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1. 发明授权

US08345219B2 Method and apparatus for setting an illumination optical unit 有权
标题翻译：设置照明光学单元的方法和装置
公开(公告)号：US08345219B2
公开(公告)日：2013-01-01
申请号：US13469240
申请日：2012-05-11
申请人： Joachim Hartjes , Stig Bieling , Artur Hoegele
发明人： Joachim Hartjes , Stig Bieling , Artur Hoegele
IPC分类号： G03B27/68 , G03B27/54 , G03B27/32 , G03B27/52 , G03B27/42
CPC分类号： G03F7/70091 , G03F7/70133 , G03F7/70141 , G03F7/70266
摘要： A method for setting an illumination optical unit involves determining an actual value of an intensity-weighted illumination parameter of the illumination optical unit for multiple field points and for multiple illumination angles. The influence of a deformation of at least one of the optical surfaces of the illumination optical unit on the at least one illumination parameter is then determined. A desired value of the illumination parameter is then predefined. A desired form of the at least one optical surface is determined so that the actual value of the illumination parameter corresponds to the desired value of the illumination parameter within predefined limits. Finally, the optical surface is deformed with the aid of at least one actuator so that an actual form of the optical surface corresponds to the desired form.
摘要翻译：用于设置照明光学单元的方法包括确定用于多个场点和多个照明角度的照明光学单元的强度加权照明参数的实际值。然后确定照明光学单元的至少一个光学表面的变形对至少一个照明参数的影响。然后预定义所需的照明参数值。确定至少一个光学表面的期望形式，使得照明参数的实际值对应于预定义限度内的照明参数的期望值。最后，光学表面借助于至少一个致动器变形，使得光学表面的实际形式对应于所需的形式。

2. 发明申请

US20120300195A1 METHOD AND APPARATUS FOR SETTING AN ILLUMINATION OPTICAL UNIT 有权
标题翻译：用于设置照明光学单元的方法和装置
公开(公告)号：US20120300195A1
公开(公告)日：2012-11-29
申请号：US13469240
申请日：2012-05-11
申请人： Joachim Hartjes , Stig Bieling , Artur Hoegele
发明人： Joachim Hartjes , Stig Bieling , Artur Hoegele
IPC分类号： G01B9/00
CPC分类号： G03F7/70091 , G03F7/70133 , G03F7/70141 , G03F7/70266
摘要： A method for setting an illumination optical unit involves determining an actual value of an intensity-weighted illumination parameter of the illumination optical unit for multiple field points and for multiple illumination angles. The influence of a deformation of at least one of the optical surfaces of the illumination optical unit on the at least one illumination parameter is then determined. A desired value of the illumination parameter is then predefined. A desired form of the at least one optical surface is determined so that the actual value of the illumination parameter corresponds to the desired value of the illumination parameter within predefined limits. Finally, the optical surface is deformed with the aid of at least one actuator so that an actual form of the optical surface corresponds to the desired form.
摘要翻译：用于设置照明光学单元的方法包括确定用于多个场点和多个照明角度的照明光学单元的强度加权照明参数的实际值。然后确定照明光学单元的至少一个光学表面的变形对至少一个照明参数的影响。然后预定义所需的照明参数值。确定至少一个光学表面的期望形式，使得照明参数的实际值对应于预定义限度内的照明参数的期望值。最后，光学表面借助于至少一个致动器变形，使得光学表面的实际形式对应于所需的形式。

3. 发明授权

US10048484B2 Imaging system and imaging method 有权
公开(公告)号：US10048484B2
公开(公告)日：2018-08-14
申请号：US13977683
申请日：2011-12-21
申请人： Marco Pretorius , Markus Seesselberg , Artur Hoegele , Christoph Nieten , Enrico Geissler
发明人： Marco Pretorius , Markus Seesselberg , Artur Hoegele , Christoph Nieten , Enrico Geissler
IPC分类号： G02B21/36 , G02B21/00 , G02B21/22 , G02B27/00 , A61B3/13
摘要： An imaging system with an imaging lens system for imaging an object into an image plane is disclosed. The imaging lens system contains an optical component for a higher depth of field, of which the refractive power is alterable and the optical effect remains rotation-symmetrical.

