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    • 1. 发明授权
    • Static pressure gas bearing assembly
    • 静压气体轴承总成
    • US4838710A
    • 1989-06-13
    • US102358
    • 1987-09-29
    • Jiro OhtaSadamu TozawaKoichi MatsushitaYutaka Maruyama
    • Jiro OhtaSadamu TozawaKoichi MatsushitaYutaka Maruyama
    • C23C14/32C23C30/00F16C32/06F16C33/04
    • F16C32/0618C23C14/32C23C30/00F16C33/16F16C32/0685F16C32/0696F16C33/043Y10S384/902
    • A static pressure gas bearing assemby having a gaseous fluid discharging bearing member for supporting a shaft by the discharged gaseous fluid is disclosed. The bearing member is made of porous graphite. For the manufacture, carbon particles approximately 80% of which have particle diameters not greater than approx. 40 microns, more particularly, particle diameters ranging from 1-20 microns are used. The carbon particles are subjected to molding, calcination and graphitization, whereby a porous graphite member having pores distributed substantially uniformly is obtained. In another aspect of the invention, the bearing member is made of a porous graphite material having a specific degree of swelling. Also, in another aspect, the surface of the shaft to be supported by the bearing member is coated with titanium nitride by ion plating treatment. In this manner, a high-precision and high-prerformance bearing assembly can be provided with reduced manufacturing costs.
    • 公开了一种具有用于通过排出的气态流体支撑轴的气态流体排出轴承构件的静压气体轴承。 轴承构件由多孔石墨制成。 对于制造而言,大约80%的碳粒子的粒径不大于约。 40微米,更特别地,使用范围为1-20微米的粒径。 对碳粒进行成型,煅烧和石墨化,得到具有基本上均匀分布的孔的多孔石墨构件。 在本发明的另一方面,轴承构件由具有特定的溶胀度的多孔石墨材料制成。 此外,在另一方面,由轴承构件支撑的轴的表面通过离子镀处理被涂覆有氮化钛。 以这种方式,可以降低制造成本,提供高精度和高性能的轴承组件。
    • 6. 发明授权
    • Exposure apparatus
    • 曝光装置
    • US4708465A
    • 1987-11-24
    • US19663
    • 1987-02-27
    • Junji IsohataHironori YamamotoKoichi Matsushita
    • Junji IsohataHironori YamamotoKoichi Matsushita
    • G03F9/00G01B11/26G03F7/20G12B5/00H01L21/027H01L21/30H01L21/67H01L21/68G03B27/42
    • G03F7/70716
    • A position detecting device usable in an exposure apparatus for transferring an image of a first object onto a second object, for detecting the position of at least one of the first and second objects, includes a rotatable portion having a carrying portion for carrying thereon the at least one object, a first supporting member for supporting the rotatable portion, the first supporting member including a first driving system for moving the rotatable portion in a rotational direction, second supporting member for supporting the first supporting member, the second supporting member including a second driving system for moving the first supporting member in a rotational direction, and a displacement detecting system for detecting displacement of the first supporting member.
    • 一种可用于曝光装置的位置检测装置,用于将第一物体的图像转印到第二物体上,用于检测第一和第二物体中的至少一个的位置,包括可旋转部分,其具有用于在其上承载 至少一个物体,用于支撑可旋转部分的第一支撑构件,第一支撑构件包括用于沿旋转方向移动可旋转部分的第一驱动系统,用于支撑第一支撑构件的第二支撑构件,第二支撑构件包括第二支撑构件 驱动系统,用于沿旋转方向移动第一支撑构件;以及位移检测系统,用于检测第一支撑构件的位移。