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1. 发明授权

US08322571B2 Liner-based liquid storage and dispensing systems with empty detection capability 有权
标题翻译：具有空检测能力的基于液体的液体储存和分配系统
公开(公告)号：US08322571B2
公开(公告)日：2012-12-04
申请号：US11912613
申请日：2006-04-25
申请人： Minna Hovinen , John R. Kingery , Glenn M. Tom , Kevin T. O'Dougherty , Kirk Mikkelsen , Donald D. Ware , Peter C. Van Buskirk
发明人： Minna Hovinen , John R. Kingery , Glenn M. Tom , Kevin T. O'Dougherty , Kirk Mikkelsen , Donald D. Ware , Peter C. Van Buskirk
IPC分类号： B67C3/00
CPC分类号： B65D83/0061 , B01J4/02 , B01J2219/00065 , B01J2219/00067 , B01J2219/00069 , B01J2219/00164 , G01F23/18
摘要： Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
摘要翻译：用于储存和分配化学试剂和组合物的流体供应系统，例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物，具有在所含液体处于或等待时检测空或近空状态的能力，在分配操作期间接近耗尽。描述了使用空的检测装置的流体输送系统，包括压力传感器监测供应包装中间的分配材料和伺服液压分配泵，或监测在分配器中的分配器室补充时间，该分配器在循环调度中被补充以从分配器利用所分配的材料到下游工具。

2. 发明申请

US20110226806A1 FLUID STORAGE AND DISPENSING SYSTEMS AND PROCESSES 有权
标题翻译：流体储存和分配系统和流程
公开(公告)号：US20110226806A1
公开(公告)日：2011-09-22
申请号：US13149844
申请日：2011-05-31
申请人： Kevin T. O'Dougherty , Glenn M. Tom
发明人： Kevin T. O'Dougherty , Glenn M. Tom
IPC分类号： B67D7/06
CPC分类号： B67D7/0288 , B67D7/0261 , B67D7/32 , B67D7/3227 , B67D7/3281 , B67D7/34 , B67D7/344 , F16K35/00 , F16K35/025 , F16L37/08 , Y10T29/49826 , Y10T29/53
摘要： Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
摘要翻译：流体储存和分配系统和流程涉及用于流体储存和分配的各种结构方法，包括预先连接的验证联接件，其有效地用于流体储存和分配包装以确保适当的联接并避免流体污染问题，空的检测系统（例如，监测分配的液体介质的压力以检测压力下降条件）可用于流体储存和分配包装，其包括在流体分配操作中被压缩的衬垫，符合人体工程学的增强结构，以便于从加盖的容器移除分配连接器，用于防止容器盖的误用的系统，以及用于确保适当的分配组件和容器的联接的键盘系统。流体储存和分配系统实现了零或接近零的顶空特性，并且防止或改善了液体从液体分配到外包装容器内的作用。

3. 发明授权

US09079758B2 Fluid storage and dispensing systems and processes 有权
标题翻译：流体储存和分配系统和流程
公开(公告)号：US09079758B2
公开(公告)日：2015-07-14
申请号：US13149844
申请日：2011-05-31
申请人： Kevin T. O'Dougherty , Glenn M. Tom
发明人： Kevin T. O'Dougherty , Glenn M. Tom
IPC分类号： B67D7/06 , B67D7/02 , B67D7/32 , B67D7/34
CPC分类号： B67D7/0288 , B67D7/0261 , B67D7/32 , B67D7/3227 , B67D7/3281 , B67D7/34 , B67D7/344 , F16K35/00 , F16K35/025 , F16L37/08 , Y10T29/49826 , Y10T29/53
摘要： Fluid storage and dispensing systems and processes involving various structures methods for fluid storage and dispensing, including, pre-connect verification couplings that are usefully employed with fluid storage and dispensing packages to ensure proper coupling and avoid fluid contamination issues, empty detect systems (e.g., monitoring pressure of dispensed liquid medium to detect pressure droop conditions) useable with fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
摘要翻译：流体储存和分配系统和流程涉及用于流体储存和分配的各种结构方法，包括预先连接的验证联接件，其有效地用于流体储存和分配包装以确保适当的联接并避免流体污染问题，空的检测系统（例如，监测分配的液体介质的压力以检测压力下降条件）可用于流体储存和分配包装，其包括在流体分配操作中被压缩的衬垫，符合人体工程学的增强结构，以便于从加盖的容器移除分配连接器，用于防止容器盖的误用的系统，以及用于确保适当的分配组件和容器的联接的键盘系统。流体储存和分配系统实现了零或接近零的顶空特性，并且防止或改善了液体从液体分配到外包装容器内的作用。

