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    • 9. 发明授权
    • Airgap interconnect with hood layer and method of forming
    • 气罩与罩层互连和成型方法
    • US09123727B2
    • 2015-09-01
    • US13997171
    • 2011-12-29
    • Kevin Fischer
    • Kevin Fischer
    • H01L21/70H01L23/532H01L21/764H01L23/522H01L21/768
    • H01L23/53238H01L21/764H01L21/7682H01L21/76834H01L21/7685H01L21/76852H01L23/5222H01L23/53295H01L2924/0002H01L2924/00
    • An airgap interconnect structure with hood layer and methods for forming such an airgap interconnect structure are disclosed. A substrate having a dielectric layer with a plurality of interconnects formed therein is provided. Each interconnect is encapsulated by a barrier layer. A hardmask is formed on the dielectric layer and patterned to expose the dielectric layer between adjacent interconnects where an airgap is desired. The dielectric layer is etched to form a trench, wherein the etching process additionally etches at least a portion of the barrier layer to expose a portion of the side surface of each adjacent copper interconnect. A hood layer is electrolessly plated onto an exposed portion of the top surface and the exposed portion of the side surface to reseal the interconnect. A gap-sealing dielectric layer is formed over the device, sealing the trench to form an airgap.
    • 公开了一种具有罩层的气隙互连结构以及用于形成这种气隙互连结构的方法。 提供具有形成有多个互连件的电介质层的基板。 每个互连由阻挡层封装。 在电介质层上形成硬掩模,并图案化以暴露需要气隙的相邻互连之间的电介质层。 蚀刻介电层以形成沟槽,其中蚀刻工艺另外蚀刻阻挡层的至少一部分以暴露每个相邻铜互连的侧表面的一部分。 罩层被无电镀在顶表面的暴露部分和侧表面的暴露部分上以重新密封互连。 在器件上形成间隙密封电介质层,密封沟槽以形成气隙。