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    • 1. 发明授权
    • Trap device for vapor phase reaction apparatus
    • 气相反应装置捕集装置
    • US5422081A
    • 1995-06-06
    • US155750
    • 1993-11-23
    • Katsushin MiyagiOsamu YokokawaYoshitaka OkadaIchiro NagasakiAkira Hashimoto
    • Katsushin MiyagiOsamu YokokawaYoshitaka OkadaIchiro NagasakiAkira Hashimoto
    • B01D8/00B01D46/12B01D46/42C23C16/44C30B25/14
    • C30B25/14B01D46/406B01D46/4263B01D8/00C23C16/4412
    • A double cylinder shaped multilayer structural member comprising ring shaped thin plate small diameter discs and large diameter discs respectively layered via spacers is disposed in the enclosure vessel of a trap device for a vapor phase reaction apparatus. Gas from the intake opening section of the enclosure vessel is introduced into the outer side space of the multilayer structural member of the enclosure vessel, passes through the spaces between the large diameter discs and also passes through the spaces between the small diameter discs, then exits via the inner side space of the multilayer structural member from the outlet opening section of enclosure vessel to the system exterior. As a result of this construction, in comparison to conventional devices, the collection efficiency of reactive components can be increased, the equipment life extended, and maintenance frequency reduced, thereby providing a trap device for a vapor phase reaction apparatus capable of improving productivity.
    • 包括环形薄板小直径圆盘和分别通过间隔件层叠的大直径圆盘的双圆筒形多层结构构件设置在用于气相反应装置的捕集装置的封闭容器中。 来自封闭容器的进气开口部分的气体被引入到封闭容器的多层结构构件的外侧空间中,通过大直径盘之间的空间并且还穿过小直径盘之间的空间,然后退出 通过多层结构构件的内侧空间从封闭容器的出口开口部分到系统外部。 作为这种结构的结果,与常规装置相比,可以增加反应性组分的收集效率,延长设备寿命,降低维护频率,从而提供能够提高生产率的气相反应装置的捕集装置。