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1. 发明授权

US08973438B2 Inertial sensor and method of manufacturing the same 有权
标题翻译：惯性传感器及其制造方法
公开(公告)号：US08973438B2
公开(公告)日：2015-03-10
申请号：US13275397
申请日：2011-10-18
申请人： Jong Woon Kim , Sung Jun Lee , Won Kyu Jeung , Min Kyu Choi , Heung Woo Park
发明人： Jong Woon Kim , Sung Jun Lee , Won Kyu Jeung , Min Kyu Choi , Heung Woo Park
IPC分类号： G01P1/02 , G01P15/12 , G01P15/09 , G01C19/5769 , G01C19/5755 , G01P15/08
CPC分类号： G01C25/00 , B32B37/0076 , B32B37/02 , B32B37/12 , B32B37/18 , B32B38/10 , B32B2457/00 , C23F1/02 , G01C19/5755 , G01C19/5769 , G01P15/08 , G01P15/0802 , G01P15/135 , G01P2015/084 , Y10T156/1064
摘要： Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.
摘要翻译：这里公开了惯性传感器及其制造方法。根据本发明的优选实施例的惯性传感器100被构造成包括板状膜110，设置在膜110的中心部分113下方的质量体120，设置在膜110的边缘115下方的柱130 110，以支撑膜110，底盖150的边缘153设置有第一腔155，粘合剂140被引入到其中，其中粘合剂140将边缘153粘合到柱的底表面，由此底盖150的边缘153设置有第一腔155以将粘合剂140引入第一腔155中，从而防止粘合剂140渗透到柱130中。

2. 发明申请

US20130036818A1 INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME 有权
公开(公告)号：US20130036818A1
公开(公告)日：2013-02-14
申请号：US13275397
申请日：2011-10-18
申请人： Jong Woon Kim , Sung Jun Lee , Won Kyu Jeung , Min Kyu Choi , Heung Woo Park
发明人： Jong Woon Kim , Sung Jun Lee , Won Kyu Jeung , Min Kyu Choi , Heung Woo Park
IPC分类号： G01C19/00 , C23F1/00 , B29C65/48
CPC分类号： G01C25/00 , B32B37/0076 , B32B37/02 , B32B37/12 , B32B37/18 , B32B38/10 , B32B2457/00 , C23F1/02 , G01C19/5755 , G01C19/5769 , G01P15/08 , G01P15/0802 , G01P15/135 , G01P2015/084 , Y10T156/1064
摘要： Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.

3. 发明授权

US09052333B2 Sensor capable of measuring acceleration, angular velocity, and DC acceleration 有权
标题翻译：能够测量加速度，角速度和直流加速度的传感器
公开(公告)号：US09052333B2
公开(公告)日：2015-06-09
申请号：US13592198
申请日：2012-08-22
申请人： Jung Tae Park , Seung Heon Han , Jong Woon Kim , Heung Woo Park , Jung Won Lee , Jung Eun Noh , Won Kyu Jeung , Sung Jun Lee
发明人： Jung Tae Park , Seung Heon Han , Jong Woon Kim , Heung Woo Park , Jung Won Lee , Jung Eun Noh , Won Kyu Jeung , Sung Jun Lee
IPC分类号： G01P15/11 , G01P15/08 , G01P15/12 , G01C19/56 , G01P15/09 , G01P15/097
CPC分类号： G01P15/12 , G01C19/56 , G01P15/09 , G01P15/097 , G01P2015/084
摘要： Disclosed herein is an inertial sensor including: a membrane; a mass body provided under the membrane; a plurality of patterned magnets provided under the mass body; and a magnetoresistive element provided to be spaced apart from the mass body and measuring static DC acceleration acting on the mass body through resistance changed according to magnetic fields of the plurality of patterned magnets. The plurality of patterned magnets and the magnetoresistive element are included, thereby making it possible to measure static DC acceleration (particularly, gravity acceleration) that is difficult to measure using an existing to piezoelectric element.
摘要翻译：本文公开了一种惯性传感器，包括：膜; 设置在膜下面的质量体; 设置在所述质量体下方的多个图案化磁体; 以及设置成与质量体间隔开的磁阻元件，并且通过根据多个图案化磁体的磁场而改变的电阻测量作用在质量体上的静态直流加速度。包括多个图案化磁体和磁阻元件，从而可以测量使用现有的压电元件难以测量的静态直流加速度（特别是重力加速度）。

