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    • 6. 发明授权
    • Method of making bipolar transistors
    • 制造双极晶体管的方法
    • US4826780A
    • 1989-05-02
    • US124423
    • 1987-11-23
    • Toyoki TakemotoTadao KomedaHaruyasu YamadaTsutomu Fujita
    • Toyoki TakemotoTadao KomedaHaruyasu YamadaTsutomu Fujita
    • H01L21/74H01L21/761H01L21/8228H01L27/02H01L27/06H01L27/082H01L27/092H01L21/38
    • H01L27/0244H01L21/74H01L21/761H01L21/82285H01L27/0623H01L27/0826H01L27/0922Y10S148/009Y10S148/151
    • In a semiconductor IC, a vertical pnp or npn transistor of a uniform characteristic and a high breakdown voltage is made by forming, for example, a p.sup.- -collector region (39) in an n-type epitaxial region, an n-well base region (41) formed in the p.sup.- -collector region (39) and a p-emitter region (42) formed in the n-well base region (41); and furthermore, for example as shown in FIG. 9, p.sup.- -regions (40) and (49) are formed simultaneously with the p.sup.- -collector region (39) and an n-region (53) is formed simultaneously with the n-well base region (41), thereby constituting IIL of superior characteristics and a high resistance device at the same time as forming of the vertical transistor without substantial increase of manufacturing steps; and in the similar way, by combining the p.sup.- -region and n-region formed in the above-mentioned simultaneous steps with other region formed simultaneously with the forming of the vertical transistor, high h.sub.FE transistor, high speed vertical npn transistor, cross-over devices, p-channel and/or n-channel MOS transistors can be formed within limited manufacturing steps.
    • 在半导体IC中,通过在n型外延区域中形成例如p型集电极区域(39),形成具有均匀特性和高击穿电压的垂直pnp或npn晶体管,n阱基极 形成在p型集电极区域(39)中的区域(41)和形成在n阱基极区域(41)中的p型发射极区域(42)。 此外,例如如图1所示。 如图9所示,p-区域(40)和(49)与p-集电极区域(39)同时形成,并且与n-阱基区域(41)同时形成n区域(53),从而构成 IIL具有优越的特性和高电阻器件,同时形成垂直晶体管而不大幅度增加制造步骤; 并且以类似的方式,通过将在上述同步步骤中形成的p区域和n区域与形成垂直晶体管,高hFE晶体管,高速垂直npn晶体管, 可以在有限的制造步骤中形成器件,p沟道和/或n沟道MOS晶体管。
    • 8. 发明授权
    • Fully parallel threshold type analog-to-digital converter
    • 全并联门限类型模数转换器
    • US4417233A
    • 1983-11-22
    • US123646
    • 1980-02-22
    • Michihiro InoueToyoki TakemotoHaruyasu Yamada
    • Michihiro InoueToyoki TakemotoHaruyasu Yamada
    • H03M1/00H03K13/03
    • H03M1/361
    • A parallel type A/D converter capable of operating at an extremely high speed with a high degree of accuracy and with low power consumption. A plurality of comparators each having a reference voltage corresponding to an assigned quantizing level are disposed in parallel with each other and divided into a plurality of comparator blocks or groups. A plurality of sub-comparators are provided so that prior to the comparison of the input signal by the comparators, the input signal is first compared with the reference voltages of the sub-comparators and in response to the output from the sub-comparator having the reference voltage comparable or corresponding to the incoming input signal, only the comparators in the comparator block or group associated with said sub-comparator are energized or enabled while the remaining comparators are kept de-energized or disabled, whereby a minimum power consumption may be attained.
