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    • 9. 发明申请
    • Method for fabricating a simplified CMOS polysilicon thin film transistor and resulting structure
    • 制造简化的CMOS多晶硅薄膜晶体管及其结构的方法
    • US20020004264A1
    • 2002-01-10
    • US09941200
    • 2001-08-28
    • Salman Akram
    • H01L021/00H01L021/84H01L021/8238
    • H01L27/127H01L27/1214Y10S257/928
    • A method of forming a MOS device using doped and activated n-type and p-type polysilicon layers includes forming a first doped and activated polysilicon area (either n-type and p-type) on a substrate. An isolation material layer is formed abutting the first activated area. A second doped and activated polysilicon area of opposite conductivity type from the first activated area is formed adjacent to the isolation material layer. The second activated opposite area has a height that does not exceed that of the first doped and activated polysilicon layer. Further processing may be effected to complete the MOS device. The method of the present invention eliminates ion implantation and annealing steps used in previously existing methods.
    • 使用掺杂和活化的n型和p型多晶硅层形成MOS器件的方法包括在衬底上形成第一掺杂和活化的多晶硅区域(n型和p型)。 形成邻接第一激活区域的隔离材料层。 与隔离材料层相邻地形成有与第一激活区域相反的导电类型的第二掺杂和活化多晶硅区域。 第二激活的相对区域的高度不超过第一掺杂和活化多晶硅层的高度。 可以进一步处理以完成MOS器件。 本发明的方法消除了先前存在的方法中使用的离子注入和退火步骤。