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1. 发明申请

US20080116918A1 PROBE STATION TO TESTING SEMICONDUCTOR SUBSTRATES AND COMPRISING EMI SHIELDING 有权
标题翻译：探测半导体衬底的探测台，并包含EMI屏蔽
公开(公告)号：US20080116918A1
公开(公告)日：2008-05-22
申请号：US11940355
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Juergen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Juergen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/26
CPC分类号： G01R31/2886 , G01R1/18
摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.
摘要翻译：适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是最小化，并且还包括用于准备测试信号的装置。此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

2. 发明授权

US07652491B2 Probe support with shield for the examination of test substrates under use of probe supports 有权
标题翻译：使用探头支架检测测试基板的探头支架
公开(公告)号：US07652491B2
公开(公告)日：2010-01-26
申请号：US11940354
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G10R31/28
CPC分类号： G01R31/2889 , G01R1/07342
摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.
摘要翻译：用于保持探头的探针支架用于探测器中的测试基板的电接触以用于测试目的包括探针卡夹，探针卡和探针卡适配器。探针卡和探针卡适配器彼此电连接为以及导电材料的屏蔽件，并且被布置成使得探针卡位于屏蔽件的通道中。屏蔽件设置在测试基板和探针卡座之间并且与保持器电绝缘。为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的，由x分量和y分量组成直到第一个和每个附加的接触位置。

3. 发明授权

US08278951B2 Probe station for testing semiconductor substrates and comprising EMI shielding 有权
标题翻译：用于测试半导体衬底并包含EMI屏蔽的探头站
公开(公告)号：US08278951B2
公开(公告)日：2012-10-02
申请号：US11940355
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/00
CPC分类号： G01R31/2886 , G01R1/18
摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.
摘要翻译：适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是最小化，并且还包括用于准备测试信号的装置。此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

4. 发明申请

US20080116917A1 PROBE SUPPORT AND PROCESS FOR THE EXAMINATION OF TEST SUBSTRATES UNDER USE OF PROBE SUPPORTS 有权
标题翻译：在使用探测支持下检测测试基板的探测支持和过程
公开(公告)号：US20080116917A1
公开(公告)日：2008-05-22
申请号：US11940354
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/02
CPC分类号： G01R31/2889 , G01R1/07342
摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes is specified. A process for testing test substrates in such a prober is also specified. The probe support comprises a probe card holder, a probe card, and a probe card adapter, where the probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed in such a manner that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from it. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component (FIG. 2).
摘要翻译：规定了用于保持探头的探针支架，用于检测探针中的测试基板的电接触用于测试目的。还规定了用于在这种探测器中测试测试底物的方法。探针支架包括探针卡夹，探针卡和探针卡适配器，其中探针卡和探针卡适配器彼此电连接以及导电材料的屏蔽，并以这种方式设置探针卡位于屏蔽的通道中。屏蔽件设置在测试基板和探针卡保持器之间并且与其电绝缘。为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的，由x分量和y分量（图2）组成直到第一个和每个附加的接触位置。

5. 发明申请

US20060212248A1 Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station 有权
标题翻译：在探测台中再现对准的和之后移位的校准基板的校准位置的步骤
公开(公告)号：US20060212248A1
公开(公告)日：2006-09-21
申请号：US11365424
申请日：2006-03-01
申请人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
发明人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
IPC分类号： G01C17/38
CPC分类号： G01R31/2891
摘要： A wafer probe station is provided with a wafer chuck, a wafer fastened on the chuck by vacuum suction, and a probe needle arrangement above the wafer to test the wafer at high frequencies by contacting selected pads on the wafer and alternately pads on a calibration substrate also fastened on the wafer chuck. A procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate uses first and second measurement systems to calculate a new offset position of the calibration substrate after a second wafer is loaded on the wafer chuck. In a last step, the wafer chuck is driven by a 4axis manipulator stage to the new calibration position from the recent position.
摘要翻译：晶片探针台设置有晶片卡盘，通过真空吸附紧固在卡盘上的晶片，以及在晶片上方的探针针布置，以通过接触晶片上的选定的焊盘并在校准基板上交替地焊接来高速测试晶片也固定在晶片卡盘上。用于再现对准的和随后移位的校准基板的校准位置的过程使用第一和第二测量系统来计算在第二晶片装载在晶片卡盘上之后校准基板的新偏移位置。在最后一步中，晶片卡盘由最近的位置由4轴的机械手级驱动到新的校准位置。

6. 发明授权

US07265536B2 Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station 有权
标题翻译：在探测台中再现对准的和之后移位的校准基板的校准位置的步骤
公开(公告)号：US07265536B2
公开(公告)日：2007-09-04
申请号：US11365424
申请日：2006-03-01
申请人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
发明人： Joerg Kiesewetter , Axel Schmidt , Stefan Kreissig , Karsten Stoll , Ralph Juettner , Hans-Juergen Fleischer
IPC分类号： G01R31/02 , G01R35/00
CPC分类号： G01R31/2891
摘要： A wafer probe station is provided with a wafer chuck, a wafer fastened on the chuck by vacuum suction, and a probe needle arrangement above the wafer to test the wafer at high frequencies by contacting selected pads on the wafer and alternately pads on a calibration substrate also fastened on the wafer chuck. A procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate uses first and second measurement systems to calculate a new offset position of the calibration substrate after a second wafer is loaded on the wafer chuck. In a last step, the wafer chuck is driven by a 4axis manipulator stage to the new calibration position from the recent position.
摘要翻译：晶片探针台设置有晶片卡盘，通过真空吸附紧固在卡盘上的晶片，以及在晶片上方的探针针布置，以通过接触晶片上的选定的焊盘并在校准基板上交替地焊接来高速测试晶片也固定在晶片卡盘上。用于再现对准的和随后移位的校准基板的校准位置的过程使用第一和第二测量系统来计算在第二晶片装载在晶片卡盘上之后校准基板的新偏移位置。在最后一步中，晶片卡盘由最近的位置由4轴的机械手级驱动到新的校准位置。

