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1. 发明申请

US20070007469A1 Laser plasma EUV light source, target material, tape material, a method of producing target material, a method of providing targets, and an EUV exposure device 有权
标题翻译：激光等离子体EUV光源，靶材料，胶带材料，制造靶材的方法，提供靶材的方法以及EUV曝光装置
公开(公告)号：US20070007469A1
公开(公告)日：2007-01-11
申请号：US11329116
申请日：2006-01-11
申请人： Katsuhiko Murakami , Hideya Inoue
发明人： Katsuhiko Murakami , Hideya Inoue
IPC分类号： G21G4/00
CPC分类号： G03F7/70916 , B82Y10/00 , G03F7/70033 , H05G2/001
摘要： Target 1 that is arranged in the disc direction is sprayed from nozzle 2 that has a slit-shaped aperture. Target 1 is conveyed on a gas stream. He gas is used in this example. Nozzle 2 may be vibrated by a piezo apparatus to spray disc-shaped target 1. Target 1 that is sprayed from nozzle 2 reaches the irradiation position of laser light with its direction unchanged since the exterior of nozzle 2 is maintained in a high vacuum. Synchronized with delivery of target 1, pulse laser light 5 from Nd:YAG light source 4 is focused by lens 3 and irradiated onto target 1. The spot diameter of the laser is the same 1 mm diameter as that of target 1. The thickness is not more than 1000 nm. Therefore, virtually the entire target is converted into plasma, debris generation is inhibited and the conversion efficiency is elevated.
摘要翻译：从盘状方向配置的靶1从具有狭缝状孔的喷嘴2喷出。靶1在气流上传送。在这个例子中使用了他的气体。喷嘴2可以通过压电装置振动以喷射盘形靶1。从喷嘴2喷射的目标1到达激光的照射位置，其方向不变，因为喷嘴2的外部保持在高真空中。与目标1的传送同步，来自Nd：YAG光源4的脉冲激光5被透镜3聚焦并照射到目标1上。激光的光斑直径与目标1的直径相同。厚度不超过1000nm。因此，实际上整个目标被转换为等离子体，碎片产生被抑制并且转换效率提高。

2. 发明授权

US07456417B2 Laser plasma EUV light source, target material, tape material, a method of producing target material, a method of providing targets, and an EUV exposure device 有权
标题翻译：激光等离子体EUV光源，靶材料，胶带材料，制造靶材的方法，提供靶材的方法以及EUV曝光装置
公开(公告)号：US07456417B2
公开(公告)日：2008-11-25
申请号：US11329116
申请日：2006-01-11
申请人： Katsuhiko Murakami , Hideya Inoue
发明人： Katsuhiko Murakami , Hideya Inoue
IPC分类号： G21G4/00 , G01N21/64 , G01J3/10
CPC分类号： G03F7/70916 , B82Y10/00 , G03F7/70033 , H05G2/001
摘要： Target 1 that is arranged in the disc direction is sprayed from nozzle 2 that has a slit-shaped aperture. Target 1 is conveyed on a gas stream. He gas is used in this example. Nozzle 2 may be vibrated by a piezo apparatus to spray disc-shaped target 1. Target 1 that is sprayed from nozzle 2 reaches the irradiation position of laser light with its direction unchanged since the exterior of nozzle 2 is maintained in a high vacuum. Synchronized with delivery of target 1, pulse laser light 5 from Nd:YAG light source 4 is focused by lens 3 and irradiated onto target 1. The spot diameter of the laser is the same 1 mm diameter as that of target 1. The thickness is not more than 1000 nm. Therefore, virtually the entire target is converted into plasma, debris generation is inhibited and the conversion efficiency is elevated.
摘要翻译：从盘状方向配置的靶1从具有狭缝状孔的喷嘴2喷出。靶1在气流上传送。在这个例子中使用了他的气体。喷嘴2可以通过压电装置振动以喷射盘形靶1。从喷嘴2喷射的目标1到达激光的照射位置，其方向不变，因为喷嘴2的外部保持在高真空中。与目标1的传送同步，来自Nd：YAG光源4的脉冲激光5被透镜3聚焦并照射到目标1上。激光的光斑直径与目标1的直径相同。厚度不超过1000nm。因此，实际上整个目标被转换为等离子体，碎片产生被抑制并且转换效率提高。

