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1. 发明授权

US09851548B2 Optical microscope device and testing apparatus comprising same 有权
公开(公告)号：US09851548B2
公开(公告)日：2017-12-26
申请号：US14240323
申请日：2012-07-19
申请人： Kei Shimura , Tetsuya Niibori , Mizuki Oku , Naoya Nakai
发明人： Kei Shimura , Tetsuya Niibori , Mizuki Oku , Naoya Nakai
IPC分类号： H04N7/18 , G02B21/36 , G02B21/00 , G02B21/10 , G02B21/06 , G01N23/22
CPC分类号： G02B21/361 , G01N23/2206 , G02B21/0016 , G02B21/06 , G02B21/10 , G02B21/365
摘要： The present invention allows observation or capturing of a high-contrast image of a sample for which sufficient contrast cannot be obtained in bright-field observation, such as a wafer having a pattern with a small pattern height. According to the present invention, a sample is illuminated through an objective lens used for capturing an image, and an imaging optics are provided with an aperture filter so that an image is captured while light of bright-field observation components is significantly attenuated.

2. 发明申请

US20140210983A1 OPTICAL MICROSCOPE DEVICE AND TESTING APPARATUS COMPRISING SAME 有权
标题翻译：光学显微镜装置和包含其的测试装置
公开(公告)号：US20140210983A1
公开(公告)日：2014-07-31
申请号：US14240323
申请日：2012-07-19
申请人： Kei Shimura , Tetsuya Niibori , Mizuki Oku , Naoya Nakai
发明人： Kei Shimura , Tetsuya Niibori , Mizuki Oku , Naoya Nakai
IPC分类号： G02B21/36 , G02B21/06
CPC分类号： G02B21/361 , G01N23/2206 , G02B21/0016 , G02B21/06 , G02B21/10 , G02B21/365
摘要： The present invention allows observation or capturing of a high-contrast image of a sample for which sufficient contrast cannot be obtained in bright-field observation, such as a wafer having a pattern with a small pattern height. According to the present invention, a sample is illuminated through an objective lens used for capturing an image, and an imaging optics are provided with an aperture filter so that an image is captured while light of bright-field observation components is significantly attenuated.
摘要翻译：本发明允许在诸如具有小图案高度的图案的晶片的明视场观察中不能获得足够对比度的样品的高对比度图像的观察或捕获。根据本发明，通过用于拍摄图像的物镜照射样品，并且成像光学器件设置有孔径滤光器，使得在明视野观察成分的光被显着衰减的同时拍摄图像。

3. 发明授权

US08976347B2 Inspection apparatus 有权
标题翻译：检验仪器
公开(公告)号：US08976347B2
公开(公告)日：2015-03-10
申请号：US14236888
申请日：2012-08-03
申请人： Mizuki Oku , Kei Shimura
发明人： Mizuki Oku , Kei Shimura
IPC分类号： G01N21/00 , G01N21/95 , G01N21/88
CPC分类号： G01N21/9501 , G01N21/8806
摘要： Light that is scattered by a defect on a wafer is very weak, and a PMT and an MPPC are used as detection methods for measuring the weak light with high speed and sensitivity. The methods have a function of photoelectronically converting the weak light and multiplying an electron, but have a problem in that a signal light is lost and an S/N ratio is reduced because the quantum efficiency of the photoelectron conversion is as low as 50% or less. Direct light is amplified prior to the photoelectron conversion. The optical amplification is an amplification method in which the signal light and light of pump light are introduced into a rare-earth doped fiber, a stimulated emission is caused, and the signal light is amplified. In the present invention, the optical amplification is used. The amplification factor is changed according to various conditions.
摘要翻译：由于晶片上的缺陷而散射的光非常弱，并且使用PMT和MPPC作为用于以高速度和灵敏度测量弱光的检测方法。这些方法具有光电子转换弱光和乘电子的功能，但存在信号光损失并且S / N比降低的问题，因为光电子转换的量子效率低至50％或减。直接光在光电子转换之前被放大。光放大是将信号光和泵浦光的光引入到稀土掺杂光纤中的放大方法，引起受激发射，信号光被放大。在本发明中，使用光放大。放大系数根据各种条件而变化。