4. 发明授权

US09285576B2 Stereoscopic microscope 有权
标题翻译：立体显微镜
公开(公告)号：US09285576B2
公开(公告)日：2016-03-15
申请号：US13854278
申请日：2013-04-01
申请人： Franz Merz , Artur Hoegele
发明人： Franz Merz , Artur Hoegele
IPC分类号： G02B21/22
CPC分类号： G02B21/22
摘要： A stereoscopic microscopic providing at least one pair of stereoscopic optical paths comprises an objective system, a first focusing lens having a first optical refractive power and a second focusing lens having a second optical refractive power and at least one actuator. The first optical refractive power and the second optical refractive have different signs. The objective system and the first and second focusing lenses are commonly traversed by the at least one pair of stereoscopic optical paths, respectively. The actuator shifts at least one of these first and second focusing lenses along the at least one pair of stereoscopic optical paths to change the working distance and/or to vary an optical refractive power of at least one of these first and second focusing lenses. The first focusing lens is immediately neighboring the objective system along the at least one pair of stereoscopic optical paths.
摘要翻译：提供至少一对立体光路的立体显微镜包括物镜系统，具有第一光折射光焦度的第一聚焦透镜和具有第二光折射光焦度的第二聚焦透镜和至少一个致动器。第一光折射力和第二光折射具有不同的符号。目标系统和第一和第二聚焦透镜分别通过至少一对立体光路穿过。致动器沿着至少一对立体光路移动这些第一和第二聚焦透镜中的至少一个以改变工作距离和/或改变这些第一和第二聚焦透镜中的至少一个的光学折射力。第一聚焦透镜沿着至少一对立体光路直接与物镜系统相邻。

5. 发明授权

US08705000B2 Illumination optics and projection exposure apparatus 有权
标题翻译：照明光学和投影曝光装置
公开(公告)号：US08705000B2
公开(公告)日：2014-04-22
申请号：US12846470
申请日：2010-07-29
申请人： Artur Hoegele , Markus Deguenther
发明人： Artur Hoegele , Markus Deguenther
IPC分类号： G03B27/42
CPC分类号： G03F7/7015 , G03F7/70141 , G03F7/70191
摘要： An illumination optics illuminates an object field of a projection exposure apparatus for microlithography. The illumination optics include a condenser group of optical components which guide a bundle of useful light. An objective group of bundle-guiding components is arranged downstream of the condenser group. At least one component of the condenser group and at least one component of the objective group are displaceable for compensation of deviations of the object field, which is in an actual illumination state, from a desired illumination state.
摘要翻译：照明光学器件照射用于微光刻的投影曝光装置的物体场。照明光学器件包括引导一束有用光的光学部件的聚光器组。束导向部件的目标组布置在冷凝器组的下游。冷凝器组的至少一个部件和物镜组的至少一个部件可移位以补偿处于实际照明状态的物场偏离所期望的照明状态。

6. 发明授权

US08487987B2 Camera adaptor for a medical-optical observation instrument and camera-adaptor combination 有权
标题翻译：相机适配器用于医疗光学观察仪器和相机适配器组合
公开(公告)号：US08487987B2
公开(公告)日：2013-07-16
申请号：US12712492
申请日：2010-02-25
申请人： Stefan Schute , Artur Hoegele
发明人： Stefan Schute , Artur Hoegele
IPC分类号： H04N7/18
CPC分类号： G02B21/361 , A61B90/20 , A61B90/361 , G02B21/20 , G02B21/22 , G02B23/18 , G03B17/48 , G03B41/00
摘要： A camera adaptor (19) is provided for connecting a camera (21) to an interface (13) of a medical-optical observation instrument (1) with a parallel beam path. The interface (13) is situated in the parallel beam path (9a, 9b) of the medical-optical observation instrument (1). The camera adaptor (19) has an instrument connector part (41) for connection to the interface (13) of the medical-optical observation instrument (1) and a camera connector part (43, 143) for connection to a camera (21). The beam path (43) runs through the camera adaptor (19) along a linear optical axis. The camera adaptor (19) has an objective-lenses combination (47) with a total focal length between 40 mm and 120 mm. A lens with a positive partial focal length leading on the instrument side in the objective-lenses combination (47) and is followed, on the side toward the camera, by a lens with a negative partial focal length.
摘要翻译：提供了一种相机适配器（19），用于将相机（21）连接到具有平行光束路径的医用光学观察仪器（1）的接口（13）。界面（13）位于医用光学观察仪器（1）的平行光路（9a，9b）中。相机适配器（19）具有用于连接到医用光学观察仪器（1）的接口（13）的仪器连接器部分（41）和用于连接到相机（21）的相机连接器部分（43,43）。光束路径（43）沿着线性光轴穿过相机适配器（19）。相机适配器（19）具有总焦距在40mm和120mm之间的物镜组合（47）。在物镜组合（47）中在仪器侧具有正部分焦距的透镜，并且在朝向照相机的一侧上由具有负部分焦距的透镜。

