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1. 发明申请

US20130181579A1 BULK ACOUSTIC WAVE RESONATOR 有权
标题翻译：大容量声波谐振器
公开(公告)号：US20130181579A1
公开(公告)日：2013-07-18
申请号：US13686005
申请日：2012-11-27
申请人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
IPC分类号： H01L41/107
CPC分类号： H01L41/107 , H03H9/02102 , H03H9/0211 , H03H9/173 , H03H9/174 , H03H9/175
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.
摘要翻译：提供了一种体声波谐振器（BAWR）。 BAWR可以包括设置在基板上的空气腔，包括压电层的体声波谐振单元和反射层，以反射从压电层产生的谐振频率的波。

2. 发明授权

US10079589B2 Thin film bulk acoustic resonator and method for manufacturing same 有权
公开(公告)号：US10079589B2
公开(公告)日：2018-09-18
申请号：US14353561
申请日：2012-06-07
申请人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
发明人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
IPC分类号： H03H9/17 , H03H3/02 , H01L41/297 , H01L41/312 , H01L41/332
CPC分类号： H03H9/173 , H01L41/297 , H01L41/312 , H01L41/332 , H03H3/02 , H03H9/175 , H03H2003/021
摘要： A thin film bulk acoustic resonator and a method of manufacturing the same is disclosed. The thin film bulk acoustic resonator includes an acoustic resonator including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an air gap disposed below the acoustic resonator and above a substrate to reflect the acoustic wave; and an anchor disposed on each of both surfaces of the air gap and having the same thickness as the air gap.

3. 发明申请

US20130147320A1 BULK ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREOF, AND RADIO FREQUENCY DEVICE USING BULK ACOUSTIC WAVE RESONATOR 有权
标题翻译：大容量声波谐振器及其制造方法，以及使用大容量声波谐振器的无线电频率装置
公开(公告)号：US20130147320A1
公开(公告)日：2013-06-13
申请号：US13592821
申请日：2012-08-23
申请人： Sang Uk Son , Duck Hwan KIM , Chul Soo KIM , Ho Soo Park , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
发明人： Sang Uk Son , Duck Hwan KIM , Chul Soo KIM , Ho Soo Park , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
IPC分类号： H01L41/053 , H01L41/22
CPC分类号： H03H9/02102 , H03H9/02149 , H03H9/1014 , H03H9/173 , H03H9/564 , H03H9/587 , Y10T29/42
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a first electrode, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer. In various aspects, at least one of the first electrode, the piezoelectric layer, and the second electrode are formed of a carbon-based material.
摘要翻译：提供了一种体声波谐振器（BAWR）。 BAWR可以包括第一电极，设置在第一电极上的压电层，设置在压电层上的第二电极。在各个方面，第一电极，压电层和第二电极中的至少一个由碳基材料形成。

4. 发明授权

US09768753B2 Filter using BAWRs and L/C elements connected to the BAWRs 有权
公开(公告)号：US09768753B2
公开(公告)日：2017-09-19
申请号：US14382115
申请日：2012-06-12
申请人： Jae Chun Lee , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
发明人： Jae Chun Lee , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
IPC分类号： H03H9/58 , H03H7/38 , H03H9/54 , H03H9/00 , H03H9/60 , H03H9/205
CPC分类号： H03H9/542 , H03H7/38 , H03H9/0095 , H03H9/205 , H03H9/58 , H03H9/60 , H03H9/605
摘要： A filter using bulk acoustic wave resonators (BAWRs) is provided including BAWRs connected in series or in parallel to each other. A BAWR set is configured by connecting an inductance and capacitance (L/C) element to each BAWR in series or in parallel.

