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    • 4. 发明授权
    • Apparatus for drying batches of wafers
    • 用于干燥批次的晶片的装置
    • US06430841B1
    • 2002-08-13
    • US09580825
    • 2000-05-26
    • Jonathan BorkowskiOliver David JonesKenneth C. McMahonScott PetersenDonald StephensYassin MehmandoustJames M. Olivas
    • Jonathan BorkowskiOliver David JonesKenneth C. McMahonScott PetersenDonald StephensYassin MehmandoustJames M. Olivas
    • F26B2108
    • H01L21/67057H01L21/67034H01L21/67046H01L21/6776
    • Liquid is removed from batches of substrates by apparatus and methods for drying substrates that have been wet in an elongated liquid bath. The substrates are moved relative to the bath and an elongated gas-filled volume at rates of movement selected according to the location of the batches of substrates in the bath or the volume. As an example, the substrates and the bath are separated at a controlled rate to form a thin layer of liquid on each substrate as each substrate enters the gas-filled volume. The gas-filled volume is defined by an elongated hot chamber and hot gas directed into the volume and across the substrates and out of the volume continuously transfers thermal energy to the substrates. The flow rate of the gas into the volume is related to introduction of the substrates into the bath to avoid disturbing the liquid in the bath. The thermal energy transferred to the substrates in the volume evaporates the thin layer from the substrates without decreasing the rate of separation of the substrates and the bath below the maximum rate of such separation at which a meniscus will form between the bath and the surface of one of the substrates during such separation. Relative humidity in the volume is controlled by sensing the relative humidity and regulating the speed of a fan that draws gas from the volume.
    • 通过用于干燥在细长液体浴中润湿的基底的装置和方法从批次的基底中除去液体。 衬底相对于浴移动,并且根据衬底批次在浴中的位置或体积选择移动速率的细长气体填充体积。 作为示例,基板和浴以受控的速率分离,以在每个基板进入气体填充体积时在每个基板上形成薄层的液体。 气体填充体积由细长的热室和引导到体积中并跨过衬底的热气体限定,并且在体积之外连续地将热能传递到衬底。 进入体积的气体的流速与将基底引入浴中以避免干扰浴中的液体有关。 在体积中转移到基底的热能从衬底中蒸发薄层,而不会降低衬底和浴的分离速率低于这种分离的最大速率,其中在浴和表面之间形成弯液面 在这种分离过程中。 通过感测相对湿度并调节从体积吸取气体的风扇的速度来控制体积中的相对湿度。
    • 5. 发明授权
    • Retrievable blood clot filter with retractable anchoring members
    • 可收缩的血液凝块过滤器,具有伸缩锚固构件
    • US08231649B2
    • 2012-07-31
    • US10762643
    • 2004-01-20
    • Scott Petersen
    • Scott Petersen
    • A61F2/01
    • A61F2/01A61F2002/016A61F2230/005A61F2230/0067
    • Retrievable blood clot filter devices implantable within a blood vessel, including methods and apparatuses for retrieving such devices, are disclosed. The retrievable blood clot filter device can include an apical head, and a plurality of elongated filter legs configured to expand between a collapsed position and an expanded position within the blood vessel. A bendable anchoring member disposed on one or more filter support members can be used to secure the blood clot filter device along the inner wall of the blood vessel. The anchoring members can be configured to bend and retract into a number of filter tubes slidably disposed along the support members, allowing the blood clot filter device to be removed with a retrieval apparatus.