7. 发明授权

US07579849B2 Probe holder for a probe for testing semiconductor components 有权
标题翻译：用于测试半导体元件的探头的探头支架
公开(公告)号：US07579849B2
公开(公告)日：2009-08-25
申请号：US11674430
申请日：2007-02-13
申请人： Jorg Kiesewetter , Stefan Kreissig , Stojan Kanev
发明人： Jorg Kiesewetter , Stefan Kreissig , Stojan Kanev
IPC分类号： G01R31/02
CPC分类号： G01R1/06705 , G01R1/0675
摘要： A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.
摘要翻译：探针支架，其中探针在垂直力的作用下具有轻微的水平偏移，包括用于探针的探针支架，其中该支架适于紧固和电接触连接在载体装置上测试装置，并且具有在其自由端具有针保持器的保持臂，用于固定探针，以及用于将探针保持器连接到载体装置的紧固臂。保持臂和紧固臂通过铰接接头彼此连接，由此可以通过增加探针的屈服运动的半径来减小或甚至防止由于外力引起的针尖的水平偏移。

8. 发明申请

US20090049944A1 MICROMANIPULATOR FOR MOVING A PROBE 审中-公开
标题翻译：用于移动探头的微型计算机
公开(公告)号：US20090049944A1
公开(公告)日：2009-02-26
申请号：US12022261
申请日：2008-01-30
申请人： Jorg Kiesewetter , Stojan Kanev , Lutz Junker , Stefan Kreissig
发明人： Jorg Kiesewetter , Stojan Kanev , Lutz Junker , Stefan Kreissig
IPC分类号： B25J7/00
CPC分类号： B25J7/00 , B25J9/144 , G01R1/06705 , Y10T74/20207
摘要： A micromanipulator for moving a probe comprises two elements which are mechanically connected to one another in such a way that one element can be moved relative to other element. The movement of the element occurs as a result of the pressure change of a fluid which acts upon an actuator which is in mechanical contact to a mobile element or to an element moving on a surface segment.
摘要翻译：用于移动探针的显微操纵器包括两个元件，这两个元件以相对于其它元件移动一个元件的方式彼此机械连接。元件的运动是由于作用在致动器上的流体的压力变化的结果，该致动器机械地接触到移动元件或者在表面段上移动的元件。

9. 发明授权

US07741860B2 Prober for testing magnetically sensitive components 有权
标题翻译：用于测试磁敏元件的探头
公开(公告)号：US07741860B2
公开(公告)日：2010-06-22
申请号：US12145090
申请日：2008-06-24
申请人： Sebastian Giessmann , Stefan Kreissig , Stojan Kanev
发明人： Sebastian Giessmann , Stefan Kreissig , Stojan Kanev
IPC分类号： G01R1/02 , G01R31/28
CPC分类号： G11C29/56 , G01R31/2862 , G01R31/315 , G11C29/56016 , G11C2029/5602
摘要： A prober for testing components comprises a lower frame, over which a probe holder plate is disposed at a distance therefrom for receiving test probes that make contact with the components to be tested and to which a displacement device is connected. A substrate carrier is disposed in the space between the frame and the probe holder plate, and the probe holder plate is provided with an opening, below which the substrate carrier can be displaced. To expand the scope of application of probers used for testing components, all those components of the prober that surround the substrate are made from a non-magnetic material.
摘要翻译：用于测试部件的检测器包括下框架，探针保持板在其上设置一段距离，用于接收与要测试的部件接触的测试探针，并且与其连接的位移装置。衬底载体设置在框架和探针保持板之间的空间中，并且探针保持板设置有开口，在该开口下方可以移动衬底载体。为了扩大用于测试组件的探测器的应用范围，围绕衬底的探测器的所有组件由非磁性材料制成。

10. 发明申请

US20100294053A1 PROBE HOLDER 有权
标题翻译：探索者
公开(公告)号：US20100294053A1
公开(公告)日：2010-11-25
申请号：US12681967
申请日：2008-10-10
申请人： Joerg Kiesewetter , Stojan Kanev , Stefan Kreissig
发明人： Joerg Kiesewetter , Stojan Kanev , Stefan Kreissig
IPC分类号： G01D21/00
CPC分类号： G01R31/2889 , G01R31/2887
摘要： A probe holder has a manipulator, a probe arm arranged on the manipulator, and a probe needle that is at least indirectly connected to the probe arm. To increase the number of contacts of a substrate to be tested and to make it possible to test a plurality of contacts in etched trenches of semiconductor elements in a group of wafers, the probe arm is connected to a needle support on which the probe needle and at least one second probe needle are arranged.
摘要翻译：探针支架具有操纵器，布置在操纵器上的探针臂和至少间接地连接到探针臂的探针。为了增加要测试的衬底的触点数量，并且可以在一组晶片中的半导体元件的蚀刻沟槽中测试多个触点，探针臂连接到针支撑件上，探头针和至少设置一个第二探针。

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