4. 发明申请

US20130081464A1 INERTIAL SENSOR 审中-公开
标题翻译：惯性传感器
公开(公告)号：US20130081464A1
公开(公告)日：2013-04-04
申请号：US13324879
申请日：2011-12-13
申请人： Heung Woo Park , Min Kyu Choi , Jong Woon Kim , Sung Jun Lee
发明人： Heung Woo Park , Min Kyu Choi , Jong Woon Kim , Sung Jun Lee
IPC分类号： G01C19/56
CPC分类号： G01P15/0802 , B81B3/0051 , B81B2201/0235 , G01C19/5783 , G01P2015/0871
摘要： Disclosed herein is an inertial sensor. The inertial sensor includes a sensor part including a driving mass, a flexible substrate part displaceably supporting the driving mass, and a support part supporting the flexible substrate part so that the driving mass is freely movable in a state in which the driving mass is floated; a lower cap covering a lower portion of the driving mass and coupled with the support part and provided with a stopper part limiting a displacement of the driving mass; and a dry film resist coupling the sensor part with the cover and providing an interval between the driving mass and the stopper.
摘要翻译：这里公开了惯性传感器。惯性传感器包括传感器部件，其包括驱动质量块，可移动地支撑驱动质量块的柔性基板部分和支撑柔性基板部分的支撑部件，使得驱动质量块在驱动质量块浮起的状态下可自由移动; 下盖覆盖驱动质量块的下部并与支撑部分联接并设置有限制驱动质量块的位移的止动部分; 以及将传感器部分与盖接合并且提供驱动质量块和止动件之间的间隔的干膜。

5. 发明授权

US08789417B2 Inertial sensor and angular velocity detection method using the same 有权
标题翻译：惯性传感器和角速度检测方法使用相同
公开(公告)号：US08789417B2
公开(公告)日：2014-07-29
申请号：US13303334
申请日：2011-11-23
申请人： Jong Woon Kim , Heung Woo Park , Won Kyu Jeung
发明人： Jong Woon Kim , Heung Woo Park , Won Kyu Jeung
IPC分类号： G01C19/56
CPC分类号： G01P15/08 , G01C19/5747 , G01P15/18
摘要： Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other.
摘要翻译：本文公开了一种惯性传感器，包括：可移动地由支撑件支撑的驱动部分; 驱动电极使所述驱动部振动; 以及检测电极，其在预定方向上检测作用在所述驱动部件上的力，其中所述驱动部件包括：位于所述惯性传感器的中心的中心驱动质量块; 连接到中心驱动质量块并且与中心驱动质量块互锁的侧驱动质量块，并且基于中心驱动质量被定位在四侧; 以及将中心驱动质量块，侧驱动块和支撑件彼此连接的连接桥。

6. 发明授权

US08701489B2 Inertial sensor 失效
标题翻译：惯性传感器
公开(公告)号：US08701489B2
公开(公告)日：2014-04-22
申请号：US13213948
申请日：2011-08-19
申请人： Jong Woon Kim , Jung Won Lee , Seung Hun Han , Won Kyu Jeung , Yun Sung Kang , Heung Woo Park
发明人： Jong Woon Kim , Jung Won Lee , Seung Hun Han , Won Kyu Jeung , Yun Sung Kang , Heung Woo Park
IPC分类号： G01P15/08 , G01P1/02
CPC分类号： G01C19/56
摘要： Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 130 that is provided under a central portion 111 of the membrane 110 and includes an integrated circuit, and a post 140 that are provided under an edge 112 of the membrane 110 to surround the mass body 130, whereby the overall thickness and area of the inertial sensor can be reduced by including the integrated circuit in the mass body 130 to implement a thin and small inertial sensor 100.
摘要翻译：这里公开了惯性传感器。根据本发明的优选实施例的惯性传感器100包括板状膜110，设置在膜110的中心部分111下方并包括集成电路的质量体130，以及设置有柱140 在膜110的边缘112下方围绕质量体130，从而可以通过将集成电路包括在质量体130中来实现惯性传感器的整体厚度和面积，以实现薄而小的惯性传感器100。

7. 发明授权

US08607638B2 Micro electro mechanical systems component 有权
标题翻译：微机电系统组件
公开(公告)号：US08607638B2
公开(公告)日：2013-12-17
申请号：US13324918
申请日：2011-12-13
申请人： Won Kyu Jeung , Jong Woon Kim , Heung Woo Park
发明人： Won Kyu Jeung , Jong Woon Kim , Heung Woo Park
IPC分类号： G01L9/16 , H01L29/84
CPC分类号： G01C19/56 , G01L9/0047 , G01L9/0048 , G01P15/08 , G01P15/14 , G01P2015/084 , G01P2015/0871 , H03B5/30 , H03H9/2405
摘要： Disclosed herein is a MEMS component. The MEMS component according to the exemplary embodiment of the present invention includes: a plate-shaped membrane 110; a post 130 disposed under an edge 115 of the membrane 110; a stopper 140 disposed under the membrane 110 and disposed more inwardly than the post 130 so as to form a space 143 between the stopper 140 and the post 130; and a cap 150 disposed under the post 130 so as to cover the post 130, whereby the influence of disturbance or noise occurring from external environments or interference from surrounding sensors can be interrupted by using a predetermined region 145 of the membrane 110 disposed above the space 143.
摘要翻译：这里公开了一种MEMS部件。根据本发明的示例性实施例的MEMS部件包括：板状膜110; 设置在膜110的边缘115下方的柱130; 止挡件140，其设置在膜110的下方并且比柱130更靠内侧设置，以便在止动件140和柱130之间形成空间143; 以及设置在柱130下方以覆盖柱130的盖150，由此可以通过使用设置在空间上方的膜110的预定区域145来中断来自外部环境的发生的干扰或噪声的影响或来自周围的传感器的干扰的影响 143。

