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    • 6. 发明申请
    • NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE
    • 非易失性半导体存储器件
    • US20150102399A1
    • 2015-04-16
    • US14491385
    • 2014-09-19
    • Kabushiki Kaisha Toshiba
    • Haruka SakumaShuichi ToriyamaMasumi SaitohYoshiaki FukuzumiNaoki Yasuda
    • H01L27/115
    • H01L27/11582H01L29/66833H01L29/7926
    • A memory string includes: a first semiconductor layer formed in a columnar shape extending in a stacking direction perpendicular to a substrate; a tunnel insulating film formed surrounding a side surface of the first semiconductor layer; a charge accumulation film formed surrounding the tunnel insulating film and configured to be capable of accumulating charges; a block insulating film formed surrounding the charge accumulation film; and a plurality of first conductive layers formed surrounding the block insulating film and disposed at a predetermined interval in the stacking direction. The first semiconductor layer comprises carbon-doped silicon and being formed to have different carbon concentrations in upper and lower portions in the stacking direction.
    • 存储器串包括:第一半导体层,其形成为在垂直于衬底的层叠方向上延伸的柱状; 形成在所述第一半导体层的侧面周围的隧道绝缘膜; 形成在隧道绝缘膜周围的电荷蓄积膜,其能够积累电荷; 形成在电荷累积膜周围的块绝缘膜; 以及多个第一导电层,其形成为围绕所述块绝缘膜并且以堆叠方向以预定间隔设置。 第一半导体层包括碳掺杂硅并且被形成为在堆叠方向上的上部和下部具有不同的碳浓度。
    • 7. 发明申请
    • NONVOLATILE SEMICONDUCTOR MEMORY DEVICE
    • 非易失性半导体存储器件
    • US20140252443A1
    • 2014-09-11
    • US14018543
    • 2013-09-05
    • Kabushiki Kaisha Toshiba
    • Tomoya KAWAIJun FujikiYoshiaki FukuzumiHideaki Aochi
    • H01L29/78
    • H01L27/11578H01L27/1157H01L27/11582
    • According to one embodiment, a nonvolatile semiconductor memory device comprises a semiconductor substrate, a first layer formed above the semiconductor substrate, a first conductive layer, an inter-electrode insulating layer, and a second conductive layer sequentially stacked above the first layer, a memory film formed on an inner surface of each of a pair of through holes provided in the first conductive layer, the inter-electrode insulating layer, and the second conductive layer and extending in a stacking direction, a semiconductor layer formed on the memory film in the pair of through holes, and a metal layer formed in part of the pair of through holes and/or in part of a connection hole that is provided in the first layer and connects lower end portions of the pair of through holes, the metal layer being in contact with the semiconductor layer.
    • 根据一个实施例,非易失性半导体存储器件包括半导体衬底,形成在半导体衬底上的第一层,第一导电层,电极间绝缘层和顺序堆叠在第一层之上的第二导电层,存储器 形成在设置在第一导电层,电极间绝缘层和第二导电层中并在层叠方向上延伸的一对通孔的内表面上的膜,形成在存储膜中的半导体层 一对通孔和形成在一对通孔的一部分中的金属层和/或连接孔的一部分中的金属层,该连接孔设置在第一层中并连接该对通孔的下端部,金属层为 与半导体层接触。