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1. 发明授权

US4654573A Power transfer device 失效
标题翻译：电力传输装置
公开(公告)号：US4654573A
公开(公告)日：1987-03-31
申请号：US735481
申请日：1985-05-17
申请人： J. Kirkwood H. Rough , Michael Krolak , Michael R. Biche
发明人： J. Kirkwood H. Rough , Michael Krolak , Michael R. Biche
IPC分类号： H02J7/02 , H02M7/10 , H02J7/10 , H01M10/46
CPC分类号： H02M7/10 , B60L11/1812 , B60L11/182 , B60L11/1872 , H02J7/025 , B60L2210/30 , B60L2230/16 , B60L2240/527 , B60L2240/529 , B60L2240/545 , Y02T10/7005 , Y02T10/705 , Y02T10/7088 , Y02T10/7241 , Y02T10/92 , Y02T90/122 , Y02T90/127 , Y02T90/128 , Y02T90/14 , Y02T90/16 , Y02T90/163 , Y10S320/25
摘要： Apparatus for transferring electrical power between a power supplying apparatus and power consuming apparatus and having a separable high frequency transformer with a primary permanently mounted to the power supply apparatus and a secondary mounted about the power consuming apparatus. A charging control circuit mounted on the consuming apparatus, e.g. a mobile vehicle includes means for detecting current and voltage delivered through the transformer, and also for monitoring storage batteries within the vehicle. The power supply apparatus includes a power supply circuit comprising a ferrite core transformer and capacitor forming a parallel resonant circuit. The primaries of the transformer are alternately driven by a driver about opposing polarities. The drivers are controlled by a voltage-controlled pulse-width modulator which provides a square wave input to the drivers to cause them to alternatively energize the ferrite core transformer. Power is transferred across the inductor to the resonant circuit as portions of a sine wave. The power supply circuit also includes an internal current sensing circuit to shut current build-up down when current in the resonant circuit becomes too high, and an external control loop which senses power demands of the charging control circuit delivered via an optical communications link within the separable transformer.
摘要翻译：一种用于在供电设备和耗电设备之间传送电力并具有可永久安装在电源设备上的可分离高频变压器的设备，以及围绕电力消耗设备安装的辅助设备。安装在消费装置上的充电控制电路，例如，移动车辆包括用于检测通过变压器输送的电流和电压的装置，以及用于监测车辆内的蓄电池的装置。电源装置包括电源电路，其包括铁氧体磁芯变压器和形成并联谐振电路的电容器。变压器的原色由驱动器交替地由相对极性驱动。驱动器由电压控制的脉冲宽度调制器控制，该调制器向驱动器提供方波输入，以使它们交替地激励铁氧体磁芯变压器。电力作为正弦波的一部分传递到电感器到谐振电路。电源电路还包括内部电流检测电路，用于在谐振电路中的电流变得过高时关闭电流累积;以及外部控制环路，其感测通过内部的光通信链路传送的充电控制电路的功率需求可分离变压器