    • 一种并联型A / D转换器,能够以极高的精度和低功耗运行。 每个具有与分配的量化电平相对应的参考电压的多个比较器彼此并联设置并分成多个比较器块或组。 提供多个子比较器,使得在比较器比较输入信号之前,首先将输入信号与子比较器的参考电压进行比较,并且响应于具有该比较器的子比较器的输出 与输入输入信号相当或对应的参考电压,只有与所述子比较器相关联的比较器块或组中的比较器通电或使能,而剩余的比较器保持断电或禁用,从而可以获得最小的功率消耗 。
    • 9. 发明授权
    • Method of manufacturing a semiconductor integrated circuit device
    • 制造半导体集成电路器件的方法
    • US4814287A
    • 1989-03-21
    • US82212
    • 1987-08-06
    • Toyoki TakemotoKenji KawakitaHiroyuki Sakai
    • Toyoki TakemotoKenji KawakitaHiroyuki Sakai
    • H01L27/00H01L21/74H01L21/762H01L21/763H01L21/8222H01L21/8236H01L27/06H01L27/088H01L21/76H01L21/95
    • H01L21/743H01L21/76245H01L21/76264H01L21/763H01L21/7627H01L21/76281
    • A method of manufacturing a semiconductor integrated circuit device of the bipolar type of the MOS type or an integration of the two types having high integration and high performance, in which the circuit includes a first device region of which the side surface and entire region of the lower portion of the active region are made of silicon oxide and a second device region of which the side surface and a part of the lower portion of the active region are made of silicon oxide. According to the present invention, a transistor whose bottom portion is opened and a transistor whose bottom portion is not opened can be freely provided on a substrate, thereby dividing the transistors into a transistor to which a voltage can be supplied from the substrate and a transistor to which the voltage can not be supplied from the substrate, so that the wiring which has been conventionally needed can be reduced. In addition, in such transistors which are completely separated, the parasitic effect with the circumference is completely prevented so that excellent characteristics can be provided.
    • 一种制造双极型MOS型半导体集成电路器件的方法或者具有高集成度和高​​性能的两种类型的集成方法,其中电路包括第一器件区域,其中第一器件区域的侧表面和整个区域 有源区的下部由氧化硅制成,其第二器件区的有源区的侧表面和下部的一部分由氧化硅制成。 根据本发明,底部开放的晶体管和其底部未打开的晶体管可以自由地设置在基板上,从而将晶体管分成从基板提供电压的晶体管和晶体管 不能从基板供给电压,从而可以减少传统上需要的布线。 此外,在完全分离的这种晶体管中,完全防止与圆周的寄生效应,从而可以提供优异的特性。
    • 10. 发明授权
    • Method of manufacturing isolated semiconductor devices
    • 制造隔离半导体器件的方法
    • US4685198A
    • 1987-08-11
    • US758962
    • 1985-07-25
    • Kenji KawakitaNoboru NomuraToyoki Takemoto
    • Kenji KawakitaNoboru NomuraToyoki Takemoto
    • H01L21/762H01L21/763H01L29/06
    • H01L21/76264H01L21/762H01L21/763H01L21/76281H01L21/76283Y10S148/05Y10S148/115Y10S438/973
    • Disclosed is a method of isolating a transistor perfectly by employing a selective oxidation technology (LOCOS technology). More particularly, vertical openings are formed in the surface of {100} silicon substrate, and oxidation resistant films are formed of this surface and in part of the side walls of these openings. In succession, by etching with an etchant having an orientation anisotropy, dents are formed at high precision in the side walls of the openings. By oxidizing using the oxidation resistant film as the mask, an oxide film growing out from a dent in the opening side wall is connected with another oxide film growing out from an adjacent dent. The transistor thus formed in the active region of the silicon electrically isolated from the substrate is small in parasitic capacitance and may be formed into a small size, so that it possesses the features suited to VLSI, that is, high speed, low power consumption, and processability to high density integration.
    • 公开了通过采用选择氧化技术(LOCOS技术)将晶体管完全隔离的方法。 更具体地,在{100}硅衬底的表面中形成垂直开口,并且由该表面和这些开口的一部分侧壁形成抗氧化膜。 相继地,通过用具有取向各向异性的蚀刻剂进行蚀刻,在开口的侧壁中以高精度形成凹痕。 通过使用抗氧化膜作为掩模进行氧化,从开口侧壁中的凹陷生长的氧化膜与从相邻凹坑生长的另一氧化膜连接。 因此,在与衬底电隔离的硅的有源区中形成的晶体管的寄生电容小,并且可以形成为小尺寸,使得其具有适合于VLSI的特征,即高速度,低功耗, 和可加工性的高密度集成。