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1. 发明授权

US09768753B2 Filter using BAWRs and L/C elements connected to the BAWRs 有权
公开(公告)号：US09768753B2
公开(公告)日：2017-09-19
申请号：US14382115
申请日：2012-06-12
申请人： Jae Chun Lee , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
发明人： Jae Chun Lee , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
IPC分类号： H03H9/58 , H03H7/38 , H03H9/54 , H03H9/00 , H03H9/60 , H03H9/205
CPC分类号： H03H9/542 , H03H7/38 , H03H9/0095 , H03H9/205 , H03H9/58 , H03H9/60 , H03H9/605
摘要： A filter using bulk acoustic wave resonators (BAWRs) is provided including BAWRs connected in series or in parallel to each other. A BAWR set is configured by connecting an inductance and capacitance (L/C) element to each BAWR in series or in parallel.

2. 发明申请

US20150155852A1 FILTER USING BAWRS 有权
标题翻译：过滤器使用BAWRS
公开(公告)号：US20150155852A1
公开(公告)日：2015-06-04
申请号：US14382115
申请日：2012-06-12
申请人： Jae Chun Lee , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
发明人： Jae Chun Lee , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
IPC分类号： H03H9/58 , H03H9/54 , H03H9/205
CPC分类号： H03H9/542 , H03H7/38 , H03H9/0095 , H03H9/205 , H03H9/58 , H03H9/60 , H03H9/605
摘要： Provided is a filter using bulk acoustic wave resonators (BAWRs), the filter comprising two or more BAWRs connected in series or in parallel to each other, one or more LC elements being connected in series or in parallel to the respective BAWRs, thus constituting a BAWR set.
摘要翻译：提供了使用体声波谐振器（BAWR）的滤波器，该滤波器包括彼此串联或并联连接的两个或更多个BAWR，一个或多个LC元件串联或并联连接到相应的BAWR，从而构成 BAWR集。

3. 发明申请

US20130147320A1 BULK ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREOF, AND RADIO FREQUENCY DEVICE USING BULK ACOUSTIC WAVE RESONATOR 有权
标题翻译：大容量声波谐振器及其制造方法，以及使用大容量声波谐振器的无线电频率装置
公开(公告)号：US20130147320A1
公开(公告)日：2013-06-13
申请号：US13592821
申请日：2012-08-23
申请人： Sang Uk Son , Duck Hwan KIM , Chul Soo KIM , Ho Soo Park , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
发明人： Sang Uk Son , Duck Hwan KIM , Chul Soo KIM , Ho Soo Park , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
IPC分类号： H01L41/053 , H01L41/22
CPC分类号： H03H9/02102 , H03H9/02149 , H03H9/1014 , H03H9/173 , H03H9/564 , H03H9/587 , Y10T29/42
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a first electrode, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer. In various aspects, at least one of the first electrode, the piezoelectric layer, and the second electrode are formed of a carbon-based material.
摘要翻译：提供了一种体声波谐振器（BAWR）。 BAWR可以包括第一电极，设置在第一电极上的压电层，设置在压电层上的第二电极。在各个方面，第一电极，压电层和第二电极中的至少一个由碳基材料形成。

4. 发明授权

US09246468B2 Bulk acoustic wave resonator and manufacturing method thereof, and radio frequency device using bulk acoustic wave resonator 有权
标题翻译：体声波谐振器及其制造方法以及使用体声波谐振器的射频装置
公开(公告)号：US09246468B2
公开(公告)日：2016-01-26
申请号：US13592821
申请日：2012-08-23
申请人： Sang Uk Son , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
发明人： Sang Uk Son , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , In Sang Song , Jea Shik Shin , Moon Chul Lee , Jing Cui
IPC分类号： H03H9/02 , H03H9/17 , H03H9/10 , H03H9/56 , H03H9/58
CPC分类号： H03H9/02102 , H03H9/02149 , H03H9/1014 , H03H9/173 , H03H9/564 , H03H9/587 , Y10T29/42
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a first electrode, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer. In various aspects, at least one of the first electrode, the piezoelectric layer, and the second electrode are formed of a carbon-based material.
摘要翻译：提供了一种体声波谐振器（BAWR）。 BAWR可以包括第一电极，设置在第一电极上的压电层，设置在压电层上的第二电极。在各个方面，第一电极，压电层和第二电极中的至少一个由碳基材料形成。

