会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明授权
    • Methods for fabricating flash memory devices
    • 制造闪存设备的方法
    • US07416940B1
    • 2008-08-26
    • US11418352
    • 2006-05-03
    • Satoshi ToriiHidehiko ShiraiwaYouseok SuhLei Xue
    • Satoshi ToriiHidehiko ShiraiwaYouseok SuhLei Xue
    • H01L21/336
    • H01L27/115H01L27/11568
    • Methods for fabricating a flash memory device are provided. A method comprises forming a plurality of gate stacks overlying a substrate. Each gate stack comprises a charge trapping layer and a control gate. The control gate is a first distance from the substrate. Adjacent gate stacks are a second distance apart. A cell spacer material layer is deposited and is etched to form a spacer about sidewalls of each gate stack. A source/drain impurity doped region is formed adjacent a first gate stack and a last gate stack. The first distance and the second distance are such that, when a voltage is applied to a gate stack during a READ operation, a fringing field is created between the control gate of the gate stack and the substrate and is sufficient to invert a portion of the substrate between the gate stack and an adjacent gate stack.
    • 提供了制造闪速存储器件的方法。 一种方法包括形成覆盖衬底的多个栅叠层。 每个栅极堆叠包括电荷捕获层和控制栅极。 控制栅极是离基板的第一距离。 相邻的门堆叠是第二个距离。 沉积电池间隔物材料层并被蚀刻以形成围绕每个栅极叠层的侧壁的间隔物。 在第一栅极堆叠和最后一个栅极堆叠附近形成源极/漏极杂质掺杂区域。 第一距离和第二距离使得当在读取操作期间将电压施加到栅极堆叠时,在栅极堆叠的控制栅极和衬底之间产生边缘场,并且足以将一部分 栅极堆叠和相邻栅极堆叠之间的衬底。