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1. 发明授权

US08505190B2 Method of manufacturing inertial sensor 有权
标题翻译：制造惯性传感器的方法
公开(公告)号：US08505190B2
公开(公告)日：2013-08-13
申请号：US13180289
申请日：2011-07-11
申请人： Hyun Kee Lee , Tae Joon Park , Sang Kee Yoon , Hyung Jae Park , Yeong Gyu Lee , Heung Woo Park
发明人： Hyun Kee Lee , Tae Joon Park , Sang Kee Yoon , Hyung Jae Park , Yeong Gyu Lee , Heung Woo Park
IPC分类号： G01R3/00
CPC分类号： G01P15/08 , B81B2201/0235 , B81B2201/0242 , B81B2203/0315 , B81C1/00269 , B81C2203/032 , G01C19/5663 , G01P15/0802 , Y10T29/49002 , Y10T29/49005 , Y10T29/49007 , Y10T29/4902 , Y10T29/4908 , Y10T29/49124
摘要： Disclosed herein is a method of manufacturing an inertial sensor. The method of manufacturing an inertial sensor 100 includes (A) applying a polymer 120 to a base substrate 110, (B) patterning the polymer 120 so as to form an opening part 125 in the polymer 120, (C) completing a cap 130 by forming a cavity 115 on the base substrate 110 exposed fro the opening part 125 through an etching process in a thickness direction, and (D) bonding the cap 130 to a device substrate 140 by using a polymer 120, whereby the polymer 120 is applied to the base substrate 110 in a constant thickness D3, such that the cap 130 may be easily bonded to the device substrate 140 by using the polymer 120.
摘要翻译：本文公开了一种制造惯性传感器的方法。制造惯性传感器100的方法包括（A）将聚合物120施加到基底基材110上，（B）图案化聚合物120以在聚合物120中形成开口部分125，（C）通过通过在厚度方向上的蚀刻工艺在开口部分125上暴露的基底基板110上形成空腔115，以及（D）通过使用聚合物120将盖130连接到器件基板140，由此将聚合物120施加到基底基板110处于恒定厚度D3，使得帽130可以通过使用聚合物120而容易地结合到装置基板140。

2. 发明授权

US07113689B2 Microelectromechanical systems (MEMS) variable optical attenuator 失效
标题翻译：微机电系统（MEMS）可变光衰减器
公开(公告)号：US07113689B2
公开(公告)日：2006-09-26
申请号：US10606348
申请日：2003-06-26
申请人： Yoon Shik Hong , Young Gyu Lee , Sung Cheon Jung , Sang Kee Yoon , Hyun Kee Lee , Suk Kee Hong , Joon Seok Kang , Jung Hyun Lee
发明人： Yoon Shik Hong , Young Gyu Lee , Sung Cheon Jung , Sang Kee Yoon , Hyun Kee Lee , Suk Kee Hong , Joon Seok Kang , Jung Hyun Lee
IPC分类号： G02B6/00
CPC分类号： G02B6/353 , G02B6/266 , G02B6/35 , G02B6/3552 , G02B6/356 , G02B6/357 , G02B6/358 , G02B6/3582 , G02B6/3592 , G02B6/3594
摘要： An MEMS variable optical attenuator includes a substrate having a planar surface, a micro-electric actuator arranged on the planar surface of the substrate, a pair of coaxially aligned optical waveguides having a receiving end and a transmitting end, respectively, and an optical shutter movable to a predetermined position between the receiving end and the transmitting end of the optical waveguides, and driven by the micro-electric actuator. A surface layer is formed on the optical shutter, has reflectivity less than 80% so as to allow incident light beams to partially transmit thereinto, and further has a sufficient light extinction ratio, thereby extinguishing the partially transmitted light beams therein.
摘要翻译： MEMS可变光衰减器包括具有平面表面的基板，布置在基板的平面表面上的微电致动器，分别具有接收端和发射端的一对同轴对准的光波导，以及可移动的光闸到光波导的接收端和发送端之间的预定位置，并由微电动致动器驱动。表面层形成在光学快门上，具有小于80％的反射率，以便使入射光束部分地透射，并且还具有足够的消光比，由此熄灭其中部分透射的光束。

