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    • 10. 发明授权
    • Silicon on germanium
    • 锗在锗上
    • US08269254B2
    • 2012-09-18
    • US12829099
    • 2010-07-01
    • Kie Y. AhnLeonard Forbes
    • Kie Y. AhnLeonard Forbes
    • H01L31/0328H01L31/0336H01L31/072H01L31/109H01L31/062
    • H01L29/78651H01L21/28255H01L29/513H01L29/517
    • The use of atomic layer deposition (ALD) to form a semiconductor structure of a silicon film on a germanium substrate is disclosed. An example embodiment includes a tantalum nitride gate electrode on a hafnium dioxide gate dielectric on the silicon film (TaN/HfO2/Si/Ge), which produces a reliable high dielectric constant (high k) electronic structure having higher charge carrier mobility as compared to silicon substrates. This structure may be useful in high performance electronic devices. The structure can be formed by ALD deposition of a thin silicon layer on a germanium substrate surface, and then ALD forming a hafnium oxide gate dielectric layer, and a tantalum nitride gate electrode. Such a structure may be used as the gate of a MOSFET, or as a capacitor. The properties of the dielectric may be varied by replacing the hafnium oxide with another gate dielectric such as zirconium oxide (ZrO2), or titanium oxide (TiO2).
    • 公开了使用原子层沉积(ALD)在锗衬底上形成硅膜的半导体结构。 示例性实施例包括在硅膜上的二氧化铪电介质(TaN / HfO 2 / Si / Ge)上的氮化钽栅电极,其产生具有较高电荷载流子迁移率的可靠的高介电常数(高k)电子结构,与 硅衬底。 该结构在高性能电子设备中可能是有用的。 该结构可以通过在锗衬底表面上沉积薄硅层,然后形成氧化铪栅极电介质层的ALD和氮化钽栅电极来形成。 这种结构可以用作MOSFET的栅极或电容器。 可以通过用诸如氧化锆(ZrO 2)或氧化钛(TiO 2)的另一种栅极电介质代替氧化铪来改变电介质的性质。