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    • 2. 发明授权
    • Disk drive breather filter
    • 磁盘驱动器呼吸器过滤器
    • US5030260A
    • 1991-07-09
    • US445818
    • 1989-12-04
    • John L. BeckCharles A. BrownTodd P. FracekNigel F. MissoLeo VolpeHerman R. WendtThomas A. Gregory
    • John L. BeckCharles A. BrownTodd P. FracekNigel F. MissoLeo VolpeHerman R. WendtThomas A. Gregory
    • B01D50/00G11B33/14
    • G11B33/1486B01D50/00Y10S360/903
    • The magnetic disk drive chemical breather filter of the present invention affords protection with respect to chemical vapors and gases in addition to trapping particulate pollutants. The chemical filter as described, protects against both organic vapors and inorganic gases. In addition particulate filters are interposed between the chemical filters and both the exterior atmosphere and internal atmosphere. The combined filter is isolated from both external and internal atmosphere by extended length diffusion passages. Both difffusion passages are composed of multiple parallel paths to prevent the blockage of any single path from impairing the functioning of the filter. Chambers formed at each side of the combined filter medium and access thereto by the diffusion passages at the center of one chamber and the periphery of the other enables the length of the air passage through the filter medium to be equal irrespective of the portion of the filter through which the air flow passes. Using an activated carbon fabric chemical filter and coplanar multiple diffusion paths, a low profile, low cost filter assembly is achieved. The use of ultrasonic welding of the parts eliminates connector devices and adhesives as sources of contamination.
    • 本发明的磁盘驱动化学通气过滤器除了捕获颗粒污染物外,还提供了关于化学气体和气体的保护。 所述的化学过滤器可防止有机蒸气和无机气体。 此外,颗粒过滤器介于化学过滤器和外部气氛和内部气氛之间。 组合过滤器通过扩展长度的扩散通道从外部和内部大气隔离。 两个扩散通道由多个平行路径组成,以防止任何单一路径的堵塞损害过滤器的功能。 在组合的过滤介质的每一侧形成的腔室通过在一个室的中心处的扩散通道和另一个腔室的周边进入,使得通过过滤介质的空气通道的长度与过滤器的部分无关 气流通过。 使用活性炭织物化学过滤器和共面多个扩散路径,实现了低调,低成本的过滤器组件。 使用超声波焊接零件可以消除连接器和粘合剂作为污染源。
    • 3. 发明授权
    • Vapor drain system
    • 蒸气排放系统
    • US5346518A
    • 1994-09-13
    • US35999
    • 1993-03-23
    • Robert J. BasemanCharles A. BrownBenjamin N. EldridgeLaura B. RothmanHerman R. WendtJames T. YehArthur R. Zingher
    • Robert J. BasemanCharles A. BrownBenjamin N. EldridgeLaura B. RothmanHerman R. WendtJames T. YehArthur R. Zingher
    • B65D85/86B65G1/00H01L21/673H01L21/677B65B5/00B65D81/26B65D85/62F17C11/00
    • H01L21/67366B65G1/00H01L21/67393
    • During wafer fabrication, a transportable enclosure, such as a Standard Manufacturing InterFace (SMIF) pod encloses a nascent product, such as a semiconductor wafer, to protect the wafer against contamination during manufacture, storage or transportation. However chemical vapors emitted inside the pod can accumulate in the air and degrade wafers during subsequent fabrication. In order to absorb the vapors inside a closed pod, a vapor removal element typically including an activated carbon absorber, covered by a particulate-filtering vapor-permeable barrier, and covered by a guard plate with holes is disposed within the enclosure. A vapor removal element is disposed closely adjacent to each respective wafer. Alternatively, a single vapor removal element is located inside the enclosure. In certain instances, a fan or thermo-buoyant circulation causes any vapors located inside the enclosure to a vapor removal element for removal. Alternatively a porous vapor removal element may be disposed for removing vapors from air entering the enclosure. In another embodiment a vapor removal element is integrated with the back face of each wafer.