3. 发明授权

US06816295B2 MEMS variable optical attenuator 失效
标题翻译： MEMS可变光衰减器
公开(公告)号：US06816295B2
公开(公告)日：2004-11-09
申请号：US10610543
申请日：2003-07-02
申请人： Jung Hyun Lee , Sung Cheon Jung , Yoon Shik Hong , Hyun Kee Lee
发明人： Jung Hyun Lee , Sung Cheon Jung , Yoon Shik Hong , Hyun Kee Lee
IPC分类号： G02B2602
CPC分类号： G02B6/353 , G02B6/266 , G02B6/35 , G02B6/3552 , G02B6/356 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B6/3592 , G02B6/3594 , G02B26/0841
摘要： Disclosed is a MEMS (Micro Electro Mechanical System) variable optical attenuator. The MEMS variable optical attenuator comprises a substrate having a flat upper surface; an electrostatic attenuator disposed on the upper surface of the substrate; transmitting and receiving terminals disposed on the substrate so that optical axes of the terminals coincide with each other; and a beam shutter moved to a designated position between the transmitting and receiving terminals by the actuator, wherein the beam shutter is provided with a first coating layer made of a material with a reflectivity of more than 90% and formed on a surface of the beam shutter, and a second coating layer made of a material with a reflectivity of less than 80% so that a part of light is transmitted by the second coating layer and with a photodisintegration rate of the transmitted light determined by a thickness of the second coating layer.
摘要翻译：公开了一种MEMS（微机电系统）可变光衰减器。 MEMS可变光衰减器包括具有平坦的上表面的基板; 设置在所述基板的上表面上的静电衰减器; 设置在基板上的发送和接收端子，使得端子的光轴彼此重合; 并且光束快门通过致动器移动到发射和接收端子之间的指定位置，其中光束快门设置有由反射率大于90％的材料制成的第一涂层并形成在光束的表面上快门和由反射率小于80％的材料制成的第二涂层，使得一部分光被第二涂层透射，并且以由第二涂层的厚度确定的透射光的光聚合速率。

4. 发明授权

US06552839B1 Optical switch 失效
标题翻译：光开关
公开(公告)号：US06552839B1
公开(公告)日：2003-04-22
申请号：US10104692
申请日：2002-03-21
申请人： Yoon Shik Hong , Joon Seok Kang , Sang Kee Yoon , Sung Cheon Jung , Jung Hyun Lee , Hyun Kee Lee
发明人： Yoon Shik Hong , Joon Seok Kang , Sang Kee Yoon , Sung Cheon Jung , Jung Hyun Lee , Hyun Kee Lee
IPC分类号： G02B2600
CPC分类号： G02B6/358 , B81B3/0054 , B81B2201/045 , B81B2203/053 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/3584 , G02B26/0841 , H02N1/006
摘要： Disclosed herein is an optical switch. The optical switch includes an electrostatic actuator and a substrate. The electrostatic actuator includes an electrostatic actuator, the electrostatic actuator comprising, a reciprocating mass located in the center of the electrostatic actuator, first rotating axes located symmetrically at the left and right sides of the reciprocating mass, first rotating masses rotatably connected to the first rotating axes, first rotating springs for supporting the first rotating masses, linear springs connected to the first rotating masses, second rotating masses connected to the linear springs, second rotating springs for supporting the second rotating masses, second rotating axes connected to the second rotating masses, structural anchors at the side ends of the actuator, drive electrodes, and a micro mirror movable by the same displacement as the reciprocating mass.
摘要翻译：这里公开了一种光开关。光开关包括静电致动器和基板。所述静电致动器包括静电致动器，所述静电致动器包括位于所述静电致动器的中心的往复运动物质，位于所述往复运动质量块的左右两侧的第一旋转轴，所述第一旋转体可旋转地连接到所述第一旋转轴，用于支撑第一旋转块的第一旋转弹簧，连接到第一旋转块的线性弹簧，连接到线性弹簧的第二旋转块，用于支撑第二旋转块的第二旋转弹簧，连接到第二旋转块的第二旋转轴，在致动器的侧端处的结构锚固件，驱动电极和可与往复运动块相同位移的微反射镜。