7. 发明申请

US20100309433A1 Illumination device and observation device 有权
标题翻译：照明装置和观察装置
公开(公告)号：US20100309433A1
公开(公告)日：2010-12-09
申请号：US12653974
申请日：2009-12-18
申请人： Franz Merz , Artur Hoegele , Peter Reimer
发明人： Franz Merz , Artur Hoegele , Peter Reimer
IPC分类号： A61B3/10
CPC分类号： A61B3/12
摘要： An illumination device (10) is described for an observation device (100) having one, two or more observation beam paths (16, 17), each with at least one observation beam bundle, particularly for an operating microscope, the illumination device having at least one light source (11, 12) for producing at least one illumination beam path (14, 15) with at least one illumination beam bundle for illuminating an object to be observed, in particular, an eye to be observed, the illumination device (10) having at least one illumination optics unit, which has a collector (18, 22), and the at least one illumination beam path (14, 15) or the at least one illumination beam bundle running coaxially to an observation beam path (16, 17) or observation beam bundle. In order to create an illumination device that can be introduced with little structural complexity even in those cases where only a small structural space is available, it is provided according to the invention that light source (11, 12) lies in the front focal point of collector (18, 22) and is imaged on the fundus of the eye to be observed. In addition, a correspondingly improved observation device (100) is described.
摘要翻译：对于具有一个，两个或更多个观察光束路径（16,17）的观察装置（100），描述了一种照明装置（10），每个观察光束路径具有至少一个观察束束，特别是用于操作显微镜，所述照明装置具有至少一个光源（11,12），用于产生具有至少一个照明束束的至少一个照明光束路径（14,15），用于照亮要观察的物体，特别是要观察的眼睛，所述照明装置 10）具有至少一个照明光学单元，其具有收集器（18,22）和所述至少一个照明光束路径（14,15）或与观察光束路径（16）同轴运行的至少一个照明光束束，17）或观察束束。为了创建即使在仅具有小的结构空间的情况下也可以引入很少的结构复杂的照明装置，根据本发明，提供了光源（11,12）位于的前焦点收集器（18,22），并在眼睛的眼底上成像以进行观察。此外，描述相应改进的观察装置（100）。

