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    • 6. 发明授权
    • Method to improve isolation layer fill in a DRAM array area
    • 改善隔离层填充DRAM阵列区域的方法
    • US06578177B2
    • 2003-06-10
    • US09928060
    • 2001-08-13
    • Joseph WuYu-Ping Chu
    • Joseph WuYu-Ping Chu
    • G06F1750
    • H01L27/10891H01L21/76837H01L27/0207H01L27/10888
    • A new method of forming gate conductor lines for a DRAM in the manufacture of an integrated circuit device has been achieved. A semiconductor substrate is provided. Active areas are defined. A gate conductor layer is deposited overlying the semiconductor substrate. The gate conductor layer is patterned to form gate conductor lines. The intersections of the gate conductor lines and the active areas form DRAM transistors. Adjacent gate conductor lines are spaced a first minimum distance in critical regions and are spaced a second minimum distance in non-critical regions. The critical regions are defined as the active areas between adjacent gate conductor lines where bit line contacts are planned. The non-critical regions are defined as areas located between the critical regions and the adjacent gate conductor lines. The second minimum distance is greater than the first minimum distance to thereby decrease the aspect ratio in the non-critical regions to less than the aspect ratio in the critical regions. An insulating layer is deposited overlying the gate conductor lines and the semiconductor substrate. The insulating layer completely fills the non-critical regions without creating voids to thereby eliminate bit line contact to bit line contact shorts without affecting transistor performance.
    • 已经实现了在制造集成电路器件中形成用于DRAM的栅极导体线的新方法。 提供半导体衬底。 定义活动区域。 在半导体衬底上沉积栅极导体层。 图案化栅极导体层以形成栅极导体线。 栅极导体线和有源区的交点形成DRAM晶体管。 相邻的栅极导体线在临界区域中间隔第一最小距离,并且在非关键区域中间隔第二最小距离。 临界区域被定义为在相邻的栅极导体线之间的有源区域,其中位线接触被计划。 非关键区域被定义为位于临界区域和相邻栅极导体线之间的区域。 第二最小距离大于第一最小距离,从而将非关键区域中的宽高比降低到临界区域中的纵横比。 绝缘层沉积在栅极导体线和半导体衬底上。 绝缘层完全填充非关键区域而不产生空隙,从而消除位线接触位线接触短路而不影响晶体管性能。
    • 7. 发明授权
    • Wafer ID optical sorting system
    • 晶圆ID光学分选系统
    • US06265684B1
    • 2001-07-24
    • US09429152
    • 1999-10-28
    • Joseph Wu
    • Joseph Wu
    • B07C500
    • H01L21/67271B07C5/3412
    • A wafer ID optical sorting system includes an auto-ID reader, a manual-ID reader and a conveying device, operation of which units is controlled by a monitoring system. The auto-ID reader, connected to the monitoring system, can automatically read and identify an ID and allows the ID to be displayed on the monitoring system. The manual-ID reader, connected to the monitoring system, can fetch the ID image and allows it to be displayed on the monitoring system. The conveying device, connected to the monitoring system, can move the auto-ID reader and the manual-ID reader.
    • 晶片ID光学分选系统包括自动识别读取器,手动识别读取器和输送装置,由监视系统控制哪些单元的操作。 连接到监控系统的自动识别阅读器可以自动读取和识别ID,并允许ID显示在监控系统上。 连接到监控系统的手动识别读取器可以获取ID图像,并允许它在监控系统上显示。 连接到监控系统的传送设备可以移动自动识别阅读器和手动识别阅读器。