3. 发明授权

US08121254B2 Optical element, exposure apparatus using this, and device manufacturing method 有权
标题翻译：光学元件，使用它的曝光装置和装置制造方法
公开(公告)号：US08121254B2
公开(公告)日：2012-02-21
申请号：US12509292
申请日：2009-07-24
申请人： Katsuhiko Murakami , Takaharu Komiya
发明人： Katsuhiko Murakami , Takaharu Komiya
IPC分类号： G21K1/06 , G21K5/00
CPC分类号： G02B17/0657 , B82Y10/00 , G02B5/0816 , G02B5/0891 , G02B5/26 , G03F7/70308 , G03F7/70316 , G03F7/70575 , G03F7/70916 , G03F7/70958 , G21K1/062
摘要： On a multilayer film mirror, a protective layer is formed having a varied composition in the depth direction. The protective layer includes an interface side layer formed on a thin film layer, i.e., the outermost layer of a multilayer film, a surface side layer provided on the interface side layer as the outermost surface of an optical element, and an intermediate layer. The interface side layer has properties such as providing relative absorption of non-exposure light from a light source. The surface side layer suppresses oxidation of the surface of the multilayer film.
摘要翻译：在多层膜反射镜上形成在深度方向上具有不同组成的保护层。保护层包括形成在薄膜层上的界面侧层，即多层膜的最外层，设置在作为光学元件的最外表面的界面侧层上的表面侧层和中间层。界面侧层具有诸如提供来自光源的非曝光光的相对吸收的性质。表面侧层抑制多层膜的表面的氧化。

4. 发明授权

US07382527B2 EUV multilayer mirror with phase shifting layer 有权
标题翻译：具有相移层的EUV多层反射镜
公开(公告)号：US07382527B2
公开(公告)日：2008-06-03
申请号：US11401946
申请日：2006-04-12
申请人： Noriaki Kandaka , Katsuhiko Murakami , Takaharu Komiya , Masayuki Shiraishi
发明人： Noriaki Kandaka , Katsuhiko Murakami , Takaharu Komiya , Masayuki Shiraishi
IPC分类号： G02B5/26
CPC分类号： G03F7/70316 , B82Y10/00 , G02B5/0891 , G03F7/70958 , G21K1/062
摘要： A multilayer mirror aims to reduce incidence angle dependence of reflectivity. A substrate is made of low thermal polished expansion glass with 0.2 nm RMS or less roughness of the surface. On the surface thereof formed is a Ru/Si multilayer having a wide full-width half maximum of peak reflectivity, and on the Ru/Si multilayer formed is a Mo/Si multilayer having a high peak reflectivity value. This enables higher reflectivity than when Ru/Si alone provided and a reflectivity peak having a wider full-width half maximum than when the Mo/Si multilayer alone provided. Since Ru absorbs EUV ray more than Mo does, higher reflectivity is obtainable than that of a structure having the Ru/Si multilayer formed on the Mo/Si multilayer. The multilayer with a wide full-width half maximum has small incidence angle dependence of reflectivity in spectral reflectivity, thereby achieving high imaging performance in projection optical system.
摘要翻译：多层反射镜旨在减少反射率的入射角依赖性。衬底由具有0.2nm RMS或更少表面粗糙度的低热抛光膨胀玻璃制成。在其形成的表面上是具有宽的全宽半峰值反射率的Ru / Si多层，并且形成的Ru / Si多层是具有高峰值反射率值的Mo / Si多层。与仅提供Ru / Si相比，具有比单独提供的Mo / Si多层的全宽半宽的反射率峰值更高的反射率。由于Ru吸收比Mo更多的EUV射线，因此可以获得比在Mo / Si多层上形成有Ru / Si多层的结构更高的反射率。具有宽全宽半最大值的多层膜在光谱反射率方面具有小的入射角反射率依赖性，从而在投影光学系统中实现高成像性能。

5. 发明申请

US20080068575A1 Euv Light Source, Euv Exposure Equipment, And Semiconductor Device Manufacturing Method 有权
标题翻译： Euv光源，Euv曝光设备和半导体器件制造方法
公开(公告)号：US20080068575A1
公开(公告)日：2008-03-20
申请号：US11629535
申请日：2005-06-22
申请人： Katsuhiko Murakami
发明人： Katsuhiko Murakami
IPC分类号： H05G2/00 , G03B27/54
CPC分类号： G03F7/70033 , B82Y10/00 , G21K2201/064 , H05G2/003 , H05G2/005 , H05G2/008
摘要： A liquid in which fine solid Sn particles are dispersed in a resin is accommodated inside the heated tank 4. The resin pressurized by a pressurizing pump is conducted to a nozzle 1, so that a liquid-form resin is caused to jet from the tip end of the nozzle 1 that is disposed inside a vacuum chamber 7. The liquid-form resin which is caused to jet from the nozzle 1 assumes a spherical shape as a result of surface tension, and is solidified by being cooled in a vacuum, so that a solid-form target 2 is formed. A laser introduction window 10 used for the introduction of laser light is formed in the vacuum chamber 7, and laser light generated from a laser light source 8 disposed on the outside of the vacuum chamber 7 is focused by a lens 9 and conducted into the vacuum chamber 7, so that the target is converted into a plasma, thus generating EUV light.
摘要翻译：将细固体Sn颗粒分散在树脂中的液体容纳在加热槽4内。由加压泵加压的树脂被传导到喷嘴1，使得液态树脂从顶端喷射设置在真空室7内的喷嘴1.由喷嘴1喷出的液状树脂由于表面张力而呈球形，通过在真空中冷却使其固化，使得形成固体靶2。在真空室7中形成用于引入激光的激光引入窗口10，并且由设置在真空室7的外部的激光光源8产生的激光由透镜9聚焦并传导到真空中室7，使得目标被转换成等离子体，从而产生EUV光。

