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    • 2. 发明申请
    • OUT-OF-PLANE RESONATOR
    • 超平面谐振器
    • US20130002363A1
    • 2013-01-03
    • US13173449
    • 2011-06-30
    • Mehrnaz MotieeEmmanuel P. QuevyDavid H. Bernstein
    • Mehrnaz MotieeEmmanuel P. QuevyDavid H. Bernstein
    • H03B5/30
    • H03H9/2457H03H9/2452H03H2009/02299H03H2009/02511
    • A microelectromechanical system (MEMS) device includes a resonator anchored to a substrate. The resonator includes a first strain gradient statically deflecting a released portion of the resonator in an out-of-plane direction with respect to the substrate. The resonator includes a first electrode anchored to the substrate. The first electrode includes a second strain gradient of a released portion of the first electrode. The first electrode is configured to electrostatically drive the resonator in a first mode that varies a relative amount of displacement between the resonator and the first electrode. The resonator may include a resonator anchor anchored to the substrate. The first electrode may include an electrode anchor anchored to the substrate in close proximity to the resonator anchor. The electrode anchor may be positioned relative to the resonator anchor to substantially decouple dynamic displacements of the resonator relative to the electrode from changes to the substrate.
    • 微机电系统(MEMS)装置包括锚定到基板的谐振器。 谐振器包括使第一应变梯度在相对于衬底的平面外方向上静态偏转谐振器的释放部分。 谐振器包括锚定到基板的第一电极。 第一电极包括第一电极的释放部分的第二应变梯度。 第一电极被配置为以改变谐振器和第一电极之间的相对的位移量的第一模式静电驱动谐振器。 谐振器可以包括锚定到衬底的谐振器锚。 第一电极可以包括锚固到靠近谐振器锚的衬底的电极锚。 电极锚定件可以相对于谐振器锚固件定位,以基本上使谐振器相对于电极的动态位移与基板的变化相分离。
    • 5. 发明授权
    • Out-of-plane resonator
    • 平面外谐振器
    • US08674775B2
    • 2014-03-18
    • US13173449
    • 2011-06-30
    • Mehrnaz MotieeEmmanuel P. QuevyDavid H. Bernstein
    • Mehrnaz MotieeEmmanuel P. QuevyDavid H. Bernstein
    • H03B5/30
    • H03H9/2457H03H9/2452H03H2009/02299H03H2009/02511
    • A microelectromechanical system (MEMS) device includes a resonator anchored to a substrate. The resonator includes a first strain gradient statically deflecting a released portion of the resonator in an out-of-plane direction with respect to the substrate. The resonator includes a first electrode anchored to the substrate. The first electrode includes a second strain gradient of a released portion of the first electrode. The first electrode is configured to electrostatically drive the resonator in a first mode that varies a relative amount of displacement between the resonator and the first electrode. The resonator may include a resonator anchor anchored to the substrate. The first electrode may include an electrode anchor anchored to the substrate in close proximity to the resonator anchor. The electrode anchor may be positioned relative to the resonator anchor to substantially decouple dynamic displacements of the resonator relative to the electrode from changes to the substrate.
    • 微机电系统(MEMS)装置包括锚定到基板的谐振器。 谐振器包括使第一应变梯度在相对于衬底的平面外方向上静态偏转谐振器的释放部分。 谐振器包括锚定到基板的第一电极。 第一电极包括第一电极的释放部分的第二应变梯度。 第一电极被配置为以改变谐振器和第一电极之间的相对的位移量的第一模式静电驱动谐振器。 谐振器可以包括锚定到衬底的谐振器锚。 第一电极可以包括锚固到靠近谐振器锚的衬底的电极锚。 电极锚定件可以相对于谐振器锚固件定位,以基本上使谐振器相对于电极的动态位移与基板的变化相分离。