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1. 发明申请

US20060212248A1 Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station 有权
标题翻译：在探测台中再现对准的和之后移位的校准基板的校准位置的步骤
公开(公告)号：US20060212248A1
公开(公告)日：2006-09-21
申请号：US11365424
申请日：2006-03-01
申请人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
发明人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
IPC分类号： G01C17/38
CPC分类号： G01R31/2891
摘要： A wafer probe station is provided with a wafer chuck, a wafer fastened on the chuck by vacuum suction, and a probe needle arrangement above the wafer to test the wafer at high frequencies by contacting selected pads on the wafer and alternately pads on a calibration substrate also fastened on the wafer chuck. A procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate uses first and second measurement systems to calculate a new offset position of the calibration substrate after a second wafer is loaded on the wafer chuck. In a last step, the wafer chuck is driven by a 4axis manipulator stage to the new calibration position from the recent position.
摘要翻译：晶片探针台设置有晶片卡盘，通过真空吸附紧固在卡盘上的晶片，以及在晶片上方的探针针布置，以通过接触晶片上的选定的焊盘并在校准基板上交替地焊接来高速测试晶片也固定在晶片卡盘上。用于再现对准的和随后移位的校准基板的校准位置的过程使用第一和第二测量系统来计算在第二晶片装载在晶片卡盘上之后校准基板的新偏移位置。在最后一步中，晶片卡盘由最近的位置由4轴的机械手级驱动到新的校准位置。

2. 发明授权

US07265536B2 Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station 有权
标题翻译：在探测台中再现对准的和之后移位的校准基板的校准位置的步骤
公开(公告)号：US07265536B2
公开(公告)日：2007-09-04
申请号：US11365424
申请日：2006-03-01
申请人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
发明人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
IPC分类号： G01R31/02 , G01R35/00
CPC分类号： G01R31/2891
摘要： A wafer probe station is provided with a wafer chuck, a wafer fastened on the chuck by vacuum suction, and a probe needle arrangement above the wafer to test the wafer at high frequencies by contacting selected pads on the wafer and alternately pads on a calibration substrate also fastened on the wafer chuck. A procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate uses first and second measurement systems to calculate a new offset position of the calibration substrate after a second wafer is loaded on the wafer chuck. In a last step, the wafer chuck is driven by a 4axis manipulator stage to the new calibration position from the recent position.
摘要翻译：晶片探针台设置有晶片卡盘，通过真空吸附紧固在卡盘上的晶片，以及在晶片上方的探针针布置，以通过接触晶片上的选定的焊盘并在校准基板上交替地焊接来高速测试晶片也固定在晶片卡盘上。用于再现对准的和随后移位的校准基板的校准位置的过程使用第一和第二测量系统来计算在第二晶片装载在晶片卡盘上之后校准基板的新偏移位置。在最后一步中，晶片卡盘由最近的位置由4轴的机械手级驱动到新的校准位置。

3. 发明申请

US20080116918A1 PROBE STATION TO TESTING SEMICONDUCTOR SUBSTRATES AND COMPRISING EMI SHIELDING 有权
标题翻译：探测半导体衬底的探测台，并包含EMI屏蔽
公开(公告)号：US20080116918A1
公开(公告)日：2008-05-22
申请号：US11940355
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Juergen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Juergen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/26
CPC分类号： G01R31/2886 , G01R1/18
摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.
摘要翻译：适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是最小化，并且还包括用于准备测试信号的装置。此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

4. 发明授权

US07652491B2 Probe support with shield for the examination of test substrates under use of probe supports 有权
标题翻译：使用探头支架检测测试基板的探头支架
公开(公告)号：US07652491B2
公开(公告)日：2010-01-26
申请号：US11940354
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G10R31/28
CPC分类号： G01R31/2889 , G01R1/07342
摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.
摘要翻译：用于保持探头的探针支架用于探测器中的测试基板的电接触以用于测试目的包括探针卡夹，探针卡和探针卡适配器。探针卡和探针卡适配器彼此电连接为以及导电材料的屏蔽件，并且被布置成使得探针卡位于屏蔽件的通道中。屏蔽件设置在测试基板和探针卡座之间并且与保持器电绝缘。为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的，由x分量和y分量组成直到第一个和每个附加的接触位置。