    • 在晶片制造期间,诸如标准制造界面(SMIF)的可移动外壳包围新生产品,例如半导体晶片,以在制造,存储或运输期间保护晶片免受污染。 然而,发射在荚内的化学气体可能积聚在空气中,并在随后的制造过程中降解晶片。 为了吸收封闭的容器内的蒸气,通常包括活性炭吸收器的蒸气去除元件被覆盖有颗粒过滤蒸气可透过的屏障并被具有孔的保护板覆盖。 蒸汽去除元件被设置为紧邻每个相应的晶片。 或者,单个蒸气去除元件位于外壳内。 在某些情况下,风扇或热浮动循环使得位于外壳内部的任何蒸气成为除去蒸气的元件。 或者,可以设置多孔蒸气去除元件以从进入外壳的空气中除去蒸汽。 在另一个实施例中,蒸气去除元件与每个晶片的背面一体化。
    • 4. 发明授权
    • Chemical breather filter assembly
    • 化学通气过滤器总成
    • US5447695A
    • 1995-09-05
    • US324279
    • 1994-10-14
    • Charles A. BrownHerman R. Wendt
    • Charles A. BrownHerman R. Wendt
    • G11B33/14B01D50/00
    • G11B33/1486
    • A data recording disk drive has an improved breather filter assembly that removes both chemical contaminants and particulate matter. The filter assembly includes a housing having an internal passage and a recess that supports and contains the chemical and particulate filter elements. The passage in the filter housing provides fluid communication between the breather opening and a sheet of chemical filter material. A barrier plate is also located in the filter housing recess adjacent to the side of the chemical filter sheet not exposed to air from the passage. The barrier plate prevents air from flowing through the chemical filter material and redirects the air flow across the surface of the chemical filter sheet. After the air flows by the chemical filter sheet, it is redirected through the particulate filter element and into the disk drive enclosure. The air entering the disk drive enclosure does not generally enter into the interior of the chemical filter material by forced conduction, but flows by the surface of the material so that the chemical filter does not significantly increase the flow impedance of the filter assembly, as in prior art breather filter assemblies. The flow across the surface of the material allows contaminants to diffuse into the getter material and become trapped.
    • 数据记录磁盘驱动器具有改进的通气过滤器组件,其去除化学污染物和颗粒物质。 过滤器组件包括具有内部通道和支撑并容纳化学和微粒过滤元件的凹部的壳体。 过滤器壳体中的通道提供通气开口和一片化学过滤材料之间的流体连通。 阻挡板也位于过滤器容纳凹部中,邻近未暴露于通道的空气的化学过滤片的侧面。 阻挡板防止空气流过化学过滤材料并将空气流重新定向穿过化学过滤片的表面。 在空气通过化学过滤片流动之后,其被重新定向通过颗粒过滤元件并进入盘驱动器外壳。 进入磁盘驱动器外壳的空气通常不会通过强制传导进入化学过滤材料的内部,而是通过材料的表面流动,使得化学过滤器不会显着增加过滤器组件的流动阻抗,如 现有技术的通气过滤器组件。 穿过材料表面的流动允许污染物扩散到吸气剂材料中并被捕获。
    • 5. 发明授权
    • Disk drive with flow-by chemical breather filter
    • 带有流通化学通气过滤器的磁盘驱动器
    • US5367417A
    • 1994-11-22
    • US168541
    • 1993-12-16
    • Charles A. BrownHerman R. Wendt
    • Charles A. BrownHerman R. Wendt
    • G11B33/14G11B17/02
    • G11B33/1486
    • A data recording disk drive has an improved breather filter assembly that removes both chemical contaminants and particulate matter. The filter assembly includes a housing having an internal passage and a recess that supports and contains the chemical and particulate filter elements, The passage in the filter housing provides fluid communication between the breather opening and a sheet of chemical filter material. A barrier plate is also located in the filter housing recess adjacent to the side of the chemical filter sheet not exposed to air from the passage. The barrier plate prevents air from flowing through the chemical filter material and redirects the air flow across the surface of the chemical filter sheet. After the air flows by the chemical filter sheet, it is redirected through the particulate filter element and into the disk drive enclosure. The air entering the disk drive enclosure does not generally enter into the interior of the chemical filter material by forced conduction, but flows by the surface of the material so that the chemical filter does not significantly increase the flow impedance of the filter assembly, as in prior art breather filter assemblies. The flow across the surface of the material allows contaminants to diffuse into the getter material and become trapped.
