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    • 9. 发明授权
    • Gate electrode for a nonvolatile memory cell
    • 用于非易失性存储单元的栅电极
    • US08030161B2
    • 2011-10-04
    • US12121591
    • 2008-05-15
    • Xiangfeng DuanJian ChenJ. Wallace ParceFrancisco A. Leon
    • Xiangfeng DuanJian ChenJ. Wallace ParceFrancisco A. Leon
    • H01L21/336H01L29/788
    • H01L29/792H01L21/28273H01L21/28282H01L29/42324H01L29/42332H01L29/7883H01L29/7885
    • A nonvolatile memory cell includes a substrate comprising a source, drain, and channel between the source and the drain. A tunnel dielectric layer overlies the channel, and a localized charge storage layer is disposed between the tunnel dielectric layer and a control dielectric layer. A gate electrode has a first surface adjacent to the control dielectric layer, and the first surface includes a midsection and two edge portions. According to one embodiment, the midsection defines a plane, and at least one edge portion extends away from the plane. Preferably, the edge portion extending away from the plane converges toward an opposing second surface of the gate electrode. According to another embodiment, the gate electrode of the nonvolatile memory cell includes a first sublayer and a second sublayer of a different width on the first sublayer.
    • 非易失性存储单元包括在源极和漏极之间包括源极,漏极和沟道的衬底。 隧道介电层覆盖在沟道上,并且局部电荷存储层设置在隧道介电层和控制电介质层之间。 栅电极具有与控制电介质层相邻的第一表面,并且第一表面包括中部和两个边缘部分。 根据一个实施例,中段限定一个平面,并且至少一个边缘部分远离平面延伸。 优选地,远离平面延伸的边缘部分朝向栅电极的相对的第二表面会聚。 根据另一实施例,非易失性存储单元的栅极包括第一子层和第一子层上具有不同宽度的第二子层。