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    • 3. 发明授权
    • Method for temperature compensation in MEMS resonators with isolated regions of distinct material
    • 具有不同材料隔离区域的MEMS谐振器中的温度补偿方法
    • US07639104B1
    • 2009-12-29
    • US11716115
    • 2007-03-09
    • Emmanuel P. QuevyDavid H. Bernstein
    • Emmanuel P. QuevyDavid H. Bernstein
    • H03H9/00
    • B81C1/0069B81C1/00349B81C1/00523G02B6/358H03H3/0076H03H9/2405H03H9/2457H03H2009/02496H03H2009/2442Y10T29/42Y10T29/49005Y10T29/49165
    • MEMS resonators containing a first material and a second material to tailor the resonator's temperature coefficient of frequency (TCF). The first material has a different Young's modulus temperature coefficient than the second material. In one embodiment, the first material has a negative Young's modulus temperature coefficient and the second material has a positive Young's modulus temperature coefficient. In one such embodiment, the first material is a semiconductor and the second material is a dielectric. In a further embodiment, the quantity and location of the second material in the resonator is tailored to meet the resonator TCF specifications for a particular application. In an embodiment, the second material is isolated to a region of the resonator proximate to a point of maximum stress within the resonator. In a particular embodiment, the resonator includes a first material with a trench containing the second material. In a specific embodiment, the shape, dimensions, location and arrangement of a second material comprising silicon dioxide is tailored so that the resonator comprising a first material of SiGe will have a TCF of a much lower magnitude than that of either a homogeneous SiGe or homogeneous silicon dioxide resonator.
    • 包含第一材料和第二材料的MEMS谐振器以调整谐振器的频率温度系数(TCF)。 第一种材料具有与第二种材料不同的杨氏模量温度系数。 在一个实施例中,第一材料具有负杨氏模量温度系数,第二材料具有正的杨氏模量温度系数。 在一个这样的实施例中,第一材料是半导体,第二材料是电介质。 在另一实施例中,谐振器中的第二材料的数量和位置被调整为满足特定应用的谐振器TCF规格。 在一个实施例中,第二材料被隔离到谐振器附近的最大应力点处的谐振器的区域。 在特定实施例中,谐振器包括具有包含第二材料的沟槽的第一材料。 在具体实施例中,包括二氧化硅的第二材料的形状,尺寸,位置和布置被定制,使得包括SiGe的第一材料的谐振器将具有比均匀SiGe或均质SiGe的TCF低得多的TCF 二氧化硅谐振器。
    • 4. 发明授权
    • Digital data processing system incorporating apparatus for resolving
names
    • 数字数据处理系统,包括解析名称的装置
    • US4661903A
    • 1987-04-28
    • US647271
    • 1984-09-04
    • Walter A. Wallach, Jr.Michael S. RichmondJohn K. AhlstromDavid H. BernsteinRichard G. Bratt
    • Walter A. Wallach, Jr.Michael S. RichmondJohn K. AhlstromDavid H. BernsteinRichard G. Bratt
    • G06F9/318G06F9/35G06F9/44G06F13/00
    • G06F9/30192G06F9/35G06F9/4428
    • Apparatus in a digital computer system for obtaining descriptors of data from names representing the data. The digital computer system executes sequences of instructions. Names representing data processed during execution of an instruction sequence are associated with the instruction sequence. Each name associated with the instruction sequence corresponds to a name table entry associated with the instruction sequence. The operation of resolving a name, i.e., obtaining the descriptor for the data represented by the name, is performed by name processing apparatus in processors of the data processing system. In response to a name, the name processing apparatus locates the name table entry corresponding to the name obtains the descriptor for the item represented by the name using the information in the name table entry corresponding to the name. In a present embodiment, the descriptor specifies the address and length of a data item. The information in the name table entry specifies the address of the represented item by specifying a base address and a displacement and further specifies the length and type of the represented item.
    • 数字计算机系统中的装置,用于从表示数据的名称获得数据的描述符。 数字计算机系统执行指令序列。 表示在执行指令序列期间处理的数据的名称与指令序列相关联。 与指令序列相关联的每个名称对应于与指令序列相关联的名称表条目。 通过名称处理装置在数据处理系统的处理器中执行解析名称的操作,即获得由名称表示的数据的描述符。 响应于名称,名称处理设备找到与名称相对应的名称表项,使用与名称相对应的名称表项中的信息来获得由名称表示的项目的描述符。 在本实施例中,描述符指定数据项的地址和长度。 名称表项目中的信息通过指定基址和位移来指定所表示项目的地址,并进一步指定所表示项目的长度和类型。