    • 数据记录磁盘驱动器具有改进的通气过滤器组件,其去除化学污染物和颗粒物质。 过滤器组件包括具有内部通道和支撑并容纳化学和微粒过滤器元件的凹部的壳体。过滤器壳体中的通道提供通气开口和一片化学过滤材料之间的流体连通。 阻挡板也位于过滤器容纳凹部中,邻近未暴露于通道的空气的化学过滤片的侧面。 阻挡板防止空气流过化学过滤材料并将空气流重新定向穿过化学过滤片的表面。 在空气通过化学过滤片流动之后,其被重新定向通过颗粒过滤元件并进入盘驱动器外壳。 进入磁盘驱动器外壳的空气通常不会通过强制传导进入化学过滤材料的内部,而是通过材料的表面流动,使得化学过滤器不会显着增加过滤器组件的流动阻抗,如 现有技术的通气过滤器组件。 穿过材料表面的流动允许污染物扩散到吸气剂材料中并被捕获。
    • 6. 发明授权
    • Apparatus and method for controlling vapor phase within an enclosure
    • 用于控制外壳内气相的装置和方法
    • US5229899A
    • 1993-07-20
    • US884262
    • 1992-05-08
    • Charles A. BrownThomas A. GregoryChristopher G. KellerHerman R. WendtArthur R. Zingher
    • Charles A. BrownThomas A. GregoryChristopher G. KellerHerman R. WendtArthur R. Zingher
    • G11B25/04G11B33/14
    • G11B25/043G11B33/1453G11B33/1446
    • The vapor drain is a device that permits steady state control of the composition of the atmosphere within a substantially sealed enclosure. For any fabricated enclosure the will be sources of vapor phase molecules: molecules evaporating from a deliberately installed lubricant reservoir, molecules outgassed from components, and molecules diffusing in from the outside world. The purpose of the vapor drain is to minimize the second two classes of molecules in the composition of the enclosure atmosphere as they are considered to be contaminants. An example application is a rigid disk magnetic data storage device which requires a monomelecular layer of lubricant on the disk and slider surfaces. The vapor drains suppresses the contaminant population by capturing a portion of all three sources of molecules in the vapor phase. The vapor drain is a filter which has an active element of at least one of activated carbon, silica gel, activated alumina, synthetic zeolite, and other material with a large surface to volume ratio with the ability to adsorb vapor components from the atmosphere.
    • 蒸汽排放是允许在基本上密封的外壳内对气氛的组成进行稳态控制的装置。 对于任何制造的外壳,将是气相分子的来源:从故意安装的润滑剂储存器蒸发的分子,从组分脱气的分子和从外部扩散的分子。 蒸气排放的目的是使外壳气氛的组成中的第二两类分子最小化,因为它们被认为是污染物。 一个示例应用是刚性盘磁数据存储装置,其需要在盘和滑块表面上的单分子润滑剂层。 蒸汽排放通过捕获气相中所有三个分子源的一部分来抑制污染物群体。 蒸气排放是具有活性炭,硅胶,活性氧化铝,合成沸石和其它具有大的表面积与体积比的材料中的至少一种的活性元素的过滤器,其具有吸附大气中蒸气成分的能力。