4. 发明申请

US20130148113A1 INSPECTION APPARATUS AND INSPECTION METHOD 审中-公开
标题翻译：检查装置和检查方法
公开(公告)号：US20130148113A1
公开(公告)日：2013-06-13
申请号：US13579965
申请日：2010-12-20
申请人： Mizuki Oku , Minori Noguchi , Hiroshi Kawaguchi , Kazuo Takahashi , Kei Shimura
发明人： Mizuki Oku , Minori Noguchi , Hiroshi Kawaguchi , Kazuo Takahashi , Kei Shimura
IPC分类号： G01N21/88
CPC分类号： G01N21/88 , G01N21/8806 , G01N21/9501 , G01N2201/062 , G01N2201/08
摘要： The light scattered from the sample surface and foreign matter is imaged on an image intensifier and detected by a lens-coupled multi-pixel sensor such as a TDI sensor or a CCD sensor. The light scattered by surface roughness is spatially eliminated to detect the light scattered from foreign matter with increased sensitivity. A mechanism for shifting the image intensifier is incorporated to prevent a signal intensity decrease, which may be caused by a decrease in the sensitivity of the image intensifier.
摘要翻译：从样品表面散射的光和异物在图像增强器上成像，并由诸如TDI传感器或CCD传感器的透镜耦合多像素传感器检测。通过表面粗糙度散射的光在空间上消除，以增加敏感度来检测从异物散射的光。并入用于移动图像增强器的机构以防止由于图像增强器的灵敏度的降低而引起的信号强度降低。

5. 发明申请

US20140160470A1 INSPECTION APPARATUS 有权
标题翻译：检查装置
公开(公告)号：US20140160470A1
公开(公告)日：2014-06-12
申请号：US14236888
申请日：2012-08-03
申请人： Mizuki Oku , Kei Shimura
发明人： Mizuki Oku , Kei Shimura
IPC分类号： G01N21/95
CPC分类号： G01N21/9501 , G01N21/8806
摘要： Light that is scattered by a defect on a wafer is very weak, and a PMT and an MPPC are used as detection methods for measuring the weak light with high speed and sensitivity. The methods have a function of photoelectronically converting the weak light and multiplying an electron, but have a problem in that a signal light is lost and an S/N ratio is reduced because the quantum efficiency of the photoelectron conversion is as low as 50% or less. Direct light is amplified prior to the photoelectron conversion. The optical amplification is an amplification method in which the signal light and light of pump light are introduced into a rare-earth doped fiber, a stimulated emission is caused, and the signal light is amplified. In the present invention, the optical amplification is used. The amplification factor is changed according to various conditions.
摘要翻译：由于晶片上的缺陷而散射的光非常弱，并且使用PMT和MPPC作为用于以高速度和灵敏度测量弱光的检测方法。这些方法具有光电子转换弱光和乘电子的功能，但存在信号光损失并且S / N比降低的问题，因为光电子转换的量子效率低至50％或减。直接光在光电子转换之前被放大。光放大是将信号光和泵浦光的光引入到稀土掺杂光纤中的放大方法，引起受激发射，信号光被放大。在本发明中，使用光放大。放大系数根据各种条件而变化。