5. 发明授权

US08497693B2 Method for testing a test substrate under defined thermal conditions and thermally conditionable prober 有权
标题翻译：在确定的热条件下测试测试基板的方法和热定向探针
公开(公告)号：US08497693B2
公开(公告)日：2013-07-30
申请号：US12681806
申请日：2008-10-01
申请人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
发明人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2874
摘要： In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
摘要翻译：在用于在限定的热条件下测试测试基板的方法和装置中，待测试的基板由温度可控的卡盘保持并设定在限定的温度; 测试基板通过至少一个定位装置相对于测试探针定位; 并且测试探针与测试基板接触以进行测试。存在于受温度控制的测试基板附近的定位装置的至少一个部件通过温度控制装置设定为与测试基板的温度无关的温度，并且该温度保持恒定。

6. 发明申请

US20100289511A1 METHOD FOR TESTING A TEST SUBSTRATE UNDER DEFINED THERMAL CONDITIONS AND THERMALLY CONDITIONABLE PROBER 有权
标题翻译：在定义的热条件和热调节探头下测试测试基板的方法
公开(公告)号：US20100289511A1
公开(公告)日：2010-11-18
申请号：US12681806
申请日：2008-10-01
申请人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
发明人： Joerg Kiesewetter , Stojan Kanev , Michael Teich , Karsten Stoll , Axel Schmidt
IPC分类号： G01R31/00
CPC分类号： G01R31/2891 , G01R31/2874
摘要： In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.
摘要翻译：在用于在限定的热条件下测试测试基板的方法和装置中，待测试的基板由温度可控的卡盘保持并设定在限定的温度; 测试基板通过至少一个定位装置相对于测试探针定位; 并且测试探针与测试基板接触以进行测试。存在于受温度控制的测试基板附近的定位装置的至少一个部件通过温度控制装置设定为与测试基板的温度无关的温度，并且该温度保持恒定。

7. 发明授权

US08278951B2 Probe station for testing semiconductor substrates and comprising EMI shielding 有权
标题翻译：用于测试半导体衬底并包含EMI屏蔽的探头站
公开(公告)号：US08278951B2
公开(公告)日：2012-10-02
申请号：US11940355
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/00
CPC分类号： G01R31/2886 , G01R1/18
摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.
摘要翻译：适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是最小化，并且还包括用于准备测试信号的装置。此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

8. 发明申请

US20080116917A1 PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS 有权
标题翻译：在使用探测支持下检测测试基板的探测支持和过程
公开(公告)号：US20080116917A1
公开(公告)日：2008-05-22
申请号：US11940354
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/02
CPC分类号： G01R31/2889 , G01R1/07342
摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes is specified. A process for testing test substrates in such a prober is also specified. The probe support comprises a probe card holder, a probe card, and a probe card adapter, where the probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed in such a manner that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from it. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component (FIG. 2).
摘要翻译：规定了用于保持探头的探针支架，用于检测探针中的测试基板的电接触用于测试目的。还规定了用于在这种探测器中测试测试底物的方法。探针支架包括探针卡夹，探针卡和探针卡适配器，其中探针卡和探针卡适配器彼此电连接以及导电材料的屏蔽，并以这种方式设置探针卡位于屏蔽的通道中。屏蔽件设置在测试基板和探针卡保持器之间并且与其电绝缘。为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的，由x分量和y分量（图2）组成直到第一个和每个附加的接触位置。