5. 发明申请

US20150155852A1 FILTER USING BAWRS 有权
标题翻译：过滤器使用BAWRS
公开(公告)号：US20150155852A1
公开(公告)日：2015-06-04
申请号：US14382115
申请日：2012-06-12
申请人： Jae Chun Lee , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
发明人： Jae Chun Lee , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
IPC分类号： H03H9/58 , H03H9/54 , H03H9/205
CPC分类号： H03H9/542 , H03H7/38 , H03H9/0095 , H03H9/205 , H03H9/58 , H03H9/60 , H03H9/605
摘要： Provided is a filter using bulk acoustic wave resonators (BAWRs), the filter comprising two or more BAWRs connected in series or in parallel to each other, one or more LC elements being connected in series or in parallel to the respective BAWRs, thus constituting a BAWR set.
摘要翻译：提供了使用体声波谐振器（BAWR）的滤波器，该滤波器包括彼此串联或并联连接的两个或更多个BAWR，一个或多个LC元件串联或并联连接到相应的BAWR，从而构成 BAWR集。

6. 发明申请

US20140339959A1 THIN FILM BULK ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING SAME 审中-公开
标题翻译：薄膜泡沫声谐振器及其制造方法
公开(公告)号：US20140339959A1
公开(公告)日：2014-11-20
申请号：US14353561
申请日：2012-06-07
申请人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
发明人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
IPC分类号： H03H9/17 , H01L41/297 , H01L41/312 , H01L41/332
CPC分类号： H03H9/173 , H01L41/297 , H01L41/312 , H01L41/332 , H03H3/02 , H03H9/175 , H03H2003/021
摘要： A thin film bulk acoustic resonator and a method of manufacturing the same is disclosed. The thin film bulk acoustic resonator includes an acoustic resonator including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an air gap disposed below the acoustic resonator and above a substrate to reflect the acoustic wave; and an anchor disposed on each of both surfaces of the air gap and having the same thickness as the air gap.
摘要翻译：公开了一种薄膜体声波谐振器及其制造方法。薄膜体声波谐振器包括声谐振器，包括第一电极，第二电极和布置在第一电极和第二电极之间的压电层; 气隙，设置在声谐振器下方和衬底上方以反射声波; 以及设置在气隙的两个表面中的每一个并且具有与气隙相同厚度的锚固件。

7. 发明授权

US09246468B2 Bulk acoustic wave resonator and manufacturing method thereof, and radio frequency device using bulk acoustic wave resonator 有权
标题翻译：体声波谐振器及其制造方法以及使用体声波谐振器的射频装置
公开(公告)号：US09246468B2
公开(公告)日：2016-01-26
申请号：US13592821
申请日：2012-08-23
申请人： Sang Uk Son , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
发明人： Sang Uk Son , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
IPC分类号： H03H9/02 , H03H9/17 , H03H9/10 , H03H9/56 , H03H9/58
CPC分类号： H03H9/02102 , H03H9/02149 , H03H9/1014 , H03H9/173 , H03H9/564 , H03H9/587 , Y10T29/42
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a first electrode, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer. In various aspects, at least one of the first electrode, the piezoelectric layer, and the second electrode are formed of a carbon-based material.
摘要翻译：提供了一种体声波谐振器（BAWR）。 BAWR可以包括第一电极，设置在第一电极上的压电层，设置在压电层上的第二电极。在各个方面，第一电极，压电层和第二电极中的至少一个由碳基材料形成。

8. 发明申请

US20130214876A1 NANO SCALE RESONATOR, NANO SCALE SENSOR, AND FABRICATION METHOD THEREOF 有权
标题翻译：纳米尺度谐振器，纳米尺度传感器及其制造方法
公开(公告)号：US20130214876A1
公开(公告)日：2013-08-22
申请号：US13668760
申请日：2012-11-05
申请人： Moon Chul Lee , Duck Hwan Kim , In Sang Song , Jea Shik Shin
发明人： Moon Chul Lee , Duck Hwan Kim , In Sang Song , Jea Shik Shin
IPC分类号： H03H9/00
CPC分类号： G01N27/04 , B81B2201/02 , H03H3/0072 , H03H3/0077 , H03H9/2463 , H03H2009/02346 , H03H2009/0244
摘要： A nano scale resonator, a nano scale sensor, and a fabrication method thereof are provided. The nano scale resonator includes a resonance unit of nano scale configured to resonate based on an applied signal, and an anchor on a substrate, the anchor being configured to support the resonance unit, the anchor having an air gap within boundaries of the anchor, the resonance unit, and the substrate, the air gap being configured to reflect a vertical wave occurring in the resonance unit.
摘要翻译：提供了纳米级谐振器，纳米级传感器及其制造方法。所述纳米级谐振器包括纳米级的谐振单元，其被配置为基于所施加的信号而谐振，并且所述锚固件被构造成支撑所述谐振单元，所述锚固件在所述锚的边界内具有气隙，谐振单元和基板，气隙被配置为反映在谐振单元中发生的垂直波。