5. 发明授权

US06961488B2 Optical switch and method of producing the same 失效
标题翻译：光开关及其制作方法
公开(公告)号：US06961488B2
公开(公告)日：2005-11-01
申请号：US10689604
申请日：2003-10-22
申请人： Hyun Kee Lee , Sung Cheon Jung , Yoon Shik Hong
发明人： Hyun Kee Lee , Sung Cheon Jung , Yoon Shik Hong
IPC分类号： G02B26/08 , G02B6/12 , G02B6/35 , G02B6/42
CPC分类号： G02B6/3508 , G02B6/3548 , G02B6/355 , G02B6/3566 , G02B6/3584 , G02B2006/121
摘要： Disclosed is herein an optical switch, which has advantages of an MEMS optical switch and a waveguide optical switch including a small electric power consumption, an easy packaging process, and a fast switching speed. The optical switch includes an input waveguide connected to an input optical fiber through which an optical signal is inputted, and a plurality of output waveguides connected to a plurality of output optical fibers through which the optical signal is outputted. An actuator is positioned between the input waveguide and the output waveguides, and has an MEMS structure including a fixed part and a moving part connected to the fixed part by a spring to move by a predetermined force. Additionally, a plurality of moving waveguides are assembled with the moving part of the actuator and move in the same direction as the movement of the moving part in such a way that first ends of the moving waveguides correspond in position to the input waveguide, and second ends of the moving waveguides correspond in position to the output waveguides.
摘要翻译：本文公开了一种光开关，其具有MEMS光开关和波导光开关的优点，该光开关包括小功耗，易封装过程和快速切换速度。光开关包括连接到输入光纤的输入波导，通过该输入光纤输入光信号，以及多个输出波导，连接到输出光信号的多个输出光纤。致动器位于输入波导和输出波导之间，并且具有MEMS结构，其包括固定部分和通过弹簧连接到固定部分的移动部分以通过预定的力移动。此外，多个移动波导与致动器的运动部件组装，并且以与移动部件的移动相同的方向移动，使得移动波导的第一端部与输入波导的位置对应，第二移动波导的端部对应于输出波导的位置。

6. 发明授权

US06718114B2 Variable optical attenuator of optical path conversion 失效
标题翻译：可变光衰减器的光路转换
公开(公告)号：US06718114B2
公开(公告)日：2004-04-06
申请号：US10002663
申请日：2001-10-31
申请人： Yoon Shik Hong , Sung Cheon Jung , Hyun Kee Lee , Jung Hyun Lee
发明人： Yoon Shik Hong , Sung Cheon Jung , Hyun Kee Lee , Jung Hyun Lee
IPC分类号： G02B626
CPC分类号： G02B6/266
摘要： Disclosed is a path-converted variable optical attenuator comprising: a transmitting fiber for launching an optical signal through a transmitting core; a receiving fiber for receiving the optical signal from the transmitting fiber through a receiving core; and a mirror having a reflector for obstructing the optical signal launched from the transmitting core of the transmitting fiber from proceeding into the receiving core of the receiving fiber, and being displaced in a direction allowing a portion of the optical signal of the transmitting fiber into the receiving fiber to attenuate the optical signal. An optical signal launched from the transmitting fiber to the receiving fiber is reflected to a separate path from paths of transmitting/receiving fibers so that attenuation may not vary according to wavelength.
摘要翻译：公开了一种路径转换的可变光衰减器，包括：发射光纤，用于通过发射芯发射光信号; 接收光纤，用于通过接收芯从所述发射光纤接收光信号; 以及反射镜，其具有用于阻挡从发射光纤的发送核心发射的光信号进入接收光纤的接收核心的反射器，并且沿允许发射光纤的光信号的一部分进入接收光纤以衰减光信号。从发射光纤发射到接收光纤的光信号被反射到与发射/接收光纤的路径分离的路径，使得衰减可以不随波长变化。

