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    • 1. 发明授权
    • Method for producing semiconductor optical device
    • 半导体光学元件的制造方法
    • US08617969B2
    • 2013-12-31
    • US13530154
    • 2012-06-22
    • Kenji SakuraiHideki YagiHiroyuki Yoshinaga
    • Kenji SakuraiHideki YagiHiroyuki Yoshinaga
    • H01L21/00
    • H01L33/0075H01S5/2275
    • A method for producing a semiconductor optical device includes the steps of growing a semiconductor stacked layer including an etch stop layer and a plurality of semiconductor layers on a major surface of a substrate; forming a mask layer on a top surface of the semiconductor stacked layer so that a tip portion of each of protrusions that protrude from the top surface among protrusions generated in the step of growing the semiconductor stacked layer is exposed; etching the protrusion by wet etching using the mask layer; after etching the protrusion by wet etching, removing the protrusion by dry etching; and removing the mask layer from the top surface, after removing the protrusion by dry etching.
    • 一种制造半导体光学器件的方法包括以下步骤:在衬底的主表面上生长包括蚀刻停止层和多个半导体层的半导体堆叠层; 在所述半导体层叠层的顶面上形成掩模层,使得在所述半导体堆叠层的生长步骤中产生的突起中从所述顶面突出的突起的前端部露出; 通过使用掩模层的湿蚀刻来蚀刻突起; 在通过湿蚀刻蚀刻突起之后,通过干蚀刻去除突起; 并且通过干蚀刻去除突起之后从顶表面去除掩模层。
    • 4. 发明授权
    • Method for producing semiconductor optical device and semiconductor optical device
    • 半导体光学器件和半导体光学器件的制造方法
    • US08450128B2
    • 2013-05-28
    • US13267952
    • 2011-10-07
    • Hideki YagiHiroyuki Yoshinaga
    • Hideki YagiHiroyuki Yoshinaga
    • H01L21/00
    • H01S5/0202H01S5/0203H01S5/22H01S5/2213
    • A method for producing a semiconductor optical device includes the steps of forming a semiconductor region including a ridge structure on a substrate; forming an insulating film on the semiconductor region; forming a non-photosensitive resin region on the insulating film, forming a first mask that defines a scribe area; forming the scribe area by etching using the first mask; after removing the first mask, forming an insulating layer by etching the insulating film, forming an electrode on the ridge structure and the non-photosensitive resin region to produce a substrate product; forming a scribe line on a surface of the semiconductor region in the scribe area of the substrate product; and cutting the product along the scribe line to form a semiconductor laser bar.
    • 一种制造半导体光学器件的方法包括以下步骤:在衬底上形成包括脊结构的半导体区域; 在半导体区域上形成绝缘膜; 在所述绝缘膜上形成非感光性树脂区域,形成限定划线区域的第一掩模; 通过使用第一掩模的蚀刻形成划线区域; 在去除第一掩模之后,通过蚀刻绝缘膜形成绝缘层,在脊结构和非感光树脂区上形成电极以产生基底产物; 在基板产品的划线区域中的半导体区域的表面上形成划线; 并沿着划线切割产品以形成半导体激光条。
    • 6. 发明授权
    • Composite laser rod, fabricating method thereof, and laser device therewith
    • 复合激光棒及其制造方法及激光装置
    • US07496125B2
    • 2009-02-24
    • US11561301
    • 2006-11-17
    • Hikaru KoutaYoshikazu SuzukiShuetsu KudoMasaki TsunekaneKatsuji MukaiharaTakagimi YanagitaniHideki Yagi
    • Hikaru KoutaYoshikazu SuzukiShuetsu KudoMasaki TsunekaneKatsuji MukaiharaTakagimi YanagitaniHideki Yagi
    • H01S3/14H01S3/07
    • H01S3/061H01S3/025H01S3/0407H01S3/042H01S3/0612H01S3/08095H01S3/0941H01S3/09415
    • As a composite laser rod capable of satisfying the positional stability and output stability of a laser beam, a laser rod in which a laser active element is doped is intimately inserted into a hollow portion of a non-doped ceramic pipe that has a crystal structure the same as the laser rod followed by baking so as to remove a gap and strain at an interface between the laser rod and the ceramic pipe after the baking further followed by polishing a surface of the ceramic pipe to form a ceramic skin layer, and thereby a composite laser rod is formed. In the composite laser rod, an influence due to fluctuation in the cooling capacity of cooling water or a heat sink is averaged by a non-doped skin layer, temperature fluctuation of the laser rod is suppressed, and an influence of vibration from the cooling water or a cooling fan can be suppressed. When the refractive index of the laser rod is made higher than that of the ceramic pipe, a high efficiency oscillation can be realized, and furthermore when the thermal conductivity of the ceramic pipe is made higher than that of the laser rod, the thermal lens effect can be alleviated.
    • 作为能够满足激光的位置稳定性和输出稳定性的复合激光棒,将激光激光元件掺杂的激光棒紧密地插入到具有晶体结构的非掺杂陶瓷管的中空部分 与激光棒相同,随后烘烤,以便在烘烤之后除去激光棒和陶瓷管之间的界面处的间隙和应变,然后对陶瓷管的表面进行抛光以形成陶瓷表皮层,由此 形成复合激光棒。 在复合激光棒中,由于冷却水或散热器的冷却能力的波动引起的影响由非掺杂表层平均化,激光棒的温度波动被抑制,来自冷却水的振动的影响 或者可以抑制冷却风扇。 当激光棒的折射率高于陶瓷管的折射率时,可以实现高效率的振荡,此外,当陶瓷管的导热率高于激光棒的热导率时,热透镜效应 可以缓解。