9. 发明授权

US07038441B2 Test apparatus with loading device 有权
标题翻译：带装载装置的试验装置
公开(公告)号：US07038441B2
公开(公告)日：2006-05-02
申请号：US10677524
申请日：2003-10-02
申请人： Karsten Stoll , Stefan Kreissig , Alf Wachtveitl , Michael Teich , Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Dietmar Runge
发明人： Karsten Stoll , Stefan Kreissig , Alf Wachtveitl , Michael Teich , Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Dietmar Runge
IPC分类号： G01R31/02
CPC分类号： G01R31/2865 , G01R31/2806 , G01R31/2831 , G01R31/2887
摘要： The invention, which relates to a test apparatus with loading device which has a chuck, which is provided with a bearing surface for a test substrate and with a chuck drive, by means of which the chuck can be displaced with a working area, and which has a receiving means for receiving test substrates, which can be displaced from a working area of the chuck to a receiving position outside the working area, is based on the object of increasing the accuracy of the movement of the chuck. Moreover, in the case of test apparatus with a controlled atmosphere, a further object is to prevent the chuck from being exposed to the open-air atmosphere. This is achieved by virtue of the fact that a carriage, which can be displaced between a position close to the chuck, in which the chuck is located in a position inside the working area, and the receiving position, is provided, which carriage is provided with a holder, in which the test substrate can be at least indirectly inserted in such a way that the test substrate, when the carriage is in the position close to the chuck, is located above the chuck. The holder and the chuck can move vertically relative to one another when the carriage is in the position close to the chuck.
摘要翻译：本发明涉及具有卡盘的装载装置的测试装置，其具有用于测试基板的轴承表面和卡盘驱动装置，通过该卡盘驱动器卡盘可以移动工作区域，并且其中具有用于接收可以从卡盘的工作区域移动到工作区域外部的接收位置的测试基板的接收装置，其基础是提高卡盘的运动精度的目的。此外，在具有受控气氛的测试装置的情况下，另一个目的是防止卡盘暴露于露天气氛。这是通过以下事实来实现的：提供了可以在卡盘位于工作区域内的位置的接近卡盘的位置之间移动的托架和接收位置，该托架被设置具有保持器，其中测试基板可以至少间接地插入，使得当托架处于靠近卡盘的位置时，测试基板位于卡盘上方。当托架位于靠近卡盘的位置时，托架和夹头可以相对于彼此垂直移动。

10. 发明授权

US08240650B2 Chuck with triaxial construction 有权
标题翻译：夹头三轴结构
公开(公告)号：US08240650B2
公开(公告)日：2012-08-14
申请号：US12048323
申请日：2008-03-14
申请人： Michael Teich , Karsten Stoll , Axel Schmidt , Stojan Kanev , Jörg Kiesewetter
发明人： Michael Teich , Karsten Stoll , Axel Schmidt , Stojan Kanev , Jörg Kiesewetter
IPC分类号： B25B1/00 , B23Q3/00 , G01R31/20 , F28F7/00 , B23B31/30 , B23B31/12
CPC分类号： G01R1/04 , G01R31/2865 , H01L21/68714 , H01L21/68757 , Y10T279/11 , Y10T279/18
摘要： A chuck with triaxial construction comprises a receiving surface for a test substrate and arranged below the receiving surface: an electrically conductive first surface element, an electrically conductive second surface element electrically insulated therefrom, and an electrically conductive third surface element electrically insulated therefrom, and, between the first and the second surface element, a first insulation element and, between the second and the third surface element, a second insulation element. A chuck for very low current measurements which can be used to prevent the occurrence of leakage currents and a triboelectric charge and which is configured favourably in terms of production, is achieved because at least one of the electrically conductive surface elements is mechanically connected to at least one insulation element and has an elasticity that compensates for an expansion difference resulting from differences in different coefficients of expansion between a respective surface element and an adjoining insulation element.
摘要翻译：具有三轴结构的卡盘包括用于测试基板的接收表面并且布置在接收表面下方：导电的第一表面元件，与其电绝缘的导电的第二表面元件和与其电绝缘的导电的第三表面元件，在第一和第二表面元件之间，第一绝缘元件和第二和第三表面元件之间的第二绝缘元件。实现了用于非常低的电流测量的卡盘，其可用于防止泄漏电流和摩擦电荷的发生，并且在生产方面被有利地配置，这是因为至少一个导电表面元件至少机械地连接到一个绝缘元件并且具有补偿由相应的表面元件和相邻绝缘元件之间的不同膨胀系数的差异引起的膨胀差的弹性。

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