8. 发明申请

US20130019679A1 INERTIAL SENSOR AND ANGULAR VELOCITY DETECTION METHOD USING THE SAME 有权
标题翻译：惯性传感器和使用其的角速度检测方法
公开(公告)号：US20130019679A1
公开(公告)日：2013-01-24
申请号：US13303334
申请日：2011-11-23
申请人： Jong Woon Kim , Heung Woo Park , Won Kyu Jeung
发明人： Jong Woon Kim , Heung Woo Park , Won Kyu Jeung
IPC分类号： G01C19/56
CPC分类号： G01P15/08 , G01C19/5747 , G01P15/18
摘要： Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other.
摘要翻译：本文公开了一种惯性传感器，包括：可移动地由支撑件支撑的驱动部分; 驱动电极使所述驱动部振动; 以及检测电极，其在预定方向上检测作用在所述驱动部件上的力，其中所述驱动部件包括：位于所述惯性传感器的中心的中心驱动质量块; 连接到中心驱动质量块并且与中心驱动质量块互锁的侧驱动质量块，并且基于中心驱动质量被定位在四侧; 以及将中心驱动质量块，侧驱动块和支撑件彼此连接的连接桥。

9. 发明申请

US20120125096A1 INERTIAL SENSOR 审中-公开
标题翻译：惯性传感器
公开(公告)号：US20120125096A1
公开(公告)日：2012-05-24
申请号：US13283517
申请日：2011-10-27
申请人： Heung Woo Park , Won Kyu Jeung , Hyun Kee Lee , Si Joong Yang
发明人： Heung Woo Park , Won Kyu Jeung , Hyun Kee Lee , Si Joong Yang
IPC分类号： G01C19/56
CPC分类号： G01C19/5783
摘要： Disclosed herein is an inertial sensor which includes a sensing unit including a mass mounted to be displaced on a flexible substrate part, a driving unit moving the mass, and a displacement detecting unit detecting a displacement of the mass, the inertial sensor comprising: a top cap covering a top of the flexible substrate part; and a bottom cap covering a bottom of the mass. Thereby, the inertial sensor can be implemented in an economic EMC molding package shape, while protecting the mass and the piezo-electric element. Further, the inertial sensor optimizes a thickness of the cap covering the mass and the piezo-electric element and an interval between the mass and the piezo-electric element to have improved freedom in design of space utilization as well as improved driving characteristics and Q values.
摘要翻译：本文公开了一种惯性传感器，其包括感测单元，该感测单元包括安装成在柔性基板部件上移位的质量，移动该质量块的驱动单元和检测该质量块的位移的位移检测单元，该惯性传感器包括：顶部帽盖覆盖柔性基板部分的顶部; 以及覆盖该质量块底部的底盖。因此，惯性传感器可以以经济的EMC成型包装形式实现，同时保护质量和压电元件。此外，惯性传感器优化覆盖质量块和压电元件的盖的厚度以及质量块和压电元件之间的间隔，以提高空间利用设计的自由度以及改善的驱动特性和Q值。

10. 发明申请

US20120152020A1 INERTIAL SENSOR 失效
标题翻译：惯性传感器
公开(公告)号：US20120152020A1
公开(公告)日：2012-06-21
申请号：US13165436
申请日：2011-06-21
申请人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
发明人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
IPC分类号： G01P15/125 , G01P15/09 , G01P15/12 , G01P15/00
CPC分类号： G01P15/125 , G01P15/09 , G01P15/123 , G01P2015/0842
摘要： Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the central direction of the mass body 130 from the post 140, and a detection unit 170 detecting the displacement of the displacement part 113. The inertial sensor adopts the support part 150 limiting the downward displacement of the mass body 130 to prevent the support portion of the mass body 130 from being damaged.
摘要翻译：这里公开了惯性传感器。设置有惯性传感器100，包括：板状基板层110，质量体130，柱140，从柱140在质量体130的中心方向延伸的支撑部150，以及检测单元 170检测位移部113的位移。惯性传感器采用限制质量体130的向下位移的支撑部150，以防止质量体130的支撑部被损坏。

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