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    • 7. 发明授权
    • Chassis assembly with means for mounting within thin wall opening
    • 底盘组件,具有安装在薄壁开口内的装置
    • US5410373A
    • 1995-04-25
    • US115541
    • 1993-09-02
    • Paul SaguesSteven M. Kraft
    • Paul SaguesSteven M. Kraft
    • H04N5/645
    • H04N5/645
    • An electronic chassis is disclosed for supporting components such as a CRT device or flat panel display unit and adapted for installation through an opening in a cabinet without requiring access from within the cabinet to secure the chassis in place. The frontal end of the chassis has flange members on opposite sides which fit against the cabinet surface around its opening. One side of the chassis frontal end has a movable retainer means controlled by one or more drive screws that can be adjusted to grip one side of the cabinet opening. Continued actuation of the drive screws moves the chassis into locking contact with a fixed retainer means on the opposite side of the chassis. A bezel frame member attached to the frontal end of the chassis covers the drive screws but has access holes to facilitate their adjustment, and gaskets are provided on the bezel frame to prevent moisture from entering the chassis or the cabinet opening.
    • 公开了一种用于支撑诸如CRT设备或平板显示单元的部件的电子底盘,并且适于通过机柜中的开口进行安装,而不需要从机柜内进入,以将机架固定就位。 底盘的前端在相对侧上具有法兰构件,该凸缘构件围绕其开口的机壳表面配合。 底盘前端的一侧具有由一个或多个驱动螺钉控制的可移动的保持器装置,该驱动螺杆可被调整以夹紧机壳开口的一侧。 驱动螺钉的继续致动将机架移动到与底盘相对侧的固定保持器装置的锁定接触。 安装在机箱正面的挡板框架部件覆盖驱动螺钉,但有进出孔便于调节,并且垫圈框架上设有垫片,以防止潮气进入底盘或机柜开口。
    • 10. 发明授权
    • Touch calibration system for wafer transfer robot
    • 用于晶圆传送机器人的触摸校准系统
    • US06242879B1
    • 2001-06-05
    • US09524025
    • 2000-03-13
    • Paul SaguesRobert T. WiggersSteven M. Kraft
    • Paul SaguesRobert T. WiggersSteven M. Kraft
    • G03B1910
    • G03F7/7075H01L21/67766H01L21/67778
    • A method and apparatus for automatically calibrating the precise positioning of a wafer handling robot relative to a target structure is disclosed. The apparatus comprises a machine controller connected to robot having an end-effector with three degrees of movement. The controller has a memory with stored rough distance and geometrical data defining the general location of structural features of the target structure. The robot is programmed to move toward the target structure in a series of sequential movements, each movement culminating with the robot end-effector touching a preselected exterior feature of the target structure. Each touching of the end-effector is sensed and provides data for the controller which then calculates the precise location of the target structure. The data accumulated during a series of touching steps by the robot end-effector is utilized by the controller to provide a precise calibrated control program for future operation of the robot.
    • 公开了一种用于自动校准晶片处理机器人相对于目标结构的精确定位的方法和装置。 该装置包括连接到机器人的机器控制器,其具有三个运动程度的末端执行器。 控制器具有存储有粗略距离的存储器和定义目标结构的结构特征的一般位置的几何数据。 机器人被编程为以一系列顺序移动朝着目标结构移动,每个运动最终导致机器人末端执行器接触目标结构的预选的外部特征。 检测到末端执行器的每次触摸并提供控制器的数据,然后控制器计算目标结构的精确位置。 由机器人末端执行器进行的一系列触摸步骤期间累积的数据由控制器利用,为机器人的未来操作提供精确的校准控制程序。