7. 发明申请

US20120266673A1 INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：惯性传感器及其制造方法
公开(公告)号：US20120266673A1
公开(公告)日：2012-10-25
申请号：US13185660
申请日：2011-07-19
申请人： Hyun Kee Lee , Heung Woo Park , Nam Su Park , Yeong Gyu Lee , Sung Min Cho
发明人： Hyun Kee Lee , Heung Woo Park , Nam Su Park , Yeong Gyu Lee , Sung Min Cho
IPC分类号： G01P15/08 , H01L21/02
CPC分类号： H01L21/50 , G01P15/0802 , G01P15/09
摘要： Disclosed herein is an inertial sensor. The inertial sensor includes a sensor unit including a flexible substrate part on which a driving electrode and a sensing electrode are formed, a mass displaceably mounted on the flexible substrate part, and a support body coupled with the flexible substrate part in order to support the mass in a floated state and made of silicon; and a lower cap covering a bottom portion of the mass and made of silicon, wherein the lower cap and the sensor unit are coupled by a silicon direct bonding method, whereby the inertial sensor and the method of manufacturing the same may be obtained to improve the convenience in manufacturing and the reliability of the sensor by bonding the sensor unit and the lower cap by the silicon direct bonding method.
摘要翻译：这里公开了惯性传感器。惯性传感器包括传感器单元，其包括形成有驱动电极和感测电极的柔性基板部分，可移动地安装在柔性基板部分上的质量以及与柔性基板部分连接以支撑质量的支撑体处于漂浮状态，由硅制成; 以及覆盖所述物体的底部并由硅制成的下盖，其中所述下盖和所述传感器单元通过硅直接粘合方法联接，由此可以获得惯性传感器及其制造方法，以改善通过硅直接粘合法粘合传感器单元和下盖，便于制造和传感器的可靠性。

8. 发明授权

US06833288B2 Dicing method for micro electro mechnical system chip 失效
标题翻译：微机电系统芯片的切割方法
公开(公告)号：US06833288B2
公开(公告)日：2004-12-21
申请号：US10412465
申请日：2003-04-11
申请人： Joon Seok Kang , Sung Cheon Jung , Sang Kee Yoon , Hyun Kee Lee
发明人： Joon Seok Kang , Sung Cheon Jung , Sang Kee Yoon , Hyun Kee Lee
IPC分类号： H01L2144
CPC分类号： B81C1/00888 , B81C1/00896 , B81C2201/053
摘要： A dicing method for a micro electro mechanical system chip, in which a high yield and productivity of chips can be accomplished, resulting from preventing damage to microstructures during a dicing process by using a protective mask. The dicing method for a micro electro mechanical system chip, comprising the steps of designing a grid line and wafer pattern on a chip-scale on the non-adhesive surface of a transparent tape as a protective mask (first step); sticking microstructure-protecting membranes on the adhesive surface of the transparent tape (second step); putting the transparent tape on the whole surface of a wafer in a state wherein the grid line designed on the non-adhesive surface of the transparent tape is matched to the dicing line of the wafer (third step); cutting the transparent tape to a size larger than the wafer, mounting the wafer on a guide ring and dicing the wafer (fourth step); and separating the transparent tape from diced chips (fifth step).
摘要翻译：一种用于微机电系统芯片的切割方法，其中可以通过使用保护掩模在切割过程中防止对微结构的损害而实现高产量和高生产率的芯片。一种微机电系统芯片的切割方法，其特征在于，包括如下步骤：在作为保护罩的透明胶带的非粘合表面上以芯片尺度设计网格线和晶片图案（第一步骤）。在透明胶带的粘合剂表面上粘附微结构保护膜（第二步）; 将透明带放置在晶片的整个表面上，其中设计在透明带的非粘合表面上的栅格线与晶片的切割线相匹配（第三步）。将透明胶带切割成比晶片大的尺寸，将晶片安装在引导环上并切割晶片（第四步骤）; 并将透明胶带分离成切片（第五步）。