5. 发明申请

US20140339959A1 THIN FILM BULK ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING SAME 审中-公开
标题翻译：薄膜泡沫声谐振器及其制造方法
公开(公告)号：US20140339959A1
公开(公告)日：2014-11-20
申请号：US14353561
申请日：2012-06-07
申请人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
发明人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
IPC分类号： H03H9/17 , H01L41/297 , H01L41/312 , H01L41/332
CPC分类号： H03H9/173 , H01L41/297 , H01L41/312 , H01L41/332 , H03H3/02 , H03H9/175 , H03H2003/021
摘要： A thin film bulk acoustic resonator and a method of manufacturing the same is disclosed. The thin film bulk acoustic resonator includes an acoustic resonator including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an air gap disposed below the acoustic resonator and above a substrate to reflect the acoustic wave; and an anchor disposed on each of both surfaces of the air gap and having the same thickness as the air gap.
摘要翻译：公开了一种薄膜体声波谐振器及其制造方法。薄膜体声波谐振器包括声谐振器，包括第一电极，第二电极和布置在第一电极和第二电极之间的压电层; 气隙，设置在声谐振器下方和衬底上方以反射声波; 以及设置在气隙的两个表面中的每一个并且具有与气隙相同厚度的锚固件。

6. 发明授权

US10079589B2 Thin film bulk acoustic resonator and method for manufacturing same 有权
公开(公告)号：US10079589B2
公开(公告)日：2018-09-18
申请号：US14353561
申请日：2012-06-07
申请人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
发明人： Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
IPC分类号： H03H9/17 , H03H3/02 , H01L41/297 , H01L41/312 , H01L41/332
CPC分类号： H03H9/173 , H01L41/297 , H01L41/312 , H01L41/332 , H03H3/02 , H03H9/175 , H03H2003/021
摘要： A thin film bulk acoustic resonator and a method of manufacturing the same is disclosed. The thin film bulk acoustic resonator includes an acoustic resonator including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an air gap disposed below the acoustic resonator and above a substrate to reflect the acoustic wave; and an anchor disposed on each of both surfaces of the air gap and having the same thickness as the air gap.

7. 发明申请

US20130181579A1 BULK ACOUSTIC WAVE RESONATOR 有权
标题翻译：大容量声波谐振器
公开(公告)号：US20130181579A1
公开(公告)日：2013-07-18
申请号：US13686005
申请日：2012-11-27
申请人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
IPC分类号： H01L41/107
CPC分类号： H01L41/107 , H03H9/02102 , H03H9/0211 , H03H9/173 , H03H9/174 , H03H9/175
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.
摘要翻译：提供了一种体声波谐振器（BAWR）。 BAWR可以包括设置在基板上的空气腔，包括压电层的体声波谐振单元和反射层，以反射从压电层产生的谐振频率的波。

8. 发明授权

US08987666B2 Apparatus and method for sensing temperature 有权
标题翻译：用于感测温度的装置和方法
公开(公告)号：US08987666B2
公开(公告)日：2015-03-24
申请号：US13616445
申请日：2012-09-14
申请人： Ho Soo Park , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Cui Jing
发明人： Ho Soo Park , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Cui Jing
IPC分类号： G01J5/44
CPC分类号： G01J5/44
摘要： A temperature sensing apparatus and method are described to detect a change in a frequency due to a change in a temperature. An infrared light sensing apparatus and method are also provided. The temperature sensing apparatus may include an electrode to generate an electrical signal, a piezoelectric layer to convert the electrical signal into an acoustic wave, and a temperature sensitive layer formed by doping impurities in one or more structures formed on a substrate. Additionally, the infrared light sensing apparatus may convert into heat infrared light incident to an infrared light absorption layer, using an infrared light reflection layer and the infrared light absorption layer. A temperature sensitive layer may detect a change in a resonant frequency based on a change in a temperature of the heat, and may detect a change in infrared light based on the change in the resonant frequency.
摘要翻译：描述了一种温度检测装置和方法，以检测由于温度变化引起的频率变化。还提供了一种红外光感测装置和方法。温度检测装置可以包括用于产生电信号的电极，将电信号转换成声波的压电层，以及通过在衬底上形成的一个或多个结构中掺杂杂质形成的温度敏感层。此外，红外光检测装置可以使用红外光反射层和红外光吸收层转换入入红外光吸收层的热红外光。温度敏感层可以基于热的温度的变化来检测谐振频率的变化，并且可以基于谐振频率的变化来检测红外光的变化。

