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    • 10. 发明授权
    • Semiconductor light-detecting device with alloyed isolating region
    • 具有合金隔离区域的半导体光检测装置
    • US4868622A
    • 1989-09-19
    • US113069
    • 1987-10-27
    • Keitaro Shigenaka
    • Keitaro Shigenaka
    • H01L31/0264H01L27/146H01L31/08H01L31/10
    • H01L27/14649Y10S257/926
    • A semiconductor light detecting device comprises a substrate, a first stacked layer of a first conductivity type formed on the substrate by alternately laminating a compound semimetal layer and a compound semiconductor layer repeatedly, a second stacked layer of a second conductivity type formed on the first stacked layer by alternately laminating the compound semimetal layer and the compound semiconductor layer repeatedly, and an isolation region formed by selectively irradiating the first and second stacked layers with an energy beam. A plurality of light detecting elements isolated from each other by the isolation region are formed on the substrate so as to provide the semiconductor light detecting device.
    • 半导体光检测装置包括:基板,通过交替地层叠复合半金属层和化合物半导体层而在基板上形成的第一导电类型的第一堆叠层,形成在第一堆叠上的第二导电类型的第二堆叠层 通过重复地交替层叠化合物半金属层和化合物半导体层,以及通过用能量束选择性地照射第一层和第二层而形成的隔离区。 在基板上形成由隔离区域彼此隔离的多个光检测元件,以提供半导体光检测装置。