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    • 3. 发明授权
    • Selective removal of on-die redistribution interconnects from scribe-lines
    • 从划线中选择性地去除片上再分配互连
    • US08704336B2
    • 2014-04-22
    • US11848879
    • 2007-08-31
    • Jun HeKevin J. LeeSubhash Joshi
    • Jun HeKevin J. LeeSubhash Joshi
    • H01L23/544
    • H01L22/32H01L2924/0002H01L2924/00
    • Selective removal of on-die redistribution interconnect material from a scribe-line region is generally described. In one example, an apparatus includes a first semiconductor die having a redistribution layer comprising redistribution dielectric and one or more redistribution metal interconnects, a second semiconductor die coupled with the first semiconductor die, the second semiconductor die having a redistribution layer comprising redistribution dielectric and one or more redistribution metal interconnects, and a scribe-line region disposed between the first semiconductor die and second semiconductor die, the scribe-line region having a majority or substantially all of redistribution dielectric or redistribution metal, or suitable combinations thereof, selectively removed to enable die singulation through the scribe-line region.
    • 通常描述从划线区域选择性地去除片上再分布互连材料。 在一个示例中,一种装置包括具有再分布层的第一半导体管芯,其包括再分布电介质和一个或多个再分布金属互连,与第一半导体管芯耦合的第二半导体管芯,第二半导体管芯具有包括再分布电介质的再分配层和一个 或更多的再分配金属互连,以及设置在第一半导体管芯和第二半导体管芯之间的划线区域,划分线区域具有大部分或基本上全部的再分布电介质或再分配金属或其合适的组合, 通过划线区划分。
    • 7. 发明申请
    • METHOD AND SYSTEM FOR DATA DISTRIBUTION IN HIGH PERFORMANCE COMPUTING CLUSTER
    • 高性能计算集群数据分配方法与系统
    • US20110138396A1
    • 2011-06-09
    • US12955280
    • 2010-11-29
    • Qi ChenJun HeGuang Lei LiHuo Ding LiWei Liu
    • Qi ChenJun HeGuang Lei LiHuo Ding LiWei Liu
    • G06F9/46
    • G06F9/5066
    • The present invention discloses a method and system for data distribution in a High-Performance Computing cluster, the High-Performance Computing cluster comprising a Management node and M computation nodes where M is an integer greater than or equal to 2, the Management node distributing the specified data to the M computation nodes, the method comprising steps of: dividing the M computation nodes into m layers where m is an integer greater than or equal to 2; dividing the specified data into k shares where k is an integer greater than or equal to 2; distributing, by the Management node, the k shares of data to a first layer of computation nodes as sub-nodes thereof, each of the first layer of computation nodes obtaining at least one share of data therein; distributing, by each of the computation nodes, the at least one share of data distributed by a parent node thereof to sub-computation nodes thereof; and requesting, by each of the computation nodes, the remaining specified data to other computation nodes, to thereby obtain all the specified data. The method and system enable data to be distributed rapidly to various computation nodes in the High-Performance Computing cluster.
    • 本发明公开了一种高性能计算集群中数据分发的方法和系统,该高性能计算集群包括管理节点和M个计算节点,其中M为大于或等于2的整数,管理节点分发 指定的数据到M个计算节点,该方法包括以下步骤:将M个计算节点划分为m个层,其中m是大于或等于2的整数; 将指定的数据划分为k个共享,其中k是大于或等于2的整数; 由管理节点将k份数据分配给第一层计算节点作为其子节点,第一层计算节点中的每一个在其中获得至少一份数据; 由每个计算节点将由其父节点分发的数据的至少一个共享分配给其子计算节点; 并且通过每个计算节点向其他计算节点请求剩余的指定数据,从而获得所有指定的数据。 该方法和系统将数据快速分发到高性能计算集群中的各种计算节点。
    • 9. 发明授权
    • Mechanically robust interconnect for low-k dielectric material using post treatment
    • 使用后处理的低k电介质材料的机械稳健互连
    • US07175970B2
    • 2007-02-13
    • US11286783
    • 2005-11-22
    • Jun HeJihperng Leu
    • Jun HeJihperng Leu
    • G03C5/00H01L21/31
    • H01L21/76831H01L21/76801H01L21/76808H01L21/7682H01L21/76825H01L23/5222H01L23/5226H01L2924/0002Y10S430/143H01L2924/00
    • In an embodiment, a trench is formed above a via from a photo resist (PR) trench pattern in a dielectric layer. The trench is defined by two sidewall portions and base portions. The base portions of the sidewalls are locally treated by a post treatment using the PR trench pattern as mask to enhance mechanical strength of portions of the dielectric layer underneath the base portions. Seed and barrier layers are deposited on the trench and the via. The trench and via are filled with a metal layer. In another embodiment, a trench is formed from a PR trench pattern in a dielectric layer. A pillar PR is deposited and etched to define a pillar opening having a pillar surface. The pillar opening is locally treated on the pillar surface by a post treatment to enhance mechanical strength of portion of the dielectric layer underneath the pillar surface.
    • 在一个实施例中,在电介质层中的光致抗蚀剂(PR)沟槽图案的通孔上方形成沟槽。 沟槽由两个侧壁部分和基部限定。 通过使用PR沟槽图案作为掩模的后处理对侧壁的基部进行局部处理,以增强在基部下方的介电层的部分的机械强度。 种子和阻挡层沉积在沟槽和通孔上。 沟槽和通孔填充有金属层。 在另一个实施例中,沟槽由电介质层中的PR沟槽图案形成。 沉积并蚀刻柱PR以限定具有柱表面的柱开口。 通过后处理在柱面上局部处理立柱开口,以提高柱表面下方的电介质层的部分的机械强度。