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    • 7. 发明授权
    • Three dimensional semiconductor memory devices and methods of fabricating the same
    • 三维半导体存储器件及其制造方法
    • US08729622B2
    • 2014-05-20
    • US13276682
    • 2011-10-19
    • Hui-Chang MoonSung-Min HwangWoonkyung Lee
    • Hui-Chang MoonSung-Min HwangWoonkyung Lee
    • H01L29/792
    • H01L27/11582H01L27/11556H01L29/7926
    • A three dimensional semiconductor memory device has a stacked structure including cell gates stacked therein that are insulated from each other and first string selection gates laterally separated from each other, vertical active patterns extending through the first string selection gates, multi-layered dielectric layers between sidewalls of the vertical active patterns and the cell gates and between the sidewalls of the vertical active patterns and the first string selection gates, and at least one first supplement conductive pattern. The first string selection gates are disposed over an uppermost cell gate of the cell gates. Each vertical active pattern extends through each of the cell gates stacked under the first string selection gates. The first supplement conductive pattern is in contact with a sidewall of one of the first string selection gates.
    • 三维半导体存储器件具有层叠结构,其包括彼此绝缘的单元栅极和彼此横向分离的第一串选择栅极,延伸穿过第一串选择栅极的垂直有源图案,侧壁之间的多层电介质层 垂直有源图案和单元栅极之间以及垂直有源图案和第一串选择栅极的侧壁之间以及至少一个第一补充导电图案。 第一串选择栅极设置在单元栅极的最上面的单元栅极上。 每个垂直有源图案延伸穿过堆叠在第一串选择门下的每个单元门。 第一补充导电图案与第一串选择门之一的侧壁接触。
    • 9. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20130168800A1
    • 2013-07-04
    • US13717803
    • 2012-12-18
    • Jae-Joo ShimHan-Soo KimWoon-Kyung LeeJu-Young LimSung-Min Hwang
    • Jae-Joo ShimHan-Soo KimWoon-Kyung LeeJu-Young LimSung-Min Hwang
    • H01L29/06
    • H01L29/0657H01L27/0207H01L27/1157H01L27/11582
    • Provided is a semiconductor device that includes first and second isolation patterns disposed on a substrate. Alternately stacked interlayer insulating patterns and a conductive patterns are disposed on a surface of the substrate between the first and second isolation patterns. A support pattern penetrates the conductive patterns and the interlayer insulating patterns and has a smaller width than the first and second isolation patterns. First and second vertical structures are disposed between the first isolation and the support pattern and penetrate the conductive patterns and the interlayer insulating patterns. A second vertical structure is disposed between the second isolation pattern and the support pattern and penetrates the conductive patterns and the interlayer insulating patterns. A distance between top and bottom surfaces of the support pattern is greater than a distance between a bottom surface of the support pattern and the surface of the substrate.
    • 提供了包括设置在基板上的第一和第二隔离图案的半导体器件。 交替层叠的层间绝缘图案和导电图案设置在第一和第二隔离图案之间的基板的表面上。 支撑图案穿透导电图案和层间绝缘图案,并且具有比第一和第二隔离图案更小的宽度。 第一和第二垂直结构设置在第一隔离和支撑图案之间并且穿透导电图案和层间绝缘图案。 第二垂直结构设置在第二隔离图案和支撑图案之间并且穿透导电图案和层间绝缘图案。 支撑图案的顶表面和底表面之间的距离大于支撑图案的底表面和基底表面之间的距离。