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    • 2. 发明授权
    • Micro electro mechanical system device and method of manufacturing the same
    • 微机电系统装置及其制造方法
    • US08282196B2
    • 2012-10-09
    • US12058946
    • 2008-03-31
    • Il Woo KimByung Ha ParkMoon Chul LeeDong Sik ShimKyong Il Kim
    • Il Woo KimByung Ha ParkMoon Chul LeeDong Sik ShimKyong Il Kim
    • B41J2/05
    • B41J2/1601B33Y80/00B41J2/1628B41J2/1631B41J2/1632B41J2/1639
    • A MEMS (Micro Electro Mechanical System) device and a method of manufacturing the same, in which an detection indicator is formed on a chamber layer stacked on a substrate such that a user easily inspects whether the chamber layer has a required thickness. The MEMS device can include two detection indicators that are formed on the chamber layer and have different depth from each other, or an detection indicator which is formed on the chamber layer and has a tapered sectional shape in which an upper surface of the detection indicator is gradually narrowed in a downward direction such that a user can easily inspect whether the chamber layer has a required thickness. The user can precisely determine whether the chamber layer is planarized to a required thickness by planarizing the detection indicator formed on the chamber layer, and inspecting the detection indicator by using an optical microscope, thereby facilitating inspection for a thickness of the chamber layer.
    • 一种MEMS(微机电系统)装置及其制造方法,其中在层叠在基板上的室层上形成检测指示器,使得用户容易地检查室层是否具有所需的厚度。 MEMS器件可以包括形成在室层上并具有彼此不同深度的两个检测指示器,或者形成在腔室层上并具有锥形截面形状的检测指示器,其中检测指示器的上表面是 在向下的方向上逐渐变窄,使得使用者可以容易地检查腔室层是否具有所需的厚度。 用户可以通过平坦化形成在室层上的检测指示器,并且通过使用光学显微镜检查检测指示器来精确地确定室层是否被平坦化到所需厚度,从而便于检查室层的厚度。
    • 4. 发明授权
    • Inkjet printhead and method of manufacturing the same
    • 喷墨打印头及其制造方法
    • US07607759B2
    • 2009-10-27
    • US11379291
    • 2006-04-19
    • Jae-sik MinByung-ha ParkKyong-il KimYoung-ung Ha
    • Jae-sik MinByung-ha ParkKyong-il KimYoung-ung Ha
    • B41J2/05
    • B41J2/14137B41J2/1603B41J2/1628B41J2/1632B41J2002/1437
    • An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.
    • 喷墨打印头及其制造方法。 在喷墨打印头中,基板包括形成在顶表面中以容纳要喷射的墨的墨室,形成在底表面中以将油墨供应到墨室的墨供给孔以及形成在墨室和墨室之间的限流器 墨水供墨孔连接墨水室和墨水供墨孔。 在基板上形成多个钝化层。 在钝化层之间形成加热器和向加热器施加电流的导体。 在钝化层上形成预定形状的传热层。 形成环氧喷嘴层以覆盖钝化层和传热层。 环氧喷嘴层形成有连接到墨室的喷嘴。
    • 6. 发明申请
    • MICRO ELECTRO MECHANICAL SYSTEM DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 微电子机械系统装置及其制造方法
    • US20080283495A1
    • 2008-11-20
    • US12058946
    • 2008-03-31
    • Il Woo KIMByung Ha ParkMoon Chul LeeDong Sik ShimKyong Il Kim
    • Il Woo KIMByung Ha ParkMoon Chul LeeDong Sik ShimKyong Il Kim
    • C23F1/00B41J2/015
    • B41J2/1601B33Y80/00B41J2/1628B41J2/1631B41J2/1632B41J2/1639
    • A MEMS (Micro Electro Mechanical System) device and a method of manufacturing the same, in which an detection indicator is formed on a chamber layer stacked on a substrate such that a user easily inspects whether the chamber layer has a required thickness. The MEMS device can include two detection indicators that are formed on the chamber layer and have different depth from each other, or an detection indicator which is formed on the chamber layer and has a tapered sectional shape in which an upper surface of the detection indicator is gradually narrowed in a downward direction such that a user can easily inspect whether the chamber layer has a required thickness. The user can precisely determine whether the chamber layer is planarized to a required thickness by planarizing the detection indicator formed on the chamber layer, and inspecting the detection indicator by using an optical microscope, thereby facilitating inspection for a thickness of the chamber layer.
    • 一种MEMS(微机电系统)装置及其制造方法,其中在层叠在基板上的室层上形成检测指示器,使得用户容易地检查室层是否具有所需的厚度。 MEMS器件可以包括形成在室层上并具有彼此不同深度的两个检测指示器,或者形成在腔室层上并具有锥形截面形状的检测指示器,其中检测指示器的上表面是 在向下的方向上逐渐变窄,使得使用者可以容易地检查腔室层是否具有所需的厚度。 用户可以通过平坦化形成在室层上的检测指示器,并且通过使用光学显微镜检查检测指示器来精确地确定室层是否被平坦化到所需厚度,从而便于检查室层的厚度。
    • 10. 发明授权
    • Method of manufacturing monolithic inkjet printhead
    • 制造单片喷墨打印头的方法
    • US07070912B2
    • 2006-07-04
    • US11028665
    • 2005-01-05
    • Byung-ha ParkMyong-jong KwonYoung-ung HaSung-joon Park
    • Byung-ha ParkMyong-jong KwonYoung-ung HaSung-joon Park
    • B41J2/16
    • B41J2/1629B41J2/1603B41J2/1631B41J2/1632B41J2/1639B41J2/1642B41J2/1645B41J2/1646
    • A method of manufacturing a monolithic inkjet printhead wherein the uniformity of the ink flow path is maintained by ensuring that the flow path forming layer and the nozzle layer are completely adhered to each other. The method includes forming a heater and electrode on a substrate, coating a negative photoresist on the substrate, and patterning the photoresist using a photolithography process to form an flow path forming layer that defines an ink flow path. The method further comprises steps for then forming a sacrificial layer so as to cover the flow path forming layer and then flattening upper surfaces of the flow path forming layer and the sacrificial layer using a chemical mechanical polishing (CMP) process such that when a nozzle layer is then formed, the flow path forming layer and the nozzle layer are completely adhered to each other.
    • 一种制造单片喷墨打印头的方法,其中通过确保流路形成层和喷嘴层彼此完全粘合来保持油墨流动路径的均匀性。 该方法包括在衬底上形成加热器和电极,在衬底上涂覆负性光致抗蚀剂,并使用光刻工艺对光致抗蚀剂进行构图,以形成限定墨水流路的流路形成层。 该方法还包括随后形成牺牲层以便覆盖流路形成层,然后使用化学机械抛光(CMP)工艺使流路形成层和牺牲层的上表面平坦化的步骤,使得当喷嘴层 然后形成流路形成层和喷嘴层彼此完全粘合。