi UeharaKousaku YanoSatoshi Ueda
    • H01L21/336H01L21/8234H01L29/417H01L21/265
    • H01L29/6659H01L21/823475H01L29/41775H01L29/41783H01L29/66545
    • There is formed an isolation which surrounds an active region of a semiconductor substrate. Formed over the active region and on the isolation, respectively, are a gate electrode and two gate interconnections on both sides thereof. Between the gate electrode and the gate interconnections are located two first interspaces each of which is smaller in width than a specified value and a second interspace which is larger in width than the specified value and interposed between the two first interspaces. In forming side walls on both side faces of the gate electrode and gate interconnections by depositing an insulating film on the substrate, the first interspaces are buried with the insulating film. Thereafter, a metal film is deposited on the substrate, followed by chemical mechanical polishing till the gate electrode, gate interconnections, and side walls become exposed. By the process, withdrawn electrodes from a source/drain region for contact with the active region is formed by self alignment, while the withdrawn electrodes are insulated from the gate electrode and gate interconnections by the side walls.
    • 形成围绕半导体衬底的有源区的隔离。 分别在有源区和隔离层上形成栅电极和两侧栅极互连。 在栅极电极和栅极互连之间设置两个第一空间,每个空间的宽度小于指定值,第二空间的宽度大于指定值并插入在两个第一间隙之间。 在通过在衬底上沉积绝缘膜来形成栅电极的两个侧面上的侧壁和栅极互连时,第一间隙被绝缘膜掩埋。 然后,将金属膜沉积在基板上,然后进行化学机械抛光,直到栅极,栅极互连和侧壁变得暴露。 通过该处理,通过自对准形成来自用于与有源区接触的源极/漏极区域的引出电极,而引出的电极通过侧壁与栅电极和栅极互连绝缘。
    • 4. 发明授权
    • Method of manufacturing a semiconductor device using a trench isolation
technique
    • 使用沟槽隔离技术制造半导体器件的方法
    • US6143626A
    • 2000-11-07
    • US330068
    • 1999-06-11
    • Toshiki YabuTakashi UeharaMizuki SegawaTakashi Nakabayashi
    • Toshiki YabuTakashi UeharaMizuki SegawaTakashi Nakabayashi
    • H01L21/762H01L21/76
    • H01L21/76229
    • On a semiconductor substrate are successively deposited a silicon dioxide film and a silicon nitride film. The silicon nitride film, the silicon dioxide film, and the semiconductor substrate are sequentially etched using a photoresist film with an opening corresponding to an isolation region, thereby forming a trench. After depositing a diffusion preventing film, there is deposited an insulating film for isolation having reflowability. Although a void is formed in the insulating film for isolation in the isolation region, the insulating film for isolation is caused to reflow, thereby eliminating the void. After that, the whole substrate is planarized by CMP so as to remove the silicon nitride film and the silicon dioxide film, followed by the formation of gate insulating films, gate electrodes, sidewalls, and source/drain regions in respective element formation regions. Thus, in a highly integrated semiconductor device having a trench isolation, degradation of reliability resulting from the opening of the void in the surface of isolation is prevented.
    • 在半导体衬底上依次沉积二氧化硅膜和氮化硅膜。 使用具有对应于隔离区域的开口的光致抗蚀剂膜,依次蚀刻氮化硅膜,二氧化硅膜和半导体衬底,从而形成沟槽。 在沉积防扩散膜之后,沉积具有可回流性的用于隔离的绝缘膜。 虽然在隔离区域中用于隔离的绝缘膜中形成空隙,但是使用于隔离的绝缘膜回流,从而消除空隙。 之后,通过CMP对整个基板进行平坦化,以除去氮化硅膜和二氧化硅膜,然后在各个元件形成区域中形成栅极绝缘膜,栅极电极,侧壁和源极/漏极区域。 因此,在具有沟槽隔离的高度集成的半导体器件中,防止了由于隔离表面中的空隙的打开引起的可靠性降低。
    • 9. 发明申请
    • IMAGE FORMING APPARATUS AND CONTROL METHOD THEREOF
    • 图像形成装置及其控制方法
    • US20090060558A1
    • 2009-03-05
    • US12199426
    • 2008-08-27
    • Takashi Uehara
    • Takashi Uehara
    • G03G15/00
    • G03G15/5004
    • An image forming apparatus which is capable of reducing the number of times a second member is separated from a first member upon entry into power-save mode, thereby minimizing failures of a separation unit. A pressure-roller separating mechanism is provided so as to abut and separate a pressure roller and a fixing roller against/from each other. The image forming apparatus is controlled to change to a power-save mode in which power consumption of the image forming apparatus is reduced. The pressure-roller separating mechanism is controlled to separate the pressure roller and the fixing roller from each other in the power-save mode based on a measurement result measured by a timer, and the power-save mode is maintained after the pressure roller and the fixing roller are separated from each other.
    • 一种图像形成装置,其能够减少在进入省电模式时第二构件与第一构件分离的次数,从而使分离单元的故障最小化。 压辊分离机构设置成抵靠和分离加压辊和定影辊。 控制图像形成装置转换成图像形成装置的功耗降低的省电模式。 根据由定时器测量的测量结果,压力辊分离机构被控制为在节电模式下将压力辊和定影辊彼此分开,并且在压力辊和 定影辊彼此分离。