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    • 2. 发明授权
    • Method of fabricating an isolation trench for analog bipolar devices in
harsh environments
    • 在恶劣环境下制造模拟双极器件的隔离沟槽的方法
    • US5561073A
    • 1996-10-01
    • US226804
    • 1994-04-12
    • Rick C. JeromeIan R. C. Post
    • Rick C. JeromeIan R. C. Post
    • H01L21/331H01L21/762H01L27/082H01L21/265
    • H01L29/66265H01L21/76235H01L27/082
    • The present invention teaches a method of making an isolation trench. First, a silicon on insulator ("SOI") structure is provided having a conductive layer superjacent the insulator of the SOI. Second, a trench is formed down to the insulator of the SOI, thereby creating a first and second conductive region. Third, a first silicon dioxide layer is formed conformally with the sidewalls of the first and second conductive region. Fourth, a second silicon dioxide layer is formed conformally and superjacent the first silicon dioxide layer. Fifth, the remaining areas unfilled in the trench are filled with an undoped polysilicon filling. Sixth, the polysilicon layer is planarized. Seventh, an oxide cap is formed on top of the polysilicon refill. Eight, an isolation mask is formed, and the active area openings within the structure are etched down to the single crystal silicon.
    • 本发明教导了制造隔离沟槽的方法。 首先,提供绝缘体上硅(SOI)结构,其具有超过SOI绝缘体的导电层。 第二,沟槽形成在SOI的绝缘体之下,从而产生第一和第二导电区域。 第三,第一二氧化硅层与第一和第二导电区域的侧壁保形地形成。 第四,第二二氧化硅层与第一二氧化硅层保形地相邻地形成。 第五,填埋在沟槽中的剩余区域充满了未掺杂的多晶硅填料。 第六,多晶硅层被平坦化。 第七,在多晶硅再填充物的顶部形成氧化物盖。 八,形成隔离掩模,将结构内的有源区开口刻蚀成单晶硅。
    • 4. 发明授权
    • Method of making bipolar transistor having amorphous silicon contact as
emitter diffusion source
    • 制造具有非晶硅接触的双极晶体管作为发射极扩散源的方法
    • US5670394A
    • 1997-09-23
    • US317155
    • 1994-10-03
    • Rick C. JeromeIan R. C. Post
    • Rick C. JeromeIan R. C. Post
    • H01L21/225H01L21/331H01L21/8228H01L21/265
    • H01L29/66272H01L21/2257H01L21/8228Y10S148/01Y10S148/011
    • The present invention teaches a method for fabricating a bipolar junction transistor ("BJT") from a semiconductor substrate having a base region, wherein the BJT comprises an increased Early voltage. The method initially comprises the step of forming a patterned interlevel dielectric layer superjacent the substrate such that a segment of the substrate is exposed. Subsequently, a contact comprising a material having a grain size smaller than polycrystalline silicon is formed superjacent the patterned interlevel dielectric layer and the segment of the substrate exposed. The contact is then implanted with a dopant. Once implanted, the substrate is annealed to enable the dopant to diffuse from the contact into the base region impeded by the grain size to form an emitter region and thereby increase the Early voltage of the bipolar junction transistor.
    • 本发明教导了一种从具有基极区域的半导体衬底制造双极结型晶体管(“BJT”)的方法,其中BJT包括增加的早期电压。 该方法最初包括以下步骤:在衬底之上形成图案化的层间电介质层,使得衬底的一部分被暴露。 随后,包含具有小于多晶硅的晶粒尺寸的材料的触点形成在图案化的层间电介质层的上方,并且衬底的部分被暴露。 然后用掺杂剂注入接触。 一旦被植入,衬底被退火以使掺杂剂从接触扩散到由晶粒尺寸阻挡的基极区域中,以形成发射极区域,从而增加双极结型晶体管的早期电压。