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1. 发明授权

US06242879B1 Touch calibration system for wafer transfer robot 有权
标题翻译：用于晶圆传送机器人的触摸校准系统
公开(公告)号：US06242879B1
公开(公告)日：2001-06-05
申请号：US09524025
申请日：2000-03-13
申请人： Paul Sagues , Robert T. Wiggers , Steven M. Kraft
发明人： Paul Sagues , Robert T. Wiggers , Steven M. Kraft
IPC分类号： G03B1910
CPC分类号： G03F7/7075 , H01L21/67766 , H01L21/67778
摘要： A method and apparatus for automatically calibrating the precise positioning of a wafer handling robot relative to a target structure is disclosed. The apparatus comprises a machine controller connected to robot having an end-effector with three degrees of movement. The controller has a memory with stored rough distance and geometrical data defining the general location of structural features of the target structure. The robot is programmed to move toward the target structure in a series of sequential movements, each movement culminating with the robot end-effector touching a preselected exterior feature of the target structure. Each touching of the end-effector is sensed and provides data for the controller which then calculates the precise location of the target structure. The data accumulated during a series of touching steps by the robot end-effector is utilized by the controller to provide a precise calibrated control program for future operation of the robot.
摘要翻译：公开了一种用于自动校准晶片处理机器人相对于目标结构的精确定位的方法和装置。该装置包括连接到机器人的机器控制器，其具有三个运动程度的末端执行器。控制器具有存储有粗略距离的存储器和定义目标结构的结构特征的一般位置的几何数据。机器人被编程为以一系列顺序移动朝着目标结构移动，每个运动最终导致机器人末端执行器接触目标结构的预选的外部特征。检测到末端执行器的每次触摸并提供控制器的数据，然后控制器计算目标结构的精确位置。由机器人末端执行器进行的一系列触摸步骤期间累积的数据由控制器利用，为机器人的未来操作提供精确的校准控制程序。

2. 发明授权

US06323616B1 Self teaching robotic wafer handling system 有权
标题翻译：自我教学机器人晶圆处理系统
公开(公告)号：US06323616B1
公开(公告)日：2001-11-27
申请号：US09564300
申请日：2000-05-03
申请人： Paul Sagues , Robert T. Wiggers , Sanjay K. Aggarwal , Kevin D. D'Souza , Nathan H. Harding
发明人： Paul Sagues , Robert T. Wiggers , Sanjay K. Aggarwal , Kevin D. D'Souza , Nathan H. Harding
IPC分类号： B25J918
CPC分类号： H01L21/67265 , B25J9/1692 , G05B2219/37275 , G05B2219/39024 , G05B2219/39048 , G05B2219/39056 , G05B2219/40623 , G05B2219/45031 , H01L21/67766
摘要： A wafer handling apparatus having input and output robotic systems directed by a programmed controller. Each system has components including a robot, a twist and rotate, and a carrier and automated carrier rail. The input system is for removing wafers from their wafer pod, placing them in the carrier and transporting them via the rail to a wafer processing area. The output system performs the reverse operation, taking wafers from a carrier following processing and placing them in a pod. Each robot includes a plurality of interconnected, articulated cantilevered arms. The last one of the arms has a wand on one end and a laser emitter detector on the other end, and operates in cooperation with the controller to provide location detection of system components. The controller also includes circuitry for sensing contact of the wand with an object by measuring the increased robot motor torque occurring upon contact. The controller is pre-programmed with approximate physical dimensions of the system components and their relative positions. The controller is additionally programmed to automatically perform a precision calibration/teaching routine to gather more precise location data. The process of precision teaching/calibration begins by placing a pod calibration fixture on a pedestal. The controller then directs the input robot to sense the fixture position, which gives the controller precise data relating to the position of a pod on the pedestal. The robot then senses the position of the twist and rotate components. The process begins by sensing the height of two arms of the twist and rotate, and the controller adjusts the arm heights until they are level. The controller then directs the robot to sense the R and &thgr; dimensions of the twist and rotate, and these precise dimensions are saved in the controller.
摘要翻译：具有由编程控制器引导的输入和输出机器人系统的晶片处理装置。每个系统具有包括机器人，扭转和旋转以及载体和自动化载体轨道的部件。输入系统用于从晶片盒中移除晶片，将它们放置在载体中并通过导轨传送到晶片处理区域。输出系统执行反向操作，从处理后的载体中取出晶片并将其放入容器中。每个机器人包括多个互连的铰接悬臂。最后一个臂在一端具有一个魔杖，另一端具有激光发射器检测器，并与控制器协同工作，以提供系统组件的位置检测。控制器还包括用于通过测量接触时发生的增加的机器人马达扭矩来感测魔杖与物体的接触的电路。控制器预编程有系统组件的近似物理尺寸及其相对位置。控制器还被编程为自动执行精密校准/教学程序以收集更精确的位置数据。精确教学/校准的过程开始于将荚式校准夹具放置在基座上。然后，控制器引导输入机器人感测夹具位置，这为控制器提供与基座上的荚的位置有关的精确数据。机器人然后感测扭转的位置并旋转部件。该过程通过感测扭转和旋转的两个臂的高度开始，并且控制器调整臂高度直到它们平坦。然后，控制器引导机器人感测扭转的R和θ尺寸并旋转，并将这些精确的尺寸保存在控制器中。