9. 发明授权

US06459845B1 Variable optical attenuator 失效
标题翻译：可变光衰减器
公开(公告)号：US06459845B1
公开(公告)日：2002-10-01
申请号：US10094330
申请日：2002-03-08
申请人： Jung Hyun Lee , Yoon Shik Hong , Hyun Kee Lee , Sung Cheon Jung
发明人： Jung Hyun Lee , Yoon Shik Hong , Hyun Kee Lee , Sung Cheon Jung
IPC分类号： G02B610
CPC分类号： G02B6/353 , G02B6/266 , G02B6/3552 , G02B6/357 , G02B6/358 , G02B6/3584
摘要： A variable optical attenuator to provide a new drive mechanism for an actuator, whereby the amount of attenuation does not increase in geometric progression as voltage increases, and an exceptional resolution effect is achieved. The variable optical attenuator comprises a transmission fiber for transmitting beams of light, a reception fiber arranged on the same axis with the transmission fiber and receiving the light beams transmitted by the transmission fiber, a variable shutter arranged between the transmission and reception fibers, and moving vertically to cut off or transmit the light beams, thereby controlling an amount of attenuation, the variable shutter cutting off the light to have a maximum amount of attenuation at an initial position, a comb actuator for driving the variable shutter, and a spring for generating a spring force to return the variable shutter to its initial position, the spring force not being applied in the initial position having the maximum amount of attenuation when a drive voltage of the comb actuator is not applied, and spring force being applied when the variable shutter is driven.
摘要翻译：一种可变光衰减器，用于为致动器提供新的驱动机构，由此当电压增加时衰减量在几何级数中不会增加，并且实现了特殊的分辨率效果。可变光衰减器包括用于发射光束的传输光纤，与传输光纤布置在同一轴上的接收光纤并且接收由传输光纤传输的光束，布置在传输和接收光纤之间的可变快门，以及移动垂直切断或透射光束，从而控制衰减量，可变快门切断光以在初始位置具有最大衰减量，用于驱动可变快门的梳状致动器，以及用于产生弹簧的弹簧将可变挡板返回到其初始位置的弹簧力，当不施加梳状致动器的驱动电压时弹簧力不施加在具有最大衰减量的初始位置，并且当可变挡板被驱动。

10. 发明申请

US20120125096A1 INERTIAL SENSOR 审中-公开
标题翻译：惯性传感器
公开(公告)号：US20120125096A1
公开(公告)日：2012-05-24
申请号：US13283517
申请日：2011-10-27
申请人： Heung Woo Park , Won Kyu Jeung , Hyun Kee Lee , Si Joong Yang
发明人： Heung Woo Park , Won Kyu Jeung , Hyun Kee Lee , Si Joong Yang
IPC分类号： G01C19/56
CPC分类号： G01C19/5783
摘要： Disclosed herein is an inertial sensor which includes a sensing unit including a mass mounted to be displaced on a flexible substrate part, a driving unit moving the mass, and a displacement detecting unit detecting a displacement of the mass, the inertial sensor comprising: a top cap covering a top of the flexible substrate part; and a bottom cap covering a bottom of the mass. Thereby, the inertial sensor can be implemented in an economic EMC molding package shape, while protecting the mass and the piezo-electric element. Further, the inertial sensor optimizes a thickness of the cap covering the mass and the piezo-electric element and an interval between the mass and the piezo-electric element to have improved freedom in design of space utilization as well as improved driving characteristics and Q values.
摘要翻译：本文公开了一种惯性传感器，其包括感测单元，该感测单元包括安装成在柔性基板部件上移位的质量，移动该质量块的驱动单元和检测该质量块的位移的位移检测单元，该惯性传感器包括：顶部帽盖覆盖柔性基板部分的顶部; 以及覆盖该质量块底部的底盖。因此，惯性传感器可以以经济的EMC成型包装形式实现，同时保护质量和压电元件。此外，惯性传感器优化覆盖质量块和压电元件的盖的厚度以及质量块和压电元件之间的间隔，以提高空间利用设计的自由度以及改善的驱动特性和Q值。

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