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    • 2. 发明授权
    • Electron emission element with schottky junction
    • 具肖特基结的电子发射元件
    • US5554859A
    • 1996-09-10
    • US557678
    • 1995-11-13
    • Takeo TsukamotoNobuo WatanabeToshihiko TakedaMasahiko Okunuki
    • Takeo TsukamotoNobuo WatanabeToshihiko TakedaMasahiko Okunuki
    • H01J1/308H01J9/02H01L29/06H01L29/12
    • H01J1/308H01J9/022
    • This is an electron emission with a semiconductor substrate having a p-type semiconductor layer whose impurity concentration falls within a concentration range for causing an avalanche breakdown in a least a portion of a surface of the semiconductor layer. A Schottky electrode is connected to the semiconductor layer. There are a means for applying a reverse bias voltage between the Schottky electrode and the p-type semiconductor layer to cause the Schotty electrode to emit electrons, and a lead electrode, formed at a proper position, for externally guiding the emitted electrons. At least a portion of the Schottky electrode is formed of a thin film of a material selected from metals of Group 1A, Group 2A, Group 3A, and lanthanoids, metal silicides of Group 1A, Group 2A, Group Group 3A, and lanthanoids, and metal borides of Group 1A, Group 2A, Group 3A, and lanthanoids, and metal carbides of Group 4A. A film thickness of the Schotty electrode is set to be not more than 100 .ANG..
    • 这是具有半导体衬底的电子发射,其半导体衬底具有p型半导体层,其杂质浓度落在半导体层的表面的至少一部分中引起雪崩击穿的浓度范围内。 肖特基电极连接到半导体层。 存在在肖特基电极和p型半导体层之间施加反向偏置电压以使Schotty电极发射电子的装置和形成在适当位置的引线电极,用于外部引导发射的电子。 肖特基电极的至少一部分由选自组1A,组2A,组3A和镧系元素的金属的薄膜,组1A,组2A,组3A和镧系元素的金属硅化物形成,以及 第1A组,第2A组,第3A组和镧系金属硼化物,以及4A组金属碳化物。 将Schotty电极的膜厚设定为不超过100。
    • 9. 发明授权
    • Semiconductor electron emission element
    • 半导体电子发射元件
    • US5414272A
    • 1995-05-09
    • US224192
    • 1994-04-07
    • Nobuo WatanabeMasahiko OkunukiTakeo Tsukamoto
    • Nobuo WatanabeMasahiko OkunukiTakeo Tsukamoto
    • H01L29/872H01J1/308H01J9/02H01L29/47H01L29/48H01L29/56H01L29/64
    • H01J1/308H01J9/022
    • A semiconductor element emission element having a Schottky junction in a surface region of a semiconductor, comprises a first region having a first carrier concentration, a second region having a second carrier concentration, and a third region having a third carrier concentration. All of the regions are located below an electrode forming the Schottky junction. The first, second, and third carrier concentrations satisfy a condition that the first carrier concentration of the first region is higher than the second carrier concentration of the second region and that the second carrier concentration of the second region is higher than the third carrier concentration of the third region. The first, second, and third regions have a structure that at least one second region having the second carrier concentration is located inside the third region of the third carrier concentration, and that at lease one first region having the first carrier concentration is located inside said second region having the second carrier concentration.
    • 在半导体的表面区域中具有肖特基结的半导体元件发光元件包括具有第一载流子浓度的第一区域,具有第二载流子浓度的第二区域和具有第三载流子浓度的第三区域。 所有区域都位于形成肖特基结的电极之下。 第一,第二和第三载流子浓度满足第一区域的第一载流子浓度高于第二区域的第二载流子浓度,并且第二区域的第二载流子浓度高于第二区域的第三载流子浓度的条件 第三个地区。 第一,第二和第三区域具有以下结构:具有第二载流子浓度的至少一个第二区域位于第三载流子浓度的第三区域内,并且至少具有第一载流子浓度的第一区域位于所述 第二区域具有第二载流子浓度。