4. 发明授权

US08336734B2 Liquid dispensing systems encompassing gas removal 有权
标题翻译：液体分配系统包括气体去除
公开(公告)号：US08336734B2
公开(公告)日：2012-12-25
申请号：US12304765
申请日：2007-06-11
申请人： Donald D. Ware , Glenn M. Tom , Paul Dathe , Amy Koland , Jason Gerold , Kirk Mikkelsen , Kevin T. O'Dougherty , Michael A. Cisewski
发明人： Donald D. Ware , Glenn M. Tom , Paul Dathe , Amy Koland , Jason Gerold , Kirk Mikkelsen , Kevin T. O'Dougherty , Michael A. Cisewski
IPC分类号： B67D7/00
CPC分类号： B67D7/763 , B65D83/62 , B67D7/0261 , Y10T137/313
摘要： Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.
摘要翻译：描述了用于递送液体和气体或气体状态同时存在的各种材料的系统，优选地包括含有流体的可折叠衬垫。在从其分配液体之前，从压力分配包装中取出顶空气体，然后在分配操作期间移除入口气体。至少一个传感器感测储存器或气液分离区域中气体或气 - 液界面的存在。包括整体储存器，至少一个传感器和至少一个流量控制元件的气体去除系统可以包括在适于与压力分配包装件配合的连接器内，用于从容器中分配的液体高效地去除气体。

5. 发明申请

US20100133292A1 LIQUID DISPENSING SYSTEMS ENCOMPASSING GAS REMOVAL 有权
标题翻译：液体分配系统去除气体
公开(公告)号：US20100133292A1
公开(公告)日：2010-06-03
申请号：US12304765
申请日：2007-06-11
申请人： Donald D. Ware , Glenn M. Tom , Paul Dathe , Amy Koland , Jason Gerold , Kirk Mikkelsen , Kevin T. O'Dougherty , Michael A. Cisewski
发明人： Donald D. Ware , Glenn M. Tom , Paul Dathe , Amy Koland , Jason Gerold , Kirk Mikkelsen , Kevin T. O'Dougherty , Michael A. Cisewski
IPC分类号： B67D7/00 , B67D7/06 , B65D35/56 , B67D7/08 , B65D83/00
CPC分类号： B67D7/763 , B65D83/62 , B67D7/0261 , Y10T137/313
摘要： Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.
摘要翻译：描述了用于递送液体和气体或气体状态同时存在的各种材料的系统，优选地包括含有流体的可折叠衬垫。在从其分配液体之前，从压力分配包装中取出顶空气体，然后在分配操作期间移除入口气体。至少一个传感器感测储存器或气液分离区域中气体或气 - 液界面的存在。包括整体储存器，至少一个传感器和至少一个流量控制元件的气体去除系统可以包括在适于与压力分配包装件配合的连接器内，用于从容器中分配的液体高效地去除气体。

6. 发明申请

US20100112815A1 FLUID STORAGE AND DISPENSING SYSTEMS AND PROCESSES 审中-公开
标题翻译：流体储存和分配系统和流程
公开(公告)号：US20100112815A1
公开(公告)日：2010-05-06
申请号：US11915996
申请日：2006-06-05
申请人： Kevin T. O'Dougherty , Glenn M. Tom
发明人： Kevin T. O'Dougherty , Glenn M. Tom
IPC分类号： H01L21/30 , B67D7/06 , B65D35/56 , B67D7/10 , B65D83/00 , G05D7/00 , B67D7/00 , B65D17/34 , B65D41/06 , B23P19/04 , B23P11/00
CPC分类号： B67D7/0288 , B67D7/0261 , B67D7/32 , B67D7/3227 , B67D7/3281 , B67D7/34 , B67D7/344 , F16K35/00 , F16K35/025 , F16L37/08 , Y10T29/49826 , Y10T29/53
摘要： Fluid storage and dispensing systems and processes involving various devices, structures and arrangements, as well as techniques and methods, for fluid storage and dispensing, including, without limitation, pre-connect verification couplings that are usefully employed in application to fluid storage and dispensing packages, to ensure proper coupling and avoid fluid contamination issues, empty detect systems that are usefully employed for fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems are described, which achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
摘要翻译：涉及用于流体储存和分配的各种装置，结构和布置以及技术和方法的流体存储和分配系统和方法，包括但不限于预先连接的验证联接器，其有效地用于流体储存和分配包装，以确保正确耦合并避免流体污染问题，空气检测系统有效地用于流体储存和分配包装，包括在流体分配操作中被压缩的衬垫，符合人体工程学的增强结构，便于将分配连接器从封盖船舶，船帽完整性保证系统，防止船只盖的误用，以及键盘系统，用于确保合适的分配组件和船只的连接。描述了流体存储和分配系统，其实现零或接近零的顶空特征，并且防止或改善在外包装容器中的衬垫中的液体分配中的增溶作用。