9. 发明授权

US09735754B2 Bulk acoustic wave resonator having a plurality of compensation layers and duplexer using same 有权
公开(公告)号：US09735754B2
公开(公告)日：2017-08-15
申请号：US13558907
申请日：2012-07-26
申请人： Jea Shik Shin , In Sang Song , Young Il Kim , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Hyung Rak Kim , Jae Chun Lee
发明人： Jea Shik Shin , In Sang Song , Young Il Kim , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Hyung Rak Kim , Jae Chun Lee
IPC分类号： H03H9/15 , H03H9/54 , H03H9/70 , H03H9/02 , H03H9/58 , H03H9/17
CPC分类号： H03H9/02102 , H03H9/171 , H03H9/173 , H03H9/174 , H03H9/588 , H03H9/706
摘要： A bulk acoustic wave resonator (BAWR) includes a bulk acoustic resonance unit and at least one compensation layer. The bulk acoustic resonance unit includes a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode. The first electrode, the second electrode, and the piezoelectric layer each include a material that modifies a resonance frequency based on a temperature, and the at least one compensation layer includes a material that adjusts the resonance frequency modified based on the temperature in a direction opposite to a direction of the modification.

10. 发明申请

US20120049976A1 BULK ACOUSTIC WAVE RESONATOR STRUCTURE, A MANUFACTURING METHOD THEREOF, AND A DUPLEXER USING THE SAME 有权
标题翻译：大容量声波谐振器结构及其制造方法，以及使用其的双工器
公开(公告)号：US20120049976A1
公开(公告)日：2012-03-01
申请号：US13088905
申请日：2011-04-18
申请人： Sang Uk Son , In Sang Song , Young Il Kim , Duck Hwan Kim , Chul Soo Kim , Jea Shik Shin , Hyung Rak Kim , Jae Chun Lee
发明人： Sang Uk Son , In Sang Song , Young Il Kim , Duck Hwan Kim , Chul Soo Kim , Jea Shik Shin , Hyung Rak Kim , Jae Chun Lee
IPC分类号： H03H9/70 , H03H3/02 , H01L41/047
CPC分类号： H03H9/02149 , H03H3/04 , H03H9/1014 , H03H9/131 , H03H9/564 , H03H9/706 , H03H2003/021
摘要： A Bulk Acoustic Wave Resonator (BAWR), a method of manufacturing of the BAWR, and duplexer including the BAWR are provided. The BAWR may include a first substrate including a via hole formed in a predetermined area of a bottom surface of the first substrate. A first air cavity may be formed above the first substrate, and a first lamination resonating portion may be laminated above the first air cavity in sequence of a lower electrode, a piezoelectric layer, and an upper electrode. A second air cavity may be formed above the first substrate, and a second lamination resonating portion may be laminated above the second air cavity in sequence of the lower electrode, the piezoelectric layer, and the upper electrode. The first lamination resonating portion and the second lamination resonating portion may be connected via either the lower electrode or the upper electrode. A first electrode portion may include a third air cavity formed on a bottom surface of either the lower electrode or the upper electrode connecting between the first lamination resonating portion and the second lamination resonating portion.
摘要翻译：提供了一种体声波谐振器（BAWR），一种制造BAWR的方法，以及包括BAWR的双工器。 BAWR可以包括第一基板，其包括形成在第一基板的底表面的预定区域中的通孔。可以在第一基板上形成第一空气腔，并且第一层叠谐振部分可以按照下电极，压电层和上电极的顺序层叠在第一空气腔的上方。可以在第一基板的上方形成第二空气腔，并且第二层压谐振部分可以按照下电极，压电层和上电极的顺序层叠在第二空气腔的上方。第一层叠谐振部分和第二层叠谐振部分可以通过下电极或上电极连接。第一电极部分可以包括形成在第一层压谐振部分和第二层压谐振部分之间的下电极或上电极的底表面上的第三空腔。

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