6. 发明申请

US20130088590A1 FAR INFRARED IMAGING DEVICE AND IMAGING METHOD USING SAME 审中-公开
标题翻译：红外成像装置和使用相同的成像方法
公开(公告)号：US20130088590A1
公开(公告)日：2013-04-11
申请号：US13702594
申请日：2011-07-19
申请人： Kei Shimura , Naoya Nakai
发明人： Kei Shimura , Naoya Nakai
IPC分类号： H04N5/33
CPC分类号： H04N5/33 , G01N21/3581
摘要： Provided are a far infrared imaging device that illuminates a specimen with far infrared light and detects an image of the specimen, which is a device capable of imaging a specimen speedily without using a high-power light source and without generating damage or a non-linear phenomenon in the specimen as a target to be imaged and a method using the same. A specimen is illuminated with the far infrared light in a line shape or in a shape of a plurality of points arranged in line on the specimen; and an image of the specimen is detected while moving the specimen in a direction perpendicular to the line illuminated by the far infrared light. The far infrared light is emitted by applying pulsed pump light from a femtosecond pulse light source to the far infrared light emission element.
摘要翻译：提供了一种远红外成像装置，其以远红外光照射样本并检测样本的图像，该图像是能够快速成像样本而不使用高功率光源并且不产生损伤或非线性的装置作为成像对象的样本中的现象以及使用该目标的方法。用远红外线照射样品为线状或者在样品上排列成多个点的形状; 并且在垂直于由远红外线照射的线的方向移动样本的同时检测样本的图像。通过将脉冲泵浦光从飞秒脉冲光源施加到远红外光发射元件来发射远红外光。

7. 发明申请

US20130320216A1 DEVICE FOR DETECTING FOREIGN MATTER AND METHOD FOR DETECTING FOREIGN MATTER 有权
标题翻译：用于检测外部事项的装置和检测外部事项的方法
公开(公告)号：US20130320216A1
公开(公告)日：2013-12-05
申请号：US13984286
申请日：2012-02-01
申请人： Kenji Aiko , Shigeya Tanaka , Yasuko Aoki , Hiroshi Kawaguchi , Kei Shimura
发明人： Kenji Aiko , Shigeya Tanaka , Yasuko Aoki , Hiroshi Kawaguchi , Kei Shimura
IPC分类号： G01N21/88
CPC分类号： G01N21/88 , G01B11/303 , G01N21/3563 , G01N21/3581 , G01N21/8806 , G01N21/94 , H01M4/0404 , H01M4/139 , Y02E60/122
摘要： The present invention provides a device for detecting foreign matter and a method for detecting foreign matter to detect a foreign matter on a surface of an object such as a film of an electrode mixture etc. or a foreign matter contained in the object, thereby to improve the reliability of the object. By irradiating an object with a terahertz illumination light 100 (wavelength of 4 μm to 10 mm) and detecting a scattered light 660 from an electrode 10 as an example of the object by a scattered light detector 200, a foreign matter on a surface of the electrode 10 or contained in the electrode 10, for example, a metal foreign matter 720, is detected. The electrode 10 is one in which electrode mixture layers 700 each including an active material 701, conductive additive and a binder as components are coated on both surfaces of a collector 710. The scattered light 660 results from a part of a transmitted light 656 reflected by the metal foreign matter 720.
摘要翻译：本发明提供一种检测异物的装置和检测异物以检测诸如电极混合物等的膜或物体中包含的异物的物体的表面上的异物的方法，从而改善对象的可靠性。通过用太赫兹照明光100（波长4μm至10mm）照射物体并通过散射光检测器200从作为物体的实例的电极10检测散射光660，在该表面上的异物检测电极10中或容纳在电极10中的金属异物720。电极10是其中各自包含活性材料701，导电添加剂和作为组分的粘合剂的电极混合物层700涂覆在集电体710的两个表面上的。散射光660由透射光656的一部分反射，金属异物720。

8. 发明授权

US07821644B2 Apparatus for visual inspection 有权
标题翻译：目视检查装置
公开(公告)号：US07821644B2
公开(公告)日：2010-10-26
申请号：US11262826
申请日：2005-11-01
申请人： Mitsuhiro Kamei , Kei Shimura
发明人： Mitsuhiro Kamei , Kei Shimura
IPC分类号： G01B9/02
CPC分类号： G01N21/21 , G03F1/84
摘要： An apparatus is provided which reduces the dependency of the direction of polarization on channels of an image sensor so as to improve the sensitivity of inspection. In the apparatus, the direction of an illumination beam incident on a polarizing beam splitter is made to be substantially parallel to the longitudinal direction of a field of view of an image sensor projected on the polarizing beam splitter.
摘要翻译：提供一种降低偏振方向对图像传感器的通道的依赖性的装置，以提高检查的灵敏度。在该装置中，使入射到偏振分束器上的照明光束的方向基本上平行于投射在偏振分束器上的图像传感器的视场的纵向方向。

