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1. 发明申请

US20140352738A1 ZERO LAG DISPENSE APPARATUS 审中-公开
公开(公告)号：US20140352738A1
公开(公告)日：2014-12-04
申请号：US14289017
申请日：2014-05-28
申请人： Don C. Burkman , Cary M. Ley , Kevin T. O'Dougherty , Charlie A. Peterson
发明人： Don C. Burkman , Cary M. Ley , Kevin T. O'Dougherty , Charlie A. Peterson
IPC分类号： H01L21/67
CPC分类号： H01L21/67051
摘要： A liquid dispenser for a wafer processing system includes a supply tube with an inlet at one end and an outlet at the other end. Attached to the supply tube at the outlet end is a liquid reservoir. The liquid reservoir has a dispensing plate that has an outlet for dispensing liquid onto a wafer. There is also a dispensing valve for controlling the dispensing of the liquid.
摘要翻译：用于晶片处理系统的液体分配器包括在一端具有入口并在另一端具有出口的供给管。在出口端连接到供应管是液体储存器。液体储存器具有分配板，该分配板具有用于将液体分配到晶片上的出口。还有一个用于控制液体分配的分配阀。

2. 发明授权

US08322571B2 Liner-based liquid storage and dispensing systems with empty detection capability 有权
标题翻译：具有空检测能力的基于液体的液体储存和分配系统
公开(公告)号：US08322571B2
公开(公告)日：2012-12-04
申请号：US11912613
申请日：2006-04-25
申请人： Minna Hovinen , John R. Kingery , Glenn M. Tom , Kevin T. O'Dougherty , Kirk Mikkelsen , Donald D. Ware , Peter C. Van Buskirk
发明人： Minna Hovinen , John R. Kingery , Glenn M. Tom , Kevin T. O'Dougherty , Kirk Mikkelsen , Donald D. Ware , Peter C. Van Buskirk
IPC分类号： B67C3/00
CPC分类号： B65D83/0061 , B01J4/02 , B01J2219/00065 , B01J2219/00067 , B01J2219/00069 , B01J2219/00164 , G01F23/18
摘要： Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
摘要翻译：用于储存和分配化学试剂和组合物的流体供应系统，例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物，具有在所含液体处于或等待时检测空或近空状态的能力，在分配操作期间接近耗尽。描述了使用空的检测装置的流体输送系统，包括压力传感器监测供应包装中间的分配材料和伺服液压分配泵，或监测在分配器中的分配器室补充时间，该分配器在循环调度中被补充以从分配器利用所分配的材料到下游工具。

3. 发明申请

US20100152891A1 LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE 有权
标题翻译：具有电子信息存储的液体处理系统
公开(公告)号：US20100152891A1
公开(公告)日：2010-06-17
申请号：US12707449
申请日：2010-02-17
申请人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
发明人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
IPC分类号： G06F17/00
CPC分类号： G05D7/0617 , B67D7/0283 , B67D7/348 , Y10T137/0318 , Y10T137/8158
摘要： An electronic storage device is coupled with a container capable of holding liquid for electronically storing information relating to the liquid stored in the container. The system can be configured with an antenna, for storing information to and reading information from the electronic storage device. A microprocessor-based controller, coupled with the antenna, may be employed for controlling processing of the liquid based on information read from the electronic storage device by the antenna. A connector of a secure reader system having a reader is provided to physically couple to a container having an information storing mechanism, for periodically reading information from an information storing mechanism. The connector may draw material from the container simultaneous with the reading.
摘要翻译：电子存储装置与能够保持液体的容器结合，以电子地存储与存储在容器中的液体有关的信息。该系统可以配置有天线，用于将信息存储到电子存储装置中并从其读取信息。与天线耦合的基于微处理器的控制器可以用于基于通过天线从电子存储装置读取的信息来控制液体的处理。具有读取器的安全读取器系统的连接器被提供以物理地耦合到具有信息存储机构的容器，用于从信息存储机构周期性地读取信息。连接器可以与读数同时从容器中抽出材料。