3. 发明授权

US06304051B1 Self teaching robotic carrier handling system 有权
标题翻译：自我教学机器人运营商处理系统
公开(公告)号：US06304051B1
公开(公告)日：2001-10-16
申请号：US09592314
申请日：2000-06-13
申请人： Paul Sagues , Robert T. Wiggers , Nathan H. Harding , Sanjay K. Aggarwal
发明人： Paul Sagues , Robert T. Wiggers , Nathan H. Harding , Sanjay K. Aggarwal
IPC分类号： B25J918
CPC分类号： H01L21/67259 , H01L21/67769
摘要： Briefly, a preferred embodiment of the present invention includes a wafer carrier buffer for storage of a plurality of carriers containing wafers either waiting to be taken for processing in an adjacent wafer processing system, or waiting to be taken from the buffer following the processing. The buffer has a sliding carrier first input apparatus for taking a carrier from outside the buffer through a buffer input door and into the buffer interior. A buffer controller is included for directing robotic apparatus to take the carrier from the input apparatus and place it on a selected one of a plurality of carrier storage locations, and from a carrier storage location to a first output for delivery of wafers to processing. The robotic apparatus also delivers an empty carrier to a second input apparatus for receiving wafers from the processing area, and for delivery of a carrier with processed wafers to a second sliding output apparatus for removal from the buffer through a buffer output door. The controller is programmed to direct an automatic calibration of all of the carrier storage locations and the input and output positions. The robotic apparatus includes a sensor for detecting the position of a flange on a calibration fixture that is placed by the robot at a carrier storage location. The flange is accurately positioned on the fixture to correspond to a similar flange on each carrier that is used to engage with a tool on the robotic apparatus for moving the carrier. The calibration is preferably done by directing the robotic apparatus to place the calibration fixture at a location in need of calibration and then sensing the precise position of the fixture flange with the sensor apparatus. The controller then calculates the coordinates required to place a carrier accurately in that location. This process is repeated for each carrier storage location and the input and output locations.
摘要翻译：简而言之，本发明的优选实施例包括晶片载体缓冲器，用于存储多个载体，所述载体包含等待在相邻的晶片处理系统中进行处理的晶片，或等待从处理后的缓冲器中取出。缓冲器具有滑动载体第一输入装置，用于通过缓冲器输入门将缓冲器外部的载体从缓冲器中取出并进入缓冲器内部。包括一个缓冲控制器，用于引导机器人装置从输入装置中取出载体，并将其放置在多个载体存储位置中的所选择的一个，并从载体存储位置到第一输出，以将晶片传送到处理。机器人装置还将空载体输送到用于从处理区域接收晶片的第二输入装置，以及用于将具有经处理的晶片的载体输送到第二滑动输出装置，以通过缓冲器输出门从缓冲器移除。控制器被编程为引导所有载波存储位置和输入和输出位置的自动校准。机器人装置包括用于检测由机器人在载体存放位置放置的校准夹具上的凸缘的位置的传感器。凸缘精确地定位在固定装置上，以对应于每个载体上的类似凸缘，其用于与机器人装置上的用于移动载体的工具接合。优选地通过引导机器人装置将校准夹具放置在需要校准的位置，然后用传感器装置感测夹具法兰的精确位置来进行校准。然后，控制器计算将载波准确放置在该位置所需的坐标。对于每个载波存储位置和输入和输出位置重复该过程。

