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    • 4. 发明授权
    • Pressure transducer with temperature compensation circuit
    • 带温度补偿电路的压力传感器
    • US4556807A
    • 1985-12-03
    • US522227
    • 1983-08-11
    • Kazuji YamadaHideo SatoKazuo KatoTakao SasayamaKanji KawakamiRyosaku Kanzawa
    • Kazuji YamadaHideo SatoKazuo KatoTakao SasayamaKanji KawakamiRyosaku Kanzawa
    • G01L9/04G01B7/16G01L9/00G01L9/06
    • G01L9/0054G01L9/065Y10S323/907
    • A pressure transducer is disclosed comprising a pressure sensor portion having gage resistors in bridge formed on a thin diaphragm of a semiconductor substrate, and a power supply connected to the pressure sensor portion for driving the pressure sensor. The power supply includes a first current source for supplying a temperature-dependent current equivalent to the sum of a current almost proportional to the absolute temperature and a current independent of temperature, and a second current source for sinking the current almost proportional to the temperature characteristic of the gage resistors from the current of the first current source. A temperature compensation circuit is additionally provided to drive the bridge circuit by the difference between the temperature-dependent current and the current proportional to the temperature characteristic in a constant-current driving mode, and by a voltage proportional to the current difference when the output of the bridge circuit is connected to an amplifier whose gain is dependent on temperature.
    • 公开了一种压力传感器,包括压电传感器部分,该压力传感器部分具有形成在半导体衬底的薄膜上的桥中的量规电阻器,以及连接到用于驱动压力传感器的压力传感器部分的电源。 电源包括用于提供等效于与绝对温度几乎成比例的电流和独立于温度的电流的和的温度相关电流的第一电流源,以及用于将大体上与温度特性成比例的电流吸收的第二电流源 的电流从第一个电流源的电流。 另外提供温度补偿电路以通过温度相关电流和与恒定电流驱动模式中的温度特性成比例的电流之间的差异来驱动桥式电路,并且通过与当电流差异的电流成比例的电压来驱动桥式电路 桥接电路连接到增益取决于温度的放大器。