4. 发明申请

US20120186671A1 LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE 有权
标题翻译：具有电子信息存储的液体处理系统
公开(公告)号：US20120186671A1
公开(公告)日：2012-07-26
申请号：US13438285
申请日：2012-04-03
申请人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
发明人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
IPC分类号： F17D3/00
CPC分类号： G05D7/0617 , B67D7/0283 , B67D7/348 , Y10T137/0318 , Y10T137/8158
摘要： An electronic storage device is coupled with a container capable of holding liquid for electronically storing information relating to the liquid stored in the container. The system can be configured with an antenna, for storing information to and reading information from the electronic storage device. A microprocessor-based controller, coupled with the antenna, may be employed for controlling processing of the liquid based on information read from the electronic storage device by the antenna. A connector of a secure reader system having a reader is provided to physically couple to a container having an information storing mechanism, for periodically reading information from an information storing mechanism. The connector may draw material from the container simultaneous with the reading.
摘要翻译：电子存储装置与能够保持液体的容器结合，以电子地存储与存储在容器中的液体有关的信息。该系统可以配置有天线，用于将信息存储到电子存储装置中并从其读取信息。与天线耦合的基于微处理器的控制器可以用于基于通过天线从电子存储装置读取的信息来控制液体的处理。具有读取器的安全读取器系统的连接器被提供以物理地耦合到具有信息存储机构的容器，用于从信息存储机构周期性地读取信息。连接器可以与读数同时从容器中抽出材料。

5. 发明授权

US07702418B2 Secure reader system 有权
标题翻译：安全阅读器系统
公开(公告)号：US07702418B2
公开(公告)日：2010-04-20
申请号：US10742125
申请日：2003-12-19
申请人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
发明人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
IPC分类号： G06F17/00
CPC分类号： H01L21/6715 , B67D7/0283 , B67D7/348 , G06K19/07758 , G06K19/07762 , H01L21/67294
摘要： A secure reader system (SRS) for containers housing material to be employed in an application. A container is provided having an information storing mechanism. A connector of the SRS having a reader is provided to physically couple to the container for periodically reading information there from. The connector is configured to physically couple to the container and may draw material from the container simultaneous with the reading.
摘要翻译：用于容纳用于应用中的材料的容器的安全读取器系统（SRS）。提供具有信息存储机构的容器。提供具有读取器的SRS的连接器以物理地耦合到容器以便周期性地读取信息。连接器被配置为物理地耦合到容器并且可以与读数同时从容器中吸取材料。

6. 发明授权

US07025234B2 Apparatus and method for dispensing high-viscosity liquid 有权
公开(公告)号：US07025234B2
公开(公告)日：2006-04-11
申请号：US10247107
申请日：2002-09-19
申请人： Ryan Priebe , Kevin T. O'Dougherty , Nicholas Cheesebrow
发明人： Ryan Priebe , Kevin T. O'Dougherty , Nicholas Cheesebrow
IPC分类号： B65D83/00
CPC分类号： B67D7/0255 , B67D1/0054 , B67D7/0261 , Y10T137/85954
摘要： The present invention relates to apparatus and method for re-circulating high viscosity liquids. The apparatus comprises a recirculating probe coupled to a fluid storage and dispensing vessel by a connector, and the recirculating probe comprises: (a) a dip tube defining an output flow path; (b) an output port; (c) a recirculating port; and (d) a return flow path. The output flow path and the return flow path preferably have substantially equal cross-sectional areas, which reduce or eliminate the unbalance between the discharge pressure in the output line and that in the re-circulation line, and prevent premature wearing-out of the dispensing/recirculating pump. The output flow path and the return flow path can also be concentric to each other, which not only maximizes the effective flow area for both output and return flow paths within the limited cross-sectional area of the opening of the fluid vessel, but also avoids liquid turbulence and/or formation of air bubbles caused by free-fall drip introduction of the re-circulated liquid that is commonly observed in conventional recirculating probe designs.

7. 发明授权

US06206240B1 Liquid chemical dispensing system with pressurization 有权
标题翻译：液体化学分配系统加压
公开(公告)号：US06206240B1
公开(公告)日：2001-03-27
申请号：US09274723
申请日：1999-03-23
申请人： Michael L. Osgar , Kevin T. O'Dougherty
发明人： Michael L. Osgar , Kevin T. O'Dougherty
IPC分类号： B67D532
CPC分类号： B67D7/0255 , B67D7/3263
摘要： The present invention is a system for handling high purity liquid and a method for the same. The system has a container with a mouth. The container is configured to hold liquid. A cap is coupled with the mouth of the container. A connector is coupled with the cap. The connector has a connector head and a probe extending from the connector head. The probe is insertable through the cap and through the mouth into the container. The probe has a flow passage. The system also has a pressurization source that communicates with the container. Pressure delivered from the source acts upon the container forcing liquid out of the container through the flow passage in the probe. There is also a pressurization port communicating with the connector, the cap, and the pressurization source. Pressure from the pressurization source is delivered to the container when the cap and the connector are properly mated. Pressure from the pressurization source is not delivered to the container when the cap and the connector are not mated.
摘要翻译：本发明是用于处理高纯度液体的系统及其方法。系统有一个容器口。容器被配置成保持液体。盖与容器的口连接。连接器与盖连接。连接器具有连接器头和从连接器头延伸的探头。探头可以通过盖子插入并通过口进入容器。探头具有流动通道。该系统还具有与容器连通的加压源。从源输送的压力作用在容器上，迫使液体通过探针中的流动通道流出容器。还具有与连接器，盖和加压源连通的加压口。当盖和连接器适当配合时，来自加压源的压力被传送到容器。当帽和连接器不配合时，来自加压源的压力不会传递到容器。