7. 发明申请

US20090314798A1 LINER-BASED LIQUID STORAGE AND DISPENSING SYSTEMS WITH EMPTY DETECTION CAPABILITY 有权
标题翻译：基于液体的液体存储和分配系统具有空白检测能力
公开(公告)号：US20090314798A1
公开(公告)日：2009-12-24
申请号：US11912613
申请日：2006-04-25
申请人： Minna Hovinen , John R. Kingery , Glenn M. Tom , Kevin T. O'Dougherty , Kirk Mikkelsen , Donald D. Ware , Peter C. Van Buskirk
发明人： Minna Hovinen , John R. Kingery , Glenn M. Tom , Kevin T. O'Dougherty , Kirk Mikkelsen , Donald D. Ware , Peter C. Van Buskirk
IPC分类号： B67D5/06 , B65D83/62
CPC分类号： B65D83/0061 , B01J4/02 , B01J2219/00065 , B01J2219/00067 , B01J2219/00069 , B01J2219/00164 , G01F23/18
摘要： Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
摘要翻译：用于储存和分配化学试剂和组合物的流体供应系统，例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物，具有在所含液体处于或等待时检测空或近空状态的能力，在分配操作期间接近耗尽。描述了使用空的检测装置的流体输送系统，包括压力传感器监测供应包装中间的分配材料和伺服液压分配泵，或监测在分配器中的分配器室补充时间，该分配器在循环调度中被补充以从分配器利用所分配的材料到下游工具。

8. 发明申请

US20090212071A1 MATERIAL STORAGE AND DISPENSING PACKAGES AND METHODS 审中-公开
标题翻译：材料储存和分配包和方法
公开(公告)号：US20090212071A1
公开(公告)日：2009-08-27
申请号：US11912629
申请日：2006-04-25
申请人： Glenn M. Tom , John R. Kingery , Kevin T. O'Dougherty , Kirk Mikkelsen , Michele Alberg , Patrick M. Olson , Tim Hoyt
发明人： Glenn M. Tom , John R. Kingery , Kevin T. O'Dougherty , Kirk Mikkelsen , Michele Alberg , Patrick M. Olson , Tim Hoyt
IPC分类号： B65D81/18 , B65D37/00 , B65D81/20 , B32B3/26 , B32B27/34 , B32B27/32 , B65D35/28
CPC分类号： B65D33/00 , B65B31/003 , B65D83/0061 , B65D83/62 , Y10T428/249981 , Y10T428/31757
摘要： Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.
摘要翻译：用于存储和分配材料的包装和方法，例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物，包括适于压力分配高纯度液体的容纳结构和方法。描述了液体或含液体介质的衬里包装，其中使用零或近零零的顶部空间构象来最小化产生颗粒的不利影响，气泡的形成和所含材料的劣化。

9. 发明申请

US20140352738A1 ZERO LAG DISPENSE APPARATUS 审中-公开
公开(公告)号：US20140352738A1
公开(公告)日：2014-12-04
申请号：US14289017
申请日：2014-05-28
申请人： Don C. Burkman , Cary M. Ley , Kevin T. O'Dougherty , Charlie A. Peterson
发明人： Don C. Burkman , Cary M. Ley , Kevin T. O'Dougherty , Charlie A. Peterson
IPC分类号： H01L21/67
CPC分类号： H01L21/67051
摘要： A liquid dispenser for a wafer processing system includes a supply tube with an inlet at one end and an outlet at the other end. Attached to the supply tube at the outlet end is a liquid reservoir. The liquid reservoir has a dispensing plate that has an outlet for dispensing liquid onto a wafer. There is also a dispensing valve for controlling the dispensing of the liquid.
摘要翻译：用于晶片处理系统的液体分配器包括在一端具有入口并在另一端具有出口的供给管。在出口端连接到供应管是液体储存器。液体储存器具有分配板，该分配板具有用于将液体分配到晶片上的出口。还有一个用于控制液体分配的分配阀。

10. 发明申请

US20100152891A1 LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE 有权
标题翻译：具有电子信息存储的液体处理系统
公开(公告)号：US20100152891A1
公开(公告)日：2010-06-17
申请号：US12707449
申请日：2010-02-17
申请人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
发明人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
IPC分类号： G06F17/00
CPC分类号： G05D7/0617 , B67D7/0283 , B67D7/348 , Y10T137/0318 , Y10T137/8158
摘要： An electronic storage device is coupled with a container capable of holding liquid for electronically storing information relating to the liquid stored in the container. The system can be configured with an antenna, for storing information to and reading information from the electronic storage device. A microprocessor-based controller, coupled with the antenna, may be employed for controlling processing of the liquid based on information read from the electronic storage device by the antenna. A connector of a secure reader system having a reader is provided to physically couple to a container having an information storing mechanism, for periodically reading information from an information storing mechanism. The connector may draw material from the container simultaneous with the reading.
摘要翻译：电子存储装置与能够保持液体的容器结合，以电子地存储与存储在容器中的液体有关的信息。该系统可以配置有天线，用于将信息存储到电子存储装置中并从其读取信息。与天线耦合的基于微处理器的控制器可以用于基于通过天线从电子存储装置读取的信息来控制液体的处理。具有读取器的安全读取器系统的连接器被提供以物理地耦合到具有信息存储机构的容器，用于从信息存储机构周期性地读取信息。连接器可以与读数同时从容器中抽出材料。

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