2. 发明授权

US4698775A Self-contained mobile reprogrammable automation device 失效
标题翻译：独立的移动可编程自动化设备
公开(公告)号：US4698775A
公开(公告)日：1987-10-06
申请号：US735468
申请日：1985-05-17
申请人： George R. Koch , Michael Krolak , Michael R. Biche
发明人： George R. Koch , Michael Krolak , Michael R. Biche
IPC分类号： B25J5/00 , B25J19/00 , B25J19/02 , G05D1/02 , G06F15/50
CPC分类号： B25J5/007 , B25J19/005 , B25J19/02 , G05D1/024 , G05D1/027 , G05D1/0272 , G05B2219/31002 , G05B2219/31005 , G05B2219/33198 , G05B2219/40283 , G05D1/0225 , G05D1/0255 , G05D2201/0216 , Y02P90/285 , Y10S414/122 , Y10S414/14
摘要： A mobile transport unit for independently operating within an enclosed environment. The transport unit is adapted for carrying a robotic manipulator arm and cargo within the environment, and includes an infrared communications transmitter/receiver for communicating with an extra-vehicular central processing unit. The transport unit includes electric motors for driving and for steering the unit. A laser docking module precisely determines the vehicle's location relative to a fixed point within the environment. Ultrasonic sensors placed about the vehicle can detect objects within a preselected range for collision avoidance and safety purposes. The vehicle is controlled by a central computer which receives inputs from the infrared communications system and from on-board sensors including directional sensors, distance measuring sensors, a gyroscope, the ultrasonic sensors, and the docking module. The on-board computer directs the vehicle and the robotic arm based on information received from these inputs, and allows for the continuous operation of the vehicle without recalibration. Power is supplied to the vehicle by an on-board battery pack, and the vehicle is enclosed by a protective skin for reasons of cleanliness and safety, and to prevent turbulent airflow around the wafer cassettes and the robotic arm.
摘要翻译：一种用于在封闭环境中独立运行的移动传输单元。运输单元适于在环境中携带机器人操纵臂和货物，并且包括用于与车外中央处理单元通信的红外通信发射器/接收器。运输单元包括用于驱动和转向该单元的电动马达。激光对接模块精确地确定车辆相对于环境中的固定点的位置。放置在车辆周围的超声波传感器可以在预选范围内检测物体，以避免碰撞和安全。车辆由中央计算机控制，该中央计算机接收来自红外通信系统和车载传感器的输入，包括定向传感器，距离测量传感器，陀螺仪，超声波传感器和对接模块。车载计算机根据从这些输入接收的信息来引导车辆和机器人手臂，并且允许车辆的连续操作而不重新校准。通过车载电池组向车辆提供动力，为了清洁和安全起见，车辆被保护皮肤包围，并且防止晶片盒和机器臂周围的湍流气流。

3. 发明授权

US4615615A Laser positioning system 失效
标题翻译：激光定位系统
公开(公告)号：US4615615A
公开(公告)日：1986-10-07
申请号：US655341
申请日：1984-09-27
申请人： Michael Krolak , Michael R. Biche
发明人： Michael Krolak , Michael R. Biche
IPC分类号： G01B11/00 , G01B11/26 , G01C3/10
CPC分类号： G01B11/26
摘要： An optical positional sensing apparatus for providing precise position and approach angle of a mobile assembly with respect to a fixed assembly. The apparatus includes a light source and optics to produce a rotating horizontal beam. Optics and a transducer are included which can detect the light beam when reflected back on itself. A corner reflector is affixed to a piece of equipment to which the mobile assembly will travel. The beam is rotated by means of a drive motor. Light hitting the corner reflector is reflected directly back under three circumstances, i.e. when the beam strikes either corner or when the beam is perpendicular to the reflector. A rotary encoder is coupled to the drive mechanism and supplies continuous angular positional data to a microprocessor. The transducer is also coupled to the microprocessor which generates data sets of angular location for each transducer signal. Simple trigonometric calculations provide the desired position and approach angle data. An alternative embodiment includes a fixed optical assembly comprising three point light sources to replace the single, mobile-assembly mounted source and fixed reflector.
摘要翻译：一种用于提供移动组件相对于固定组件的精确位置和接近角度的光学位置检测装置。该装置包括光源和光学器件以产生旋转的水平光束。包括光学和传感器，可以在自身反射时检测光束。拐角反射器被固定到移动组件将行进的一件设备上。梁通过驱动电机旋转。撞击角反光镜的光线在三种情况下直接反射，即当光束撞击任一拐角或当光束垂直于反射器时。旋转编码器耦合到驱动机构，并向微处理器提供连续的角位置数据。换能器还耦合到微处理器，其为每个换能器信号产生角位置的数据集。简单的三角计算提供了所需的位置和接近角度数据。替代实施例包括固定光学组件，其包括三点光源以代替单个移动组件安装的源和固定反射器。