8. 发明授权

US5293893A Empty drum detecting apparatus 失效
标题翻译：空鼓检测装置
公开(公告)号：US5293893A
公开(公告)日：1994-03-15
申请号：US009725
申请日：1993-01-27
申请人： Kevin T. O'Dougherty
发明人： Kevin T. O'Dougherty
IPC分类号： B67D1/12 , G05D7/06 , H01L21/00
CPC分类号： H01L21/6715 , B67D1/1247 , G05D7/0688 , Y10T137/2569 , Y10T137/3003 , Y10T137/87265
摘要： Empty drum detecting apparatus comprises an upright manifold chamber connected at its intermediate portion to a supply line extended to a supply drum of liquid chemical, and a pump for directing pumped liquid to process equipment utilizing the liquid chemical and having an inlet line. An outlet line is connected to the bottom portion of the upright manifold chamber and connected to the inlet line of the pump; and a shunt line with a flow restriction therein is connected between the upper portion of the manifold chamber and the outlet line for delivering collected gases and liquid to the inlet line and pump. An alternate flow restricting valve may be placed in the outlet line to restrict liquid flow from the lower portion of the manifold chamber. A capacitance proximity sensor is mounted above the inlet of the manifold chamber and senses the liquid level in the manifold chamber to produce an indication of the liquid level.
摘要翻译：空鼓检测装置包括在其中间部分处连接到延伸到液体化学品的供应鼓的供应管线的直立歧管室，以及用于将泵送的液体引导到利用液体化学品处理设备并具有入口管线的泵。出口管线连接到直立歧管腔室的底部并连接到泵的入口管线; 并且其中具有流动限制的分流管连接在歧管室的上部和用于将收集的气体和液体输送到入口管线和泵之间的出口管线。可以在出口管路中放置一个可选择的流量限制阀，以限制来自歧管腔室下部的液体流动。电容接近传感器安装在歧管腔室的入口上方，并感测歧管腔室中的液面以产生液面的指示。

9. 发明申请

US20140352735A1 ZERO LAG DISPENSE APPARATUS 审中-公开
公开(公告)号：US20140352735A1
公开(公告)日：2014-12-04
申请号：US14288991
申请日：2014-05-28
申请人： Don C. Burkman , Cary M. Ley , Kevin T. O'Dougherty , Charlie A. Peterson
发明人： Don C. Burkman , Cary M. Ley , Kevin T. O'Dougherty , Charlie A. Peterson
IPC分类号： H01L21/67
CPC分类号： H01L21/67051
摘要： A wafer cleaning method includes dispensing liquid chemicals at two flow rates to start a chemical reaction, with the second flow rate being lower than the first. The method also includes dispensing liquid waters at two flow rates to stop a chemical reaction, with the second flow rate being lower than the first.
摘要翻译：晶片清洗方法包括以两个流速分配液体化学品以开始化学反应，第二流量低于第一流量。该方法还包括以两个流速分配液体水以停止化学反应，第二流量低于第一流量。

10. 发明申请

US20110226806A1 FLUID STORAGE AND DISPENSING SYSTEMS AND PROCESSES 有权
标题翻译：流体储存和分配系统和流程
公开(公告)号：US20110226806A1
公开(公告)日：2011-09-22
申请号：US13149844
申请日：2011-05-31
申请人： Kevin T. O'Dougherty , Glenn M. Tom
发明人： Kevin T. O'Dougherty , Glenn M. Tom
IPC分类号： B67D7/06
CPC分类号： B67D7/0288 , B67D7/0261 , B67D7/32 , B67D7/3227 , B67D7/3281 , B67D7/34 , B67D7/344 , F16K35/00 , F16K35/025 , F16L37/08 , Y10T29/49826 , Y10T29/53
摘要： Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
摘要翻译：流体储存和分配系统和流程涉及用于流体储存和分配的各种结构方法，包括预先连接的验证联接件，其有效地用于流体储存和分配包装以确保适当的联接并避免流体污染问题，空的检测系统（例如，监测分配的液体介质的压力以检测压力下降条件）可用于流体储存和分配包装，其包括在流体分配操作中被压缩的衬垫，符合人体工程学的增强结构，以便于从加盖的容器移除分配连接器，用于防止容器盖的误用的系统，以及用于确保适当的分配组件和容器的联接的键盘系统。流体储存和分配系统实现了零或接近零的顶空特性，并且防止或改善了液体从液体分配到外包装容器内的作用。

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