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1. 发明授权

US06662467B2 Drying assembly and method of drying for a flooded enclosed elevated space 失效
标题翻译：干燥组件和干燥方法用于淹没的封闭升高的空间
公开(公告)号：US06662467B2
公开(公告)日：2003-12-16
申请号：US10206433
申请日：2002-07-29
申请人： Charles S. Cressy , Michael Tufariello
发明人： Charles S. Cressy , Michael Tufariello
IPC分类号： F26B2108
CPC分类号： F26B21/001 , E04B1/7015 , F26B21/002 , F26B23/002 , Y02P70/405
摘要： A portable hand truck mounted drying assembly for the drying of an elevated enclosed space which has been subjected to flooding, the drying assembly having an inlet path for the introduction of ambient air into the enclosed space, the ambient air being preheated in a heat exchanger by moisture laden air removed from the enclosed space, the preheated ambient air being subjected to further heating before introduction into the enclosed space, the portable hand truck mounted unit being positioned within the enclosed space and having a plurality of conduits in communication with the enclosed space for the introduction of dry heated air and the removal of moisture laden air.
摘要翻译：一种便携式手推车安装的干燥组件，用于干燥已经受到淹水的升高的封闭空间，干燥组件具有用于将环境空气引入封闭空间的入口路径，环境空气在热交换器中被预热，从封闭空间移除含水分的空气，预热的环境空气在引入封闭空间之前经受进一步加热，便携式手推车安装单元位于封闭空间内，并具有与封闭空间连通的多个导管，用于引入干燥的加热空气和去除含水量的空气。

2. 发明授权

US06430841B1 Apparatus for drying batches of wafers 有权
标题翻译：用于干燥批次的晶片的装置
公开(公告)号：US06430841B1
公开(公告)日：2002-08-13
申请号：US09580825
申请日：2000-05-26
申请人： Jonathan Borkowski , Oliver David Jones , Kenneth C. McMahon , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
发明人： Jonathan Borkowski , Oliver David Jones , Kenneth C. McMahon , Scott Petersen , Donald Stephens , Yassin Mehmandoust , James M. Olivas
IPC分类号： F26B2108
CPC分类号： H01L21/67057 , H01L21/67034 , H01L21/67046 , H01L21/6776
摘要： Liquid is removed from batches of substrates by apparatus and methods for drying substrates that have been wet in an elongated liquid bath. The substrates are moved relative to the bath and an elongated gas-filled volume at rates of movement selected according to the location of the batches of substrates in the bath or the volume. As an example, the substrates and the bath are separated at a controlled rate to form a thin layer of liquid on each substrate as each substrate enters the gas-filled volume. The gas-filled volume is defined by an elongated hot chamber and hot gas directed into the volume and across the substrates and out of the volume continuously transfers thermal energy to the substrates. The flow rate of the gas into the volume is related to introduction of the substrates into the bath to avoid disturbing the liquid in the bath. The thermal energy transferred to the substrates in the volume evaporates the thin layer from the substrates without decreasing the rate of separation of the substrates and the bath below the maximum rate of such separation at which a meniscus will form between the bath and the surface of one of the substrates during such separation. Relative humidity in the volume is controlled by sensing the relative humidity and regulating the speed of a fan that draws gas from the volume.
摘要翻译：通过用于干燥在细长液体浴中润湿的基底的装置和方法从批次的基底中除去液体。衬底相对于浴移动，并且根据衬底批次在浴中的位置或体积选择移动速率的细长气体填充体积。作为示例，基板和浴以受控的速率分离，以在每个基板进入气体填充体积时在每个基板上形成薄层的液体。气体填充体积由细长的热室和引导到体积中并跨过衬底的热气体限定，并且在体积之外连续地将热能传递到衬底。进入体积的气体的流速与将基底引入浴中以避免干扰浴中的液体有关。在体积中转移到基底的热能从衬底中蒸发薄层，而不会降低衬底和浴的分离速率低于这种分离的最大速率，其中在浴和表面之间形成弯液面在这种分离过程中。通过感测相对湿度并调节从体积吸取气体的风扇的速度来控制体积中的相对湿度。

3. 发明授权

US06457258B1 Drying assembly and method of drying for a flooded enclosed space 有权
标题翻译：干燥装置和淹没封闭空间的干燥方法
公开(公告)号：US06457258B1
公开(公告)日：2002-10-01
申请号：US09799925
申请日：2001-03-06
申请人： Charles S. Cressy , Michael Tufariello
发明人： Charles S. Cressy , Michael Tufariello
IPC分类号： F26B2108
CPC分类号： F26B23/002 , E04B1/7015 , F26B21/001 , Y02P70/405
摘要： A portable trailer mounted drying assembly for the drying of an enclosed space which has been subjected to flooding, the drying assembly having an inlet path for the introduction of ambient air into the enclosed space, the ambient air being preheated in a heat exchanger by moisture laden air removed from the enclosed space, the preheated ambient air being subjected to further heating before introduction into the enclosed space, the portable trailer mounted unit being positioned proximate to the enclosed space and having a plurality of conduits in communication with the enclosed space for the introduction of dry heated air and the removal of moisture laden air.
摘要翻译：一种便携式拖车安装的干燥组件，用于干燥已经受到淹水的封闭空间的干燥，干燥组件具有用于将环境空气引入封闭空间的入口路径，环境空气在热交换器中由负载的负载空气从封闭空间移出，预热的环境空气在引入封闭空间之前经受进一步加热，便携式拖车安装单元位于封闭空间附近，并且具有与封闭空间连通的多个导管，用于引入的干燥加热空气和去除含水量的空气。

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