4. 发明授权

US5651823A Clustered photolithography system 失效
标题翻译：集群光刻系统
公开(公告)号：US5651823A
公开(公告)日：1997-07-29
申请号：US412650
申请日：1995-03-29
申请人： Michael L. Parodi , Michael R. Biche , H. Alexander Anderson , Alexander Lurye
发明人： Michael L. Parodi , Michael R. Biche , H. Alexander Anderson , Alexander Lurye
IPC分类号： G03F7/16 , G03F7/20 , G03F7/26 , G03F7/30 , H01L21/00 , H01L21/027 , H01L21/677 , B65G25/00
CPC分类号： H01L21/67167 , G03F7/30 , G03F7/3021 , G03F7/70691 , H01L21/67178 , H01L21/67184 , H01L21/67225 , H01L21/67742 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate photolithography system includes a substrate handling robot which pivots about a fixed point and transfers substrates between photoresist coater, a developer, and a heating/cooling unit, all of which are clustered about the robot. The end effector of the robot is capable of both vertical and lateral movement so that individual modules of the heating/cooling unit may be stacked. An apparatus and a method for baking and cooling silicon substrates are disclosed. Both baking and cooling of silicon substrates are done in a single integrated thermal process module. Each thermal process module includes two hot plate assemblies, a cool plate assembly, two local linear transfer arms and a micro-processor based module controller. Both transfer arms are capable of transferring substrates among the cool and hot plate assemblies. A cassette input/output unit handles cassettes which contain semiconductor wafers or other substrates that are to be delivered to or withdrawn from a semiconductor processing system. The input/output unit includes a drawer front which rotates 90.degree. about a horizontal axis as it is opened.
摘要翻译：基板光刻系统包括基板处理机器人，其基于固定点枢转并且在光致抗蚀剂涂布器，显影剂和加热/冷却单元之间传送基板，所有这些基板处理机器人围绕机器人聚集。机器人的末端执行器能够垂直和横向移动，从而可以堆叠加热/冷却单元的各个模块。公开了一种用于烘焙和冷却硅衬底的设备和方法。硅基板的烘烤和冷却都是在单个集成的热处理模块中完成的。每个热处理模块包括两个热板组件，冷板组件，两个局部线性传输臂和基于微处理器的模块控制器。两个传送臂都能够在冷和热板组件之间传送基板。盒式磁带输入/输出单元处理包含半导体晶片或将被输送到半导体处理系统或从半导体处理系统退出的其它基板的盒。输入/输出单元包括一个抽屉前端，它在打开时围绕水平轴线旋转90°。

5. 发明授权

US5935768A Method of processing a substrate in a photolithography system utilizing a thermal process module 失效
标题翻译：利用热处理模块在光刻系统中处理衬底的方法
公开(公告)号：US5935768A
公开(公告)日：1999-08-10
申请号：US872345
申请日：1997-06-10
申请人： Michael R. Biche , H. Alexander Anderson
发明人： Michael R. Biche , H. Alexander Anderson
IPC分类号： G03F7/26 , B65G49/07 , H01L21/00 , H01L21/027 , H01L21/677 , H01L21/683 , G03F7/40
CPC分类号： H01L21/67017 , H01L21/67098 , H01L21/6838 , Y10S414/136
摘要： An apparatus and a method for baking and cooling silicon substrates are disclosed. Both baking and cooling of silicon substrates are done in a single integrated thermal process module. Each thermal process module includes two hot plate assemblies, a cool plate assembly, two local linear transfer arms and a micro-processor based module controller. Both transfer arms are capable of transferring substrates among the cool and hot plate assemblies. The module controller ensures that there are no conflicts in use of the transfer arms or in use of the hot and cool plate assemblies and so that a transfer arm is always available when a substrate is finished baking. A central substrate handling robot transports substrates only from and to the cool plate assembly of the thermal process module. Also, the vacuum tubing is routed via a unique pulley arrangement to achieve compact mounting and eliminate loose tubing.
摘要翻译：公开了一种用于烘焙和冷却硅衬底的设备和方法。硅基板的烘烤和冷却都是在单个集成的热处理模块中完成的。每个热处理模块包括两个热板组件，冷板组件，两个局部线性传输臂和基于微处理器的模块控制器。两个传送臂都能够在冷和热板组件之间传送基板。模块控制器确保在使用转移臂或使用热和冷板组件时不存在冲突，并且当基材完成烘烤时总是可以使用传送臂。中央基板处理机器人仅从热处理模块的冷板组件传送基板。此外，真空管通过独特的滑轮装置布置，以实现紧凑的安装并消除松动的管道。