    • 公开了可植入血管内的可检测血块滤过装置,包括用于检索这些装置的方法和装置。 可回收的血块过滤装置可以包括顶端头和多个细长的过滤腿,其构造成在血管内的折叠位置和扩张位置之间膨胀。 设置在一个或多个过滤器支撑构件上的可弯曲锚固构件可以用于沿着血管的内壁固定血块过滤装置。 锚固构件可以构造成弯曲和缩回到沿着支撑构件可滑动地设置的多个过滤管,从而允许使用取出装置去除血块过滤装置。
    • 7. 发明授权
    • Integrated megasonic cascade scrubber module and process
    • 集成式超声波级联洗涤器模块和过程
    • US07516507B1
    • 2009-04-14
    • US10984321
    • 2004-11-08
    • Michael OxsenScott PetersenYassin Mehmandoust
    • Michael OxsenScott PetersenYassin Mehmandoust
    • B08B11/02
    • B08B1/04B08B3/12G11B23/505H01L21/67046
    • Substrate preparation systems comprising multi-zone cascade brush scrubbers having sonic assemblies disposed between one or more of the scrubber zones for cleaning of disk-shaped substrates, including silicon wafers and disks for data storage devices, such as hard disk drives (HDD), compact discs (CD) and digital video discs (DVD). The system method combines a sonic particle dislodgement/removal assembly into a cascade brush scrubber line comprising a longi-tudinal array of brush pairs in which the substrates process through preparation zones defined by each pair of brushes, the substrates being transited longitudinally through the zones while rotating on an axis normal to their faces. Piezoelectric transducer arrays transmit sound energy to one or both face(s) of the substrate to dislodge and/or remove particles, and the scrubber simultaneously or thereafter sweeps away the particulates. The sonic energy may be ultrasonic, megasonic, or both, applied to the substrate surface(s) in alternating or sequential process steps.
    • 衬底制备系统包括多区级联刷洗涤器,其具有设置在一个或多个洗涤器区域之间的用于清洁盘形基底的声波组件,包括用于数据存储设备的硅晶片和盘,例如硬盘驱动器(HDD),紧凑型 光盘(CD)和数字视频光盘(DVD)。 系统方法将声波粒子移动/移除组件组合成级联刷洗涤器管线,其包括刷子对的纵向阵列,其中衬底通过由每对刷子限定的制备区域进行处理,衬底沿纵向穿过区域,而 在垂直于其脸部的轴上旋转。 压电换能器阵列将声能传递到衬底的一个或两个面,以移除和/或去除颗粒,并且洗涤器同时或此后扫除颗粒。 声波能量可以是超声波,兆声波或两者,以交替或顺序的工艺步骤施加到衬底表面。
    • 8. 发明申请
    • RETRIEVABLE BLOOD CLOT FILTER WITH RETRACTABLE ANCHORING MEMBERS
    • 具有可退回锚定成员的可检测血液衣物过滤器
    • US20120265239A1
    • 2012-10-18
    • US13537154
    • 2012-06-29
    • Scott Petersen
    • Scott Petersen
    • A61F2/01
    • A61F2/01A61F2002/016A61F2230/005A61F2230/0067
    • Retrievable blood clot filter devices implantable within a blood vessel, including methods and apparatuses for retrieving such devices, are disclosed. The retrievable blood clot filter device can include an apical head, and a plurality of elongated filter legs configured to expand between a collapsed position and an expanded position within the blood vessel. A bendable anchoring member disposed on one or more filter support members can be used to secure the blood clot filter device along the inner wall of the blood vessel. The anchoring members can be configured to bend and retract into a number of filter tubes slidably disposed along the support members, allowing the blood clot filter device to be removed with a retrieval apparatus.
