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1. 发明授权

US06818604B2 System and method for cleaning workpieces 失效
标题翻译：用于清洁工件的系统和方法
公开(公告)号：US06818604B2
公开(公告)日：2004-11-16
申请号：US09971332
申请日：2001-10-04
申请人： Ismail Emesh , Yakov Epshteyn , Periya Gopalan , Guangshum Chen , Xingbo Yang
发明人： Ismail Emesh , Yakov Epshteyn , Periya Gopalan , Guangshum Chen , Xingbo Yang
IPC分类号： C11D732
CPC分类号： H01L21/67046 , B08B1/04 , G11B23/505
摘要： The invention relates generally to a system and method for improved cleaning of workpieces and workpiece cleaning tools. More specifically, the invention provides systems and methods for cleaning workpieces and sponges by manipulating the surface charge of one or more sponges by exposing them to various cleaning fluids. In one embodiment, sponges such as PVA sponges, having either positive, negative or neutral charges, are used to clean surfaces of workpieces such as semiconductor wafers. While cleaning a workpiece, a sponge may be exposed to a workpiece cleaning fluid, which may or may not alter the surface charge of the sponge. After cleaning the workpiece, the sponge may be exposed to a sponge cleaning fluid, which may or may not alter the surface charge of the sponge. Manipulating the surface charge of a sponge during and/or after cleaning of a workpiece may enhance cleaning of the workpiece, by attracting oppositely charged particles and/or repelling similarly charged particles from the workpiece surface. Manipulating the surface charge of a sponge may also enhance cleaning of the sponge, by reducing or eliminating the attractive forces between the surface of the sponge and the charged particles attached to it.
摘要翻译：本发明一般涉及用于改进工件和工件清洁工具的清洁的系统和方法。更具体地，本发明提供了通过将它们暴露于各种清洁流体来操纵一种或多种海绵的表面电荷来清洁工件和海绵的系统和方法。在一个实施例中，使用具有正，负或中性电荷的诸如PVA海绵的海绵来清洁诸如半导体晶片的工件的表面。在清洁工件时，海绵可能会暴露于工件清洁液中，这可能会影响或不会改变海绵的表面电荷。在清洁工件之后，海绵可能暴露于海绵清洗液中，这可能会改变或不会改变海绵的表面电荷。在清洁工件期间和/或之后操作海绵的表面电荷可以通过从工件表面吸引带相反电荷的颗粒和/或排斥相似带电的颗粒来增强工件的清洁。操纵海绵的表面电荷还可以通过减少或消除海绵表面和附着在其上的带电粒子之间的吸引力来增强海绵的清洁。

2. 发明授权

US06461441B1 Method of removing debris from cleaning pads in work piece cleaning equipment 有权
标题翻译：从工件清洗设备清洗垫中清除碎屑的方法
公开(公告)号：US06461441B1
公开(公告)日：2002-10-08
申请号：US09851866
申请日：2001-05-09
申请人： Yakov Epshteyn , Frank Krupa , Ellis Harvey
发明人： Yakov