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    • 6. 发明授权
    • Apparatus for cleaning of circuit substrates
    • 电路基板清洗装置
    • US08752228B2
    • 2014-06-17
    • US11912126
    • 2005-04-20
    • Janos FarkasSrdjan KordicSebastien PetitdidierKevin E CooperJan Van Hassel
    • Janos FarkasSrdjan KordicSebastien PetitdidierKevin E CooperJan Van Hassel
    • H01L21/00
    • H01L21/67046
    • Silicon wafers and the like are cleaned using new scrubber-type apparatus in which measures are taken to compensate for differential cleaning of the central region of the wafer by: using rotary brushes having one or more non-contact portions arranged in the section thereof that faces the central region of the substrate, or toggling the relative position of the wafer and the rotary brushes, or directing cleaning fluid(s) preferentially towards the central region of the wafer. Another aspect of the invention provides scrubber-type cleaning apparatus in which the rotary brushes are replaced by rollers (110). A web of cleaning material (116) is interposed between each roller and the substrate. Various different webs of cleaning material may be used, e.g. a length of tissue, a continuous loop of cleaning material whose surface is reconditioned on each cleaning pass, adhesive material provided on a carrier tape, etc.
    • 使用新的洗涤器型装置清洁硅晶片等,其中采取措施来补偿晶片的中心区域的差别清洁:使用具有一个或多个非接触部分的旋转电刷, 或者切换晶片和旋转刷的相对位置,或者将清洁流体优先地引向晶片的中心区域。 本发明的另一方面提供了一种洗涤器型清洁装置,其中旋转刷由辊(110)代替。 清洁材料网(116)插入在每个辊和基底之间。 可以使用各种不同的清洁材料网,例如。 组织长度,每个清洁通道上表面被修复的清洁材料的连续回路,设置在载带上的粘合材料等。
    • 8. 发明申请
    • Promotion of a wine industry
    • 推广葡萄酒产业
    • US20090094098A1
    • 2009-04-09
    • US11906980
    • 2007-10-04
    • Janos Farkas
    • Janos Farkas
    • G06Q30/00
    • G06Q30/02G06Q30/0236G06Q30/0241
    • Disclosed herein is a method and system for promoting a first wine industry of a first geographical location utilizing a plurality of advertising media. In a first embodiment, the plurality of advertising mediums is selected for promoting the first wine industry. The disclosed method links information of contribution of the first wine industry to a second wine industry. The information is publicized in a plurality of locations. In a second embodiment, the first wine industry is promoted utilizing a web portal. The web portal comprises a first set of information of the first wine industry and a second set of information of the second wine industry. The web portal establishes a virtual link between the first set of information and the second set of information. Further, revenue may be generated through the advertising mediums and targeted advertising.
    • 本文公开了一种利用多种广告媒体促进第一地理位置的第一葡萄酒业的方法和系统。 在第一实施例中,多个广告媒体被选择用于促进第一葡萄酒行业。 所公开的方法将第一葡萄酒行业的贡献信息与第二葡萄酒行业相关联。 该信息在多个位置公开。 在第二实施例中,利用门户网站来推广第一葡萄酒行业。 该门户网站包括第一葡萄酒行业的第一组信息和第二葡萄酒行业的第二组信息。 网络门户在第一组信息和第二组信息之间建立虚拟链路。 此外,可以通过广告媒介和有针对性的广告来产生收入。
    • 9. 发明授权
    • CMP metal polishing slurry and process with reduced solids concentration
    • CMP金属抛光浆料和固体浓度降低的工艺
    • US07456105B1
    • 2008-11-25
    • US10321973
    • 2002-12-17
    • Kevin Elliot CooperJennifer Lynn CooperJanos FarkasJohn C. FlakeJohannes Friedrich GroschopfYuri Solomentsev
    • Kevin Elliot CooperJennifer Lynn CooperJanos FarkasJohn C. FlakeJohannes Friedrich GroschopfYuri Solomentsev
    • H01L21/302H01L21/461
    • H01L21/3212C09G1/02
    • This disclosure describes a low particle concentration formulation for slurry which is particularly useful in continuous CMP polishing of copper layers during semiconductor wafer manufacture. The slurry is characterized by particle concentrations generally less than 2 wt %, and advantageously less than 1 wt %. In particular embodiments, where the particle concentration is in a range of 50 to 450 PPM, an 8-fold increase in polishing rate over reactive liquid slurries has been realized. Slurries thus formulated also achieve a reduction in defectivity and in the variations in planarity from wafer to wafer during manufacture, by improving the stability of polishing quality. The slurry formulations permit substantial cost savings over traditional 2-component, reactive liquid and fixed/bonded abrasive slurries. In addition the formulations provides an advantageous way during CMP to easily change the selectivity or rate of removal of one film material vs. another. Yet another use is to provide slurry “pulsing” as a means to activate bonded abrasive or fixed abrasive slurry technology.
    • 本公开内容描述了用于浆料的低颗粒浓度配方,其特别适用于半导体晶片制造过程中铜层的连续CMP抛光。 浆料的特征在于颗粒浓度通常小于2重量%,有利地小于1重量%。 在特定实施方案中,其中颗粒浓度在50至450PPM的范围内,抛光速率比反应性液体浆料高8倍。 因此,通过提高抛光质量的稳定性,由此制成的浆料也可以在制造过程中实现缺陷率的降低和从晶片到晶片的平面度的变化。 与传统的2组分反应性液体和固定/粘结的磨料浆料相比,浆料配方可节省大量成本。 此外,制剂在CMP期间提供有利的方式以容易地改变一种膜材料相对于另一种膜材料的选择性或速率。 另一种用途是提供浆料“脉冲”作为活化粘合磨料或固定磨料浆料技术的手段。
    • 10. 发明申请
    • Method and device for audience monitoring on multicast capable networks
    • 用于组播能力网络的观众监控的方法和设备
    • US20060294259A1
    • 2006-12-28
    • US10595346
    • 2003-10-24
    • Gergely MatefiJanos FarkasTamas Elteto
    • Gergely MatefiJanos FarkasTamas Elteto
    • G06F15/16
    • H04L12/2861H04H60/44H04L12/18H04L12/2856H04L43/08H04L67/22
    • The presented idea is a cheap solution for audience monitoring in multicast capable networks e.g. Ethernet, IP or UMTS. There is no need for user equipment in order to monitor the viewers' watching behavior. The measurement is done in the operator's network; therefore, there is no need to contact the end user. The idea can be applied in systems comprising multicast capable network contention server, network devices and user equipment. The content is carried in data packets to the end user. The network devices are remote manageable. The user can choose between several contents. The aim is to measure the user statistics regarding the chosen content. According to the invention it is enough to place a measurement host with our proposed software block in the network, which collects data from the network devices in the edge of the network periodically in order to make a content access survey.
    • 所提出的想法是用于在具有多播能力的网络中的观众监视的廉价解决方案。 以太网,IP或UMTS。 为了监视观众的观看行为,不需要用户设备。 测量在操作员网络中完成; 因此,无需与最终用户联系。 该思想可以应用于包括多播能力的网络争用服务器,网络设备和用户设备的系统中。 内容以数据包传送给最终用户。 网络设备可远程管理。 用户可以选择多个内容。 目的是衡量有关所选内容的用户统计信息。 根据本发明,将测量主机与我们提出的软件块放置在网络中,从而周期性地从网络边缘的网络设备收集数据,以进行内容访问调查。