6. 发明授权

US5443348A Cassette input/output unit for semiconductor processing system 失效
标题翻译：半导体处理系统的盒式输入/输出单元
公开(公告)号：US5443348A
公开(公告)日：1995-08-22
申请号：US92842
申请日：1993-07-16
申请人： Michael R. Biche , Alexander Lurye
发明人： Michael R. Biche , Alexander Lurye
IPC分类号： H01L21/027 , H01L21/677 , B65G21/02 , A47B88/00
CPC分类号： H01L21/67775 , Y10S414/14 , Y10T29/53191
摘要： A cassette input/output unit handles cassettes which contain semiconductor wafers or other substrates that are to be delivered to or withdrawn from a semiconductor processing system. The input/output unit includes a drawer front which rotates 90.degree. about a horizontal axis as it is opened. Thus a cassette containing wafers can easily be placed on the drawer front with the wafers oriented vertically, as they are normally carried, and the cassette will be rotated 90.degree. as the drawer is closed, thereby orienting the wafers horizontally for access by a robot inside the photolithography system. The cassette may also be rotated about a vertical axis within the unit, so that several input/output units may be used with a robot which rotates about a fixed axis. A clamping mechanism grips the cassette firmly when it is placed in the unit.
摘要翻译：盒式磁带输入/输出单元处理包含半导体晶片或将被输送到半导体处理系统或从半导体处理系统退出的其它基板的盒。输入/输出单元包括一个抽屉前端，它在打开时围绕水平轴线旋转90°。因此，包含晶片的盒可以容易地放置在抽屉前部，其中晶片通常被定向为垂直方向，因为它们通常被携带，并且当抽屉关闭时盒将被旋转90度，从而水平地定向晶片以使机器人进入光刻系统。盒也可以围绕单元中的垂直轴线旋转，使得可以将几个输入/输出单元与围绕固定轴线旋转的机器人一起使用。夹紧机构在放入本机时将其牢固地夹紧。

7. 发明授权

US5766824A Method and apparatus for curing photoresist 失效
标题翻译：固化光刻胶的方法和设备
公开(公告)号：US5766824A
公开(公告)日：1998-06-16
申请号：US508028
申请日：1995-07-27
申请人： William T. Batchelder , Michael L. Parodi , Michael R. Biche
发明人： William T. Batchelder , Michael L. Parodi , Michael R. Biche
IPC分类号： G03F7/16 , G03F7/30 , H01L21/00 , H01L21/027 , H01L21/687 , G03F7/00
CPC分类号： G03F7/30 , G03F7/168 , G03F7/3021 , H01L21/67109 , H01L21/67167 , H01L21/67184 , H01L21/67225 , H01L21/68735 , H01L21/68742 , H01L21/6875
摘要： A substrate photolithography system includes a substrate handling robot that pivots about a fixed point and transfers substrates between photoresist coater, a developer, and a heating/cooling unit, all of which are clustered about the robot. The end effector of the robot is capable of both vertical and lateral movement so that individual modules of the heating/cooling unit may be stacked. For heating/cooling, the substrate is placed in the heating/cooling unit in close proximity to a hotplate/chillplate and a thermally conductive, non-reactive gas, such as helium, is introduced into the airspace between the substrate and the hotplate/chillplate. The thermally conductive, non-reactive gas, is preheated/precooled before introduction into the airspace between the substrate and the hotplate/chillplate when the gas passes through a bore in the hotplate/chillplate. Additionally, the substrate is automatically aligned in a milled recession in the hotplate surface for future handling.
摘要翻译：基板光刻系统包括基板处理机器人，该基板处理机器人围绕固定点枢转并且在光致抗蚀剂涂布机，显影剂和加热/冷却单元之间传送基板，所有这些都围绕机器人聚集。机器人的末端执行器能够垂直和横向移动，从而可以堆叠加热/冷却单元的各个模块。对于加热/冷却，将基板放置在靠近加热板/冷却板的加热/冷却单元中，并且将导热的非反应性气体（例如氦）引入到基板和加热板/冷却板之间的空间中。导热的非反应性气体在气体通过加热板/冷却板中的孔之前被引入基板和加热板/冷却板之间的空气空间之前被预热/预冷却。此外，基板在加热板表面的铣削凹陷中自动对准，以便将来处理。