6. 发明申请

US20060120429A1 Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus 有权
标题翻译：收集器光学系统，光源单元，照明光学装置和曝光装置
公开(公告)号：US20060120429A1
公开(公告)日：2006-06-08
申请号：US11327339
申请日：2006-01-09
申请人： Katsuhiko Murakami
发明人： Katsuhiko Murakami
IPC分类号： H01S3/08
CPC分类号： G03F7/70175 , G03F7/70033
摘要： A light source unit of EUV light is provided as a light source unit comprising a plasma light source for emitting EUV light, a collective mirror which has a reflecting surface of an ellipsoid of revolution and at a first focal point of which the plasma light source is located, and an auxiliary collective mirror which has a reflecting surface of a spherical surface and a spherical center of which is located as displaced from a position of the plasma light source.
摘要翻译：提供EUV光源的光源单元作为包括用于发射EUV光的等离子体光源的光源单元，具有旋转椭圆的反射表面的集体反射镜和等离子体光源的第一焦点以及辅助集体镜，其具有球形表面的反射表面，并且球面中心位于离开等离子体光源的位置的位置。

7. 发明授权

US4552262A Article feeding apparatus 失效
标题翻译：物品送料装置
公开(公告)号：US4552262A
公开(公告)日：1985-11-12
申请号：US522303
申请日：1983-07-27
申请人： Katsuhiko Murakami , Yoshio Iwamoto
发明人： Katsuhiko Murakami , Yoshio Iwamoto
IPC分类号： A22C29/00 , B07B1/14 , B07B13/04 , B07B13/16 , B65G47/244 , B65G47/26
CPC分类号： B65G47/244 , A22C29/005 , B07B1/145 , B07B13/04 , B07B13/072 , B07B13/16
摘要： An article feeding apparatus capable of reliably feeding articles one by one to the next process. It comprises a plurality of feed troughs (5) adapted to be individually vibrated and disposed side by side with each other with their take-in ends formed as flat surfaces in juxtaposed relation in a plane, a plurality of arranging conveyors (10) disposed adjacent the feed troughs in the direction of feed of articles, each conveyor serving to arrange articles in a line which are being fed from its associated feed trough and feed them, pool hoppers (14) installed at the take-out ends of the arranging conveyors and adapted to open and close, a bucket conveyor (15) for transferring to the next process the articles dropped from the pool hoppers one by one into buckets supported to turn around the axes of pivots, and means disposed at a predetermined position in the path of travel of the bucket conveyor for separating a plurality of articles from each other if such plurality are charged into a bucket. The feeding apparatus is very useful for sorting agricultural products for classification.
摘要翻译： PCT No.PCT / JP83 / 00012 Sec。 371日期：1983年7月27日 102（e）日期1983年7月27日PCT提交1983年1月13日PCT公布。出版物WO83 / 02407 日期：1983年7月21日。一种能够可靠地将物品一个接一个地送入下一个处理的物品送入装置。它包括多个进料槽（5），其适于独立地振动并且彼此并排设置，其入口端在平面中以并列关系形成为平坦表面;多个排列输送机（10）邻近设置每个输送机用于将物品从其相关联的进料槽进给并进料，排出的物料沿安排在排出的输送机的取出端的出料口和适于打开和关闭的斗式输送机（15），用于将从池池料斗中逐滴落入的物品一个一个地转移到下一个处理过程中，所述料斗被支撑以转动枢轴的轴线，并且设置在设置在如果将多个物品装入桶中，则用于将多个物品彼此分离的斗式输送机的行程。喂食装置对于分类农产品非常有用。