9. 发明申请

US20090161943A1 INSPECTION APPARATUS AND INSPECTION METHOD 失效
标题翻译：检查装置和检查方法
公开(公告)号：US20090161943A1
公开(公告)日：2009-06-25
申请号：US12338528
申请日：2008-12-18
申请人： Hiroyuki Yamashita , Norio Sakaiya , Kei Shimura , Masaaki Ito
发明人： Hiroyuki Yamashita , Norio Sakaiya , Kei Shimura , Masaaki Ito
IPC分类号： G01N21/88 , G06T11/20 , G06K9/00
CPC分类号： G01N21/88 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/8848 , G01N2021/8861 , G06K9/2036 , G06K2209/19 , G06T7/00
摘要： The invention is directed to find a false defect from defect candidates and obtain a threshold with which the false defect can be eliminated by the smallest number of review times. Defect candidates are reviewed and selected as a defect or a false defect. By deleting a defect candidate having a characteristic quantity equal to or less than that of the false defect from a map or displaying it in another sign, the false defect can be determined visually. Since the defect candidate having the characteristic quantity equal to or less than that of the selected false defect is deleted from the map or displayed in another sign, the defect candidates unnecessary to set a threshold are not reviewed. The number of defect candidates to be reviewed can be largely reduced as compared with that in the conventional technique. Further, by repeating the above work, the threshold is automatically calculated, and an inspection result map with the threshold is displayed, so that a re-inspection is unnecessary.
摘要翻译：本发明旨在从缺陷候选中找到虚假缺陷，并获得最小次数的审查时间可以消除错误缺陷的阈值。缺陷候选者被审查和选择为缺陷或假缺陷。通过从地图中删除具有等于或小于虚假缺陷的特征量的缺陷候选物，或者以另一个符号显示，可以视觉地确定假缺陷。由于具有等于或小于所选择的错误缺陷的特征量的缺陷候选者从地图中删除或以另一个符号显示，所以不会检查不必设置阈值的缺陷候选。与常规技术相比，可以大大减少待审查的缺陷候选物的数量。此外，通过重复上述工作，自动计算阈值，并且显示具有阈值的检查结果图，使得不需要重新检查。

10. 发明授权

US5949569A Projection display apparatus and spatial light modulation device applied to the same 失效
标题翻译：投影显示装置和应用于其的空间光调制装置
公开(公告)号：US5949569A
公开(公告)日：1999-09-07
申请号：US795867
申请日：1997-02-07
申请人： Kei Shimura
发明人： Kei Shimura
IPC分类号： G02F1/13 , G02F1/1337 , G02F1/1343 , G02F1/139 , G03B21/00 , H04N5/74 , G02F1/03 , G02F1/01 , G02F1/29
CPC分类号： G02F1/134309 , G02F1/134363 , G02F1/1393 , G02F2001/133738
摘要： A projection display apparatus includes a light source, a spatial light modulation device, a condenser lens, an aperture stop, and a projecting lens. When the spatial period of complex amplitude modulation in the spatial light modulation device is represented by p, the center wavelength of the incident light is represented by .lambda., and a half angle subtended by an area around an opening edge of the aperture stop at the condenser lens along the first direction is represented by .theta.asx, parameters of the light source, the spatial light modulation device, the condenser lens, the screen, the aperture stop and the projecting lens and a relative positional relationship therebetween are defined such that the following condition is satisfied:0.35
摘要翻译：投影显示装置包括光源，空间光调制装置，聚光透镜，孔径光阑和投影透镜。当空间光调制装置中的复数幅度调制的空间周期由p表示时，入射光的中心波长由λ表示，并且在冷凝器处由孔径的开口边缘周围的开口边缘附近的区域所对应的半角沿着第一方向的透镜由θasx表示，光源的参数，空间光调制装置，聚光透镜，屏幕，孔径光阑和投影透镜以及它们之间的相对位置关系被定义为使得以下条件满足：0.35 <θasx / arcsin（λ/ p)<0.6。

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