9. 发明授权

US07417525B2 High efficiency inductor, method for manufacturing the inductor, and packaging structure using the inductor 有权
标题翻译：高效率电感器，制造电感器的方法，以及使用电感器的封装结构
公开(公告)号：US07417525B2
公开(公告)日：2008-08-26
申请号：US11416311
申请日：2006-05-03
申请人： Moon Chul Lee , Jong Oh Kwon , Woon Bae Kim , Jun Sik Hwang , Chang youl Moon , In Sang Song
发明人： Moon Chul Lee , Jong Oh Kwon , Woon Bae Kim , Jun Sik Hwang , Chang youl Moon , In Sang Song
IPC分类号： H01F5/00 , H01F27/02
CPC分类号： H01F17/0033 , H01F41/041 , H01F2017/002 , H01L27/08 , H01L28/10
摘要： An inductor is provided which includes a plurality of via holes vertically passing through a substrate, the substrate having insulating properties, vertical conductive portions filling the via holes, and horizontal conductive portions connecting each individual vertical conductive portions at the top and the bottom of the substrate to form a single coil structure with the vertical conductive portions.
摘要翻译：提供一种电感器，其包括垂直通过基板的多个通孔，该基板具有绝缘性能，填充该通孔的垂直导电部分以及连接该基板顶部和底部上的各个垂直导电部分的水平导电部分以形成具有垂直导电部分的单个线圈结构。

10. 发明授权

US08282196B2 Micro electro mechanical system device and method of manufacturing the same 有权
标题翻译：微机电系统装置及其制造方法
公开(公告)号：US08282196B2
公开(公告)日：2012-10-09
申请号：US12058946
申请日：2008-03-31
申请人： Il Woo Kim , Byung Ha Park , Moon Chul Lee , Dong Sik Shim , Kyong Il Kim
发明人： Il Woo Kim , Byung Ha Park , Moon Chul Lee , Dong Sik Shim , Kyong Il Kim
IPC分类号： B41J2/05
CPC分类号： B41J2/1601 , B33Y80/00 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639
摘要： A MEMS (Micro Electro Mechanical System) device and a method of manufacturing the same, in which an detection indicator is formed on a chamber layer stacked on a substrate such that a user easily inspects whether the chamber layer has a required thickness. The MEMS device can include two detection indicators that are formed on the chamber layer and have different depth from each other, or an detection indicator which is formed on the chamber layer and has a tapered sectional shape in which an upper surface of the detection indicator is gradually narrowed in a downward direction such that a user can easily inspect whether the chamber layer has a required thickness. The user can precisely determine whether the chamber layer is planarized to a required thickness by planarizing the detection indicator formed on the chamber layer, and inspecting the detection indicator by using an optical microscope, thereby facilitating inspection for a thickness of the chamber layer.
摘要翻译：一种MEMS（微机电系统）装置及其制造方法，其中在层叠在基板上的室层上形成检测指示器，使得用户容易地检查室层是否具有所需的厚度。 MEMS器件可以包括形成在室层上并具有彼此不同深度的两个检测指示器，或者形成在腔室层上并具有锥形截面形状的检测指示器，其中检测指示器的上表面是在向下的方向上逐渐变窄，使得使用者可以容易地检查腔室层是否具有所需的厚度。用户可以通过平坦化形成在室层上的检测指示器，并且通过使用光学显微镜检查检测指示器来精确地确定室层是否被平坦化到所需厚度，从而便于检查室层的厚度。

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