8. 发明授权

US5553994A Thermal process module for substrate coat/develop system 失效
标题翻译：衬底涂层/开发系统的热处理模块
公开(公告)号：US5553994A
公开(公告)日：1996-09-10
申请号：US321333
申请日：1994-10-11
申请人： Michael R. Biche , H. Alexander Anderson
发明人： Michael R. Biche , H. Alexander Anderson
IPC分类号： G03F7/26 , B65G49/07 , H01L21/00 , H01L21/027 , H01L21/677 , H01L21/683 , B65G25/00
CPC分类号： H01L21/67017 , H01L21/67098 , H01L21/6838 , Y10S414/136
摘要： In a photolithography system, baking and cooling of semiconductor substrates is done in a thermal process module that uses a unique mechanism including pulleys to route vacuum tubing to a transfer arm. Specifically, the mechanism includes a pair of pulleys and a vacuum tube wrapped around the pulleys. The vacuum tube has a movable portion connected to the transfer arm which is reciprocable between the pair of pulleys. The vacuum tube also has a stationary portion that is connected to the movable portion to form an endless loop. The stationary portion of the vacuum tube is rigidly connected to a vacuum supply line in the housing of the thermal process module.
摘要翻译：在光刻系统中，半导体衬底的烘烤和冷却在热处理模块中进行，该热处理模块使用包括滑轮的独特机构将真空管路路由到传送臂。具体地说，该机构包括一对皮带轮和缠绕在皮带轮上的真空管。真空管具有连接到传送臂的可移动部分，其可在一对滑轮之间往复运动。真空管还具有固定部分，其连接到可动部分以形成无限循环。真空管的固定部分刚性连接到热处理模块壳体中的真空供应管线。

9. 发明授权

US4402623A Apparatus for dynamically adjusting paper tension in a linear manner 失效
标题翻译：用于以线性方式动态调节纸张张力的装置
公开(公告)号：US4402623A
公开(公告)日：1983-09-06
申请号：US330178
申请日：1981-12-14
申请人： Michael R. Biche , Gideon W. Baxter
发明人： Michael R. Biche , Gideon W. Baxter
IPC分类号： B41J15/16 , B41J11/30 , G03B1/30
CPC分类号： B41J15/16
摘要： Apparatus used in conjunction with printer document feed mechanisms for allowing the dynamic adjustment of the feed mechanisms while paper feed is occurring, thus adjusting paper tension. The apparatus has a linear adjustment capability over its total range. In particular, adjusting levers are attached to the feed mechanism support shaft, pinions being attached to each end of the shaft. The pinion teeth mesh with the teeth of racks attached to each side plate of the feed mechanism. As the adjusting levers are moved, the support shaft and pinions rotate. The rotation of the pinion meshing with the rack causes the support shaft (and feed mechanism) to move, changing the distance between the feed mechanism and the printer platen. This distance, and paper tension, vary linearly with the angular position of the levers. The paper tension can be adjusted while the feed mechanism is operative.
摘要翻译：与打印机原稿进给机构一起使用的装置，用于允许在进纸期间动态调节进给机构，从而调节纸张张力。该装置在其总范围内具有线性调节能力。特别地，调节杆附接到进给机构支撑轴，小齿轮附接到轴的每个端部。小齿轮齿与连接到进给机构的每个侧板的齿条的齿啮合。当调节杆移动时，支撑轴和小齿轮旋转。与齿条啮合的小齿轮的转动使得支撑轴（和进给机构）移动，改变进给机构和打印机压板之间的距离。该距离和纸张张力随着杠杆的角位置线性变化。在进给机构工作时可以调节纸张张力。

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