4. 发明授权

US08966686B2 Couch top pitch and roll motion by linear wedge kinematic and universal pivot 有权
标题翻译：通过线性楔形运动学和通用枢轴进行沙发顶部俯仰和滚动运动
公开(公告)号：US08966686B2
公开(公告)日：2015-03-03
申请号：US13290525
申请日：2011-11-07
申请人： Robert T. Wiggers , Bernhard Pultar , Daniel Seiler , Pascal T. Hofer , Reto W. Filiberti , Christof Frey
发明人： Robert T. Wiggers , Bernhard Pultar , Daniel Seiler , Pascal T. Hofer , Reto W. Filiberti , Christof Frey
IPC分类号： A61G13/00
CPC分类号： A61N5/1049 , A61B6/0457 , Y10T74/18072
摘要： A couch top includes a top, a base, a universal joint coupling the top and the base, and actuators mounted on the base to pitch and roll the top. Feedback devices may be fitted on the rotating ends of the universal joint to provide feedback for a control loop. Each actuator has an actuated end that translates vertically to lift or lower the top. The vertical movement may be derived from a carriage riding in place on a translating inclined plane. When the actuated ends move in the same direction, they pitch the top. When the actuated ends move in the opposite directions, they roll the top. Feedback devices may be fitted on motors in the actuators to provide feedback for the control loop.
摘要翻译：沙发顶部包括顶部，底座，联接顶部和底座的万向接头，以及安装在基座上的推动器以俯仰和滚动顶部的致动器。反馈装置可以安装在万向接头的旋转端上，为控制回路提供反馈。每个致动器具有致动端，其平移平移以升高或降低顶部。垂直运动可以从在平移倾斜平面上骑在适当位置的托架导出。当致动端沿同一方向移动时，它们会使顶部倾斜。当致动端沿相反方向移动时，它们滚动顶部。反馈装置可以安装在执行机构的电动机上，为控制回路提供反馈。

5. 发明申请

US20130111668A1 Couch Top Pitch and Roll Motion by Linear Wedge Kinematic and Universal Pivot 有权
标题翻译：通过线性楔形运动和通用枢轴的沙发顶部间距和滚动运动
公开(公告)号：US20130111668A1
公开(公告)日：2013-05-09
申请号：US13290525
申请日：2011-11-07
申请人： Robert T. Wiggers , Bernhard Pultar , Daniel Seiler , Pascal T. Hofer , Reto W. Filiberti , Christof Frey
发明人： Robert T. Wiggers , Bernhard Pultar , Daniel Seiler , Pascal T. Hofer , Reto W. Filiberti , Christof Frey
IPC分类号： A61G13/04 , F16H21/00
CPC分类号： A61N5/1049 , A61B6/0457 , Y10T74/18072
摘要： A couch top includes a top, a base, a universal joint coupling the top and the base, and actuators mounted on the base to pitch and roll the top. Feedback devices may be fitted on the rotating ends of the universal joint to provide feedback for a control loop. Each actuator has an actuated end that translates vertically to lift or lower the top. The vertical movement may be derived from a carriage riding in place on a translating inclined plane. When the actuated ends move in the same direction, they pitch the top. When the actuated ends move in the opposite directions, they roll the top. Feedback devices may be fitted on motors in the actuators to provide feedback for the control loop.
摘要翻译：沙发顶部包括顶部，底座，联接顶部和底座的万向接头，以及安装在基座上的推动器以俯仰和滚动顶部的致动器。反馈装置可以安装在万向接头的旋转端上，为控制回路提供反馈。每个致动器具有致动端，其平移平移以升高或降低顶部。垂直运动可以从在平移倾斜平面上骑在适当位置的托架导出。当致动端沿同一方向移动时，它们会使顶部倾斜。当致动端沿相反方向移动时，它们滚动顶部。反馈装置可以安装在执行机构的电动机上，为控制回路提供反馈。

6. 发明申请

US20110148339A1 Homing and Establishing Reference Frames for Motion Axes in Radiation Systems 有权
标题翻译：归位和建立辐射系统中运动轴的参考框架
公开(公告)号：US20110148339A1
公开(公告)日：2011-06-23
申请号：US12641538
申请日：2009-12-18
申请人： Robert T. Wiggers
发明人： Robert T. Wiggers
IPC分类号： G05G5/04
CPC分类号： G05B19/401 , G05B2219/50038
摘要： A method of homing motion axes in a radiation system uses a motor and one or more hardstops. A load is driven by a motor to move toward a hardstop during which an electrical parameter of the motor is monitored. A reference position for the motion axis is defined when the monitored electrical parameter reaches or exceeds a determined value. Alternative to monitoring the motor electrical parameter, the motor velocity may be monitored during the motion and a reference position for the motion axis is defined when the monitored motor velocity falls to or below a determined value. Alternatively, the load velocity may be monitored during the motion and a reference position for the motion axis is defined when the monitored load velocity falls to or below a determined value.
摘要翻译：在辐射系统中归位运动轴的方法使用电动机和一个或多个硬停止。负载由电动机驱动以朝向硬停止运动，在此期间监测电动机的电参数。当监控的电气参数达到或超过确定值时，定义运动轴的参考位置。替代监控电动机电气参数，可以在运动期间监测电动机速度，并且当监视的电动机速度降到或低于确定值时，定义运动轴的参考位置。或者，可以在运动期间监测负载速度，并且当监视的负载速度降到或低于确定值时，定义运动轴的参考位置。

