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1. 发明授权

US6098023A Driving control system and monitoring device for fan filter unit in semiconductor clean room 失效
标题翻译：半导体洁净室风机过滤机组驱动控制系统及监控装置
公开(公告)号：US6098023A
公开(公告)日：2000-08-01
申请号：US959858
申请日：1997-10-29
申请人： Jung-sung Hwang , Jae-heung Choi , Yo-han Ahn , Dong-joo Lee
发明人： Jung-sung Hwang , Jae-heung Choi , Yo-han Ahn , Dong-joo Lee
IPC分类号： F24F7/06 , B01D46/46 , F24F3/16 , G05B23/02 , G06F11/32 , H01H1/02 , H01L21/02 , G06F11/30 , G05B11/00
CPC分类号： H01H1/0201 , F24F3/161 , G05B23/027 , G05B23/0272 , G06F11/326 , F24F2011/0093
摘要： A monitoring device and a driving control system for a fan filter unit in a semiconductor clean room for monitoring the operating state of the fan filter unit. The monitoring device includes a switching section in each fan filter unit which alternately applies electrical power to one of a plurality of terminals. The switching section is responsive to a force from an air stream introduced therein via rotation of a fan in the fan filter unit. A display section in each fan filter unit is connected to the plurality of terminals which provide different signals, indicative of an on or off state of the fan, according to which of the plurality of terminals is electrically connected to the electrical power.
摘要翻译：一种用于半导体洁净室中的风扇过滤器单元的监视装置和驱动控制系统，用于监视风扇过滤器单元的运行状态。监视装置包括在每个风扇过滤器单元中的切换部分，其交替地向多个终端中的一个终端提供电力。切换部分通过风扇过滤器单元中的风扇的旋转响应于从其中引入的气流的力。每个风扇滤波器单元中的显示部分连接到多个端子，所述多个端子提供指示风扇的开启或关闭状态的不同信号，根据多个端子中的哪一个电连接到电力。

2. 发明授权

US6093229A Drive checking system for fan filter units in clean room 有权
标题翻译：洁净室内风机过滤器的驱动检查系统
公开(公告)号：US6093229A
公开(公告)日：2000-07-25
申请号：US172152
申请日：1998-10-14
申请人： Kun-hyung Lee , Jung-sung Hwang , Yo-han Ahn , Jae-heung Choi
发明人： Kun-hyung Lee , Jung-sung Hwang , Yo-han Ahn , Jae-heung Choi
IPC分类号： F24F7/06 , B01D46/00 , B01D46/44 , F24F11/00 , F24F11/02 , B01D35/143
CPC分类号： B01D46/0086 , B01D46/444 , B01D2273/18 , B01D2273/30 , B01D2279/51 , Y10S55/34
摘要： A fan drive checking system, for an air conditioning system in a clean room having a fan filter unit (FFU), includes a flow sensor for sensing air flow inside a housing of a FFU. The sensor provides a sensor signal indicative of normal and adverse flow conditions in the housing. A control portion in data communication with the sensor outputs a control signal responsive to the sensing signal. An alarm in data communication with the control portion provides a warning when the control signal indicates the adverse flow condition.
摘要翻译：在具有风扇过滤器单元（FFU）的洁净室中的空调系统的风扇驱动器检查系统包括用于感测FFU的壳体内的空气流的流量传感器。传感器提供表示壳体中正常和不利流动条件的传感器信号。与传感器进行数据通信的控制部分响应于感测信号输出控制信号。当控制信号指示不利流动状况时，与控制部分的数据通信中的警报提供警告。

3. 发明授权

US06230080B1 Monitoring system and monitoring method for a clean room regulating system 失效
标题翻译：洁净室调节系统的监控系统和监控方法
公开(公告)号：US06230080B1
公开(公告)日：2001-05-08
申请号：US09066107
申请日：1998-04-24
申请人： Jung-sun Lee , Ki-hwan Lim , Yo-han An , Jae-heung Choi
发明人： Jung-sun Lee , Ki-hwan Lim , Yo-han An , Jae-heung Choi
IPC分类号： G06F1300
CPC分类号： G01N1/24 , G01N1/26 , G01N2015/1486
摘要： A monitoring system and method for monitoring a clean room regulating system. The monitoring system includes a particle counter with a pump having a pumping state for pumping a fluid containing particles. The particle counter produces an analog particle signal indicative of an amount of particles detected. The particle counter also produces a pump-state signal corresponding to the pumping state. A signal processor is included for converting the analog particle signal into a first digital signal, for converting the pump-state signal into an analog pumping signal, and for converting the analog pumping signal into a second digital signal. A host computer is included for receiving the first digital signal and deriving the amount of particles detected, for receiving the second digital signal and deriving the pumping state, and for monitoring the pumping state and the amount of particles counted. The system includes a communication channel for transferring the first digital signal and the second digital signal from the signal processor to the host computer.
摘要翻译：一种用于监控洁净室调节系统的监测系统和方法。监测系统包括具有泵的颗粒计数器，泵具有用于泵送含有颗粒的流体的泵送状态。颗粒计数器产生指示检测到的颗粒量的模拟颗粒信号。颗粒计数器还产生对应于泵送状态的泵状态信号。包括信号处理器，用于将模拟粒子信号转换为第一数字信号，用于将泵状态信号转换为模拟泵浦信号，并将模拟泵浦信号转换为第二数字信号。包括主计算机用于接收第一数字信号并导出检测到的粒子量，用于接收第二数字信号并导出泵送状态，并用于监视泵送状态和计数的粒子量。该系统包括用于将第一数字信号和第二数字信号从信号处理器传送到主计算机的通信信道。

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