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    • 2. 发明授权
    • Fabrication method of high temperature superconducting step-edge Josephson junction
    • 高温超导步进约瑟夫逊结的制造方法
    • US06423473B1
    • 2002-07-23
    • US09389458
    • 1999-09-03
    • Gun Yong SungJun Sik HwangKwang Yong Kang
    • Gun Yong SungJun Sik HwangKwang Yong Kang
    • G03F700
    • H01L39/2496
    • A method for fabricating a high temperature superconducting step-edge Josephson junction includes the steps of: (i) preparing a step-edge on an SrTiO3 (STO) substrate; (ii) depositing a YBa2Cu3O7−x (YBCO) thin film on the step-edge substrate obtained; and (iii) forming a micro-bridge pattern on the, deposited metal thin film by photolithography and ion milling and then performing a heat treatment. This makes it possible to fabricate a step edge having a linear portion inclined at a large angle with good reproducibility during the ion-milling step. Furthermore, the two-stepped process of post heat treatment is carried out after the metal electrode of the junction is formed so that the high temperature superconducting step-edge junction can have its own characteristics enhanced.
    • 一种用于制造高温超导阶梯边缘约瑟夫逊结的方法包括以下步骤:(i)在SrTiO 3(STO)衬底上制备阶梯边; (ii)在获得的步进边缘基板上沉积YBa2Cu3O7-x(YBCO)薄膜; 和(iii)通过光刻和离子研磨在沉积的金属薄膜上形成微桥图案,然后进行热处理。 这使得可以在离子研磨步骤期间以良好的再现性制造具有以大角度倾斜的直线部分的台阶边缘。 此外,在形成结的金属电极之后进行后热处理的两阶段处理,使得高温超导步进边缘连接可以具有增强的其自身特性。