7. 发明申请

US20120314844A1 AUTOMATIC HEALTH DETECTION FOR MOTION AXES IN MEDICAL LINEAR ACCELERATORS 有权
标题翻译：医疗线性加速器运动轴自动健康检测
公开(公告)号：US20120314844A1
公开(公告)日：2012-12-13
申请号：US13156290
申请日：2011-06-08
申请人： Robert T. Wiggers
发明人： Robert T. Wiggers
IPC分类号： G01D18/00
CPC分类号： A61N5/1075
摘要： In a method of detecting the health of a motion axis in a radiation system including a motor operable to move a load between a first end and a second end, data on an electrical parameter of the motor is collected as the motor moves in the certain range. At least one indicator of the electrical parameter including a maximum, a minimum, an average, and a standard deviation of the electrical parameter is determined and compared with a provided value or range of values indicative of the health of the axis. The health of the motion axis is determined using the comparison of the at least one indicator and the provided value or range of values.
摘要翻译：在一种检测包括可操作以在第一端和第二端之间移动负载的电动机的辐射系统中的运动轴的健康状况的方法中，当电动机在一定范围内移动时，收集关于电动机的电参数的数据。确定包括电参数的最大值，最小值，平均值和标准偏差的电参数的至少一个指示符，并将其与提供的指示轴健康值的值或范围进行比较。使用至少一个指示符与所提供的值或值范围的比较来确定运动轴的健康。

8. 发明授权

US08692503B2 Homing and establishing reference frames for motion axes in radiation systems 有权
标题翻译：归位并建立辐射系统中运动轴的参考系
公开(公告)号：US08692503B2
公开(公告)日：2014-04-08
申请号：US12641538
申请日：2009-12-18
申请人： Robert T. Wiggers
发明人： Robert T. Wiggers
IPC分类号： G05G5/00
CPC分类号： G05B19/401 , G05B2219/50038
摘要： A method of homing motion axes in a radiation system uses a motor and one or more hardstops. A load is driven by a motor to move toward a hardstop during which an electrical parameter of the motor is monitored. A reference position for the motion axis is defined when the monitored electrical parameter reaches or exceeds a determined value. Alternative to monitoring the motor electrical parameter, the motor velocity may be monitored during the motion and a reference position for the motion axis is defined when the monitored motor velocity falls to or below a determined value. Alternatively, the load velocity may be monitored during the motion and a reference position for the motion axis is defined when the monitored load velocity falls to or below a determined value.
摘要翻译：在辐射系统中归位运动轴的方法使用电动机和一个或多个硬停止。负载由电动机驱动以朝向硬停止运动，在此期间监测电动机的电参数。当监控的电气参数达到或超过确定值时，定义运动轴的参考位置。替代监控电动机电气参数，可以在运动期间监测电动机速度，并且当监视的电动机速度降到或低于确定值时，定义运动轴的参考位置。或者，可以在运动期间监测负载速度，并且当监视的负载速度降到或低于确定值时，定义运动轴的参考位置。

9. 发明授权

US09925394B2 Automatic health detection for motion axes in medical linear accelerators 有权
公开(公告)号：US09925394B2
公开(公告)日：2018-03-27
申请号：US13156290
申请日：2011-06-08
申请人： Robert T. Wiggers
发明人： Robert T. Wiggers
IPC分类号： G05B23/02 , A61N5/10
CPC分类号： A61N5/1075
摘要： In a method of detecting the health of a motion axis in a radiation system including a motor operable to move a load between a first end and a second end, data on an electrical parameter of the motor is collected as the motor moves in the certain range. At least one indicator of the electrical parameter including a maximum, a minimum, an average, and a standard deviation of the electrical parameter is determined and compared with a provided value or range of values indicative of the health of the axis. The health of the motion axis is determined using the comparison of the at least one indicator and the provided value or range of values.

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