8. 发明授权

US3974888A Method of weighing and apparatus therefor 失效
标题翻译：称重方法及其设备
公开(公告)号：US3974888A
公开(公告)日：1976-08-17
申请号：US502218
申请日：1974-08-30
申请人： Katsuhiko Murakami , Tetsuo Ikeda , Masahiro Takeda , Osamu Kazama , Hidaka Nishinaka
发明人： Katsuhiko Murakami , Tetsuo Ikeda , Masahiro Takeda , Osamu Kazama , Hidaka Nishinaka
IPC分类号： G01G11/00 , B07C5/28 , G01G13/00 , G01G13/32 , G01G19/387 , B07B13/08 , G01G19/52
CPC分类号： G01G13/00 , G01G13/32
摘要： A method of weighing and an apparatus therefor, wherein articles varying in unit weight are continuously weighed by a single weighing machine to classify them into three ranks, one for articles having error weights outside the allowable error limits, another for articles having error weights plus-oriented inside the allowable error limits and the other for articles having error weights minus-oriented inside the allowable error limits, said articles having error weights outside the allowable error limits being rejected, said articles having plus-oriented and minus-oriented error weights inside the allowable error limits being separately pooled and their weights or error weights being allotted to two shift registers and memorized therein in correspondence to the pooling order, and arithmetic operations for combinations of said memorized values are performed to provide a combination of weights equal or most approximate to a predetermined weight. Other merits and details of the construction will be made clear.
摘要翻译：一种称重方法及其装置，其中以单位重量变化的制品通过单个称重机连续称重，将其分为三级，一类用于误差重量超出允许误差极限的物品，另一种用于具有误差加权值的物品，在容许误差范围内定向，另一种是在容许误差范围内具有偏差减去的物品，所述物品具有超出允许误差极限的误差，所述物品在内部具有正向和负向的误差重量允许的误差限制被分开汇总，并且它们的权重或误差权重被分配给两个移位寄存器并且与存储顺序相对应地存储在其中，并且执行用于所述存储值的组合的算术运算，以提供等于或最接近于预定重量。建设的其他优点和细节将会明确。

9. 发明授权

US07440182B2 Multilayer mirror, method for manufacturing the same, and exposure equipment 有权
标题翻译：多层镜，其制造方法和曝光设备
公开(公告)号：US07440182B2
公开(公告)日：2008-10-21
申请号：US11907798
申请日：2007-10-17
申请人： Noriaki Kandaka , Katsuhiko Murakami , Takaharu Komiya , Masayuki Shiraishi
发明人： Noriaki Kandaka , Katsuhiko Murakami , Takaharu Komiya , Masayuki Shiraishi
IPC分类号： G02B5/26
CPC分类号： G03F7/70316 , B82Y10/00 , G02B5/0891 , G03F7/70958 , G21K1/062
摘要： A multilayer mirror aims to reduce incidence angle dependence of reflectivity. A substrate is made of low thermal polished expansion glass with 0.2 nm RMS or less roughness of the surface. On the surface thereof formed is a Ru/Si multilayer having a wide full-width half maximum of peak reflectivity, and on the Ru/Si multilayer formed is a Mo/Si multilayer having a high peak reflectivity value. This enables higher reflectivity than when Ru/Si alone provided and a reflectivity peak having a wider full-width half maximum than when the Mo/Si multilayer alone provided. Since Ru absorbs EUV ray more than Mo does, higher reflectivity is obtainable than that of a structure having the Ru/Si multilayer formed on the Mo/Si multilayer. The multilayer with a wide full-width half maximum has small incidence angle dependence of reflectivity in spectral reflectivity, thereby achieving high imaging performance in projection optical system.
摘要翻译：多层反射镜旨在减少反射率的入射角依赖性。衬底由具有0.2nm RMS或更少表面粗糙度的低热抛光膨胀玻璃制成。在其形成的表面上是具有宽的全宽半峰值反射率的Ru / Si多层，并且形成的Ru / Si多层是具有高峰值反射率值的Mo / Si多层。与仅提供Ru / Si相比，具有比单独提供的Mo / Si多层的全宽半宽的反射率峰值更高的反射率。由于Ru吸收比Mo更多的EUV射线，因此可以获得比在Mo / Si多层上形成有Ru / Si多层的结构更高的反射率。具有宽全宽半最大值的多层膜在光谱反射率方面具有小的入射角反射率依赖性，从而在投影光学系统中实现高成像性能。

10. 发明授权

US07385212B2 Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus 有权
标题翻译：收集器光学系统，光源单元，照明光学装置和曝光装置
公开(公告)号：US07385212B2
公开(公告)日：2008-06-10
申请号：US11327339
申请日：2006-01-09
申请人： Katsuhiko Murakami
发明人： Katsuhiko Murakami
IPC分类号： H05G2/00
CPC分类号： G03F7/70175 , G03F7/70033
摘要： A light source unit of EUV light is provided as a light source unit comprising a plasma light source for emitting EUV light, a collective mirror which has a reflecting surface of an ellipsoid of revolution and at a first focal point of which the plasma light source is located, and an auxiliary collective mirror which has a reflecting surface of a spherical surface and a spherical center of which is located as displaced from a position of the plasma light source.
摘要翻译：提供EUV光源的光源单元作为包括用于发射EUV光的等离子体光源的光源单元，具有旋转椭圆的反射表面的集体反射镜和等离子体光源的第一焦点以及辅助集体镜，其具有球形表面的反射表面，并且球面中心位于离开等离子体光源的位置的位置。

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