8. 发明授权

US08922624B2 Optical observation instrument with at least two optical transmission channels that respectively have one partial ray path 有权
标题翻译：具有分别具有一个部分光线路径的至少两个光传输通道的光学观察仪器
公开(公告)号：US08922624B2
公开(公告)日：2014-12-30
申请号：US13358632
申请日：2012-01-26
申请人： Marco Pretorius , Enrico Geissler , Guenter Rudolph , Christoph Nieten , Bryce Anton Moffat , Artur Hoegele
发明人： Marco Pretorius , Enrico Geissler , Guenter Rudolph , Christoph Nieten , Bryce Anton Moffat , Artur Hoegele
IPC分类号： H04N13/02
CPC分类号： G02B21/22 , G02B21/0012 , G02B26/0833
摘要： An optical observation instrument has two optical transmission channels for transmitting two partial ray bundles (9A, 9B). The optical observation instrument has a main objective (1) common to the optical transmission channels, an electronic image sensor (7) for sequentially recording the partial ray bundles (9A, 9B), an intermediate imaging optical system (3) between the main objective (1) and the image sensor (7) and common to the optical transmission channels, and a tilting mirror matrix (5) between the main objective (1) and the image sensor (7). The intermediate imaging optical system (3) is arranged so that the respective partial ray bundle (9A, 9B) is deflected toward the image sensor (7) and passes the intermediate imaging optical system (3) both on the way from the main objective (1) to the tilting mirror matrix (5) and on the way from the tilting mirror matrix (5) to the image sensor (7).
摘要翻译：光学观察仪器具有用于透射两个部分光束的两个光传输通道（9A，9B）。光学观察仪器具有光传输通道共用的主要目的（1），用于顺序地记录部分光束（9A，9B）的电子图像传感器（7），主要目标之间的中间成像光学系统（3）（1）和图像传感器（7）并且与光传输通道共用，以及在主物镜（1）和图像传感器（7）之间的倾斜镜阵列（5）。中间成像光学系统（3）被布置成使得各个部分光束（9A，9B）朝向图像传感器（7）偏转，并且在从主要目标（2）的途中通过中间成像光学系统（3） 1）到倾斜镜矩阵（5）和从倾斜镜矩阵（5）到图像传感器（7）的路上。

9. 发明申请

US20110019172A1 ILLUMINATION OPTICS AND PROJECTION EXPOSURE APPARATUS 有权
标题翻译：照明光学和投影曝光装置
公开(公告)号：US20110019172A1
公开(公告)日：2011-01-27
申请号：US12846470
申请日：2010-07-29
申请人： Artur Hoegele , Markus Deguenther
发明人： Artur Hoegele , Markus Deguenther
IPC分类号： G03B27/54 , G02B11/04
CPC分类号： G03F7/7015 , G03F7/70141 , G03F7/70191
摘要： An illumination optics illuminates an object field of a projection exposure apparatus for microlithography. The illumination optics include a condenser group of optical components which guide a bundle of useful light. An objective group of bundle-guiding components is arranged downstream of the condenser group. At least one component of the condenser group and at least one component of the objective group are displaceable for compensation of deviations of the object field, which is in an actual illumination state, from a desired illumination state.
摘要翻译：照明光学器件照射用于微光刻的投影曝光装置的物体场。照明光学器件包括引导一束有用光的光学部件的聚光器组。束导向部件的目标组布置在冷凝器组的下游。冷凝器组的至少一个部件和物镜组的至少一个部件可移位以补偿处于实际照明状态的物场偏离所期望的照明状态。

10. 发明申请

US20100128367A1 PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD 审中-公开
标题翻译：一种微电脑设备和方法的投影目标
公开(公告)号：US20100128367A1
公开(公告)日：2010-05-27
申请号：US12403526
申请日：2009-03-13
申请人： Mariella Beckenbach , Klaus Rief , Andreas Bertele , Benjamin Sigel , Sascha Bleidistel , Wolfgang Hummel , Andreas Frommeyer , Toralf Gruner , Jochen Schwaer , Baerbel Schwaer , Thomas Schletterer , Artur Hoegele , Armin Schoeppach
发明人： Mariella Beckenbach , Klaus Rief , Andreas Bertele , Benjamin Sigel , Sascha Bleidistel , Wolfgang Hummel , Andreas Frommeyer , Toralf Gruner , Jochen Schwaer , Baerbel Schwaer , Thomas Schletterer , Artur Hoegele , Armin Schoeppach
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , G02B7/023 , G02B13/14 , G02B27/0068 , G03F7/70058 , G03F7/70266
摘要： A projection objective for a microlithography apparatus with improved imaging properties is provided. A manipulator for a projection objective is provided. A microlithography apparatus including a projection objective of this type and/or a manipulator of this type is provided. A method for improving the imaging properties of a projection objective is provided.
摘要翻译：提供了具有改善的成像特性的微光刻设备的投影物镜。提供了一种用于投影物镜的操纵器。提供包括这种类型的投影物镜和/或这种类型的操纵器的微光刻设备。提供了一种用于改善投影物镜的成像特性的方法。

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