    • 公开了可植入血管内的可检测血块滤过装置,包括用于检索这些装置的方法和装置。 可回收的血块过滤装置可以包括顶端头和多个细长的过滤腿,其构造成在血管内的折叠位置和扩张位置之间膨胀。 设置在一个或多个过滤器支撑构件上的可弯曲锚固构件可以用于沿着血管的内壁固定血块过滤装置。 锚固构件可以构造成弯曲和缩回到沿着支撑构件可滑动地设置的多个过滤管,从而允许使用取出装置去除血块过滤装置。
    • 9. 发明申请
    • Lower body support device
    • 下身支撑装置
    • US20070179032A1
    • 2007-08-02
    • US11343427
    • 2006-01-30
    • Scott Petersen
    • Scott Petersen
    • A63B26/00A63B71/00
    • A47C9/025A47C9/005Y10S482/907
    • In accordance with the present invention, a lower body support device is shown herein. The lower leg of the user is positioned such that the knee of the user rests within the area defined by a knee frame, the shin of the user rests within the area defined by a bend frame, and the ankle of the use rests in the region of an ankle frame. A strap bar means connected to the knee frame allows for the securing of a knee pad, such knee pad is user chosen, worn by the user and strapped to the knee frame via the strap bar means. A seat insert is secured to the top of the ankle frame. The user wears one leg support device on each leg. While resting on a surface, the bottom of the knee frame and the bottom of the ankle frame, and possibly the knee pad worn by the user, contact said surface. Preferably, the buttocks of the user rests on the seat insert, which transfers a significant portion of the weight of the user to the surface via the frames. The ankle frame and knee frame greatly limit the possibility of side-to-side motion. Additionally, the user may stand and walk while employing the leg support device.
    • 根据本发明,这里示出了下体支撑装置。 使用者的小腿被定位成使得使用者的膝盖搁置在由膝盖框架限定的区域内,使用者的胫骨位于由弯曲框架限定的区域内,并且使用的踝关节位于该区域 的脚踝框架。 连接到膝盖框架的条带装置允许固定膝盖垫,用户选择的这种膝盖垫被用户佩戴并且经由带条装置绑在膝盖框架上。 座椅插入件固定到脚踝框架的顶部。 用户在每条腿上佩戴一条腿支撑装置。 在搁置在表面上时,膝盖框架的底部和脚踝框架的底部以及用户佩戴的膝盖垫可以接触所述表面。 优选地,使用者的臀部位于座椅插入件上,座位插入件将用户的重量的大部分经由框架传递到表面。 脚踝框架和膝盖框架大大限制了侧面运动的可能性。 此外,用户可以在使用腿支撑装置的同时站立和行走。
    • 10. 发明授权
    • Aerial application dispersal system
    • 空中应用分散系统
    • US07717356B2
    • 2010-05-18
    • US11810842
    • 2007-06-07
    • Scott Petersen
    • Scott Petersen
    • A62C5/02
    • B64D1/18A62C3/0242
    • An aerial application dispersal system that comprises an aerial vehicle and an aerial dispersal unit. The aerial dispersal unit provides an insect control substance, a flake auger, and a motor to drive the flake auger for transporting the insect control substance to a dispensing chamber. The aerial dispersal unit also provides a glue substance, a pump, and a motor to drive the pump for transporting the glue substance from a storage container to the dispensing chamber for mixing with the insect control substance. The dispensing chamber is provided with a motor for forcing the insect control substance mixed with the glue substance out an exit portal for disbursement over the designated area. A control box, control switches, global positioning satellite system, and dispersal unit operator interface are also provided for automatically regulating the mixing and dispensing rate of the insect control substance and glue substance in relation to the ground speed of the aerial vehicle for maintaining a constant, uniform disbursement of a bonded substance over a designated area.
    • 一种空中应用分散系统,包括飞行器和空中分散单元。 飞行分散单元提供昆虫控制物质,片状螺旋钻和马达,以驱动片状螺旋钻将昆虫控制物质运送到分配室。 飞行分散单元还提供胶水物质,泵和电动机,以驱动泵将胶状物质从储存容器输送到分配室,以与昆虫控制物质混合。 分配室设置有用于将与胶体物质混合的昆虫控制物质输出出口门口的电动机,用于在指定区域上支付。 还提供控制箱,控制开关,全球定位卫星系统和分散单元操作员界面,用于自动调节昆虫控制物质和胶水物质与飞行器地面速度的混合和分配速度,以保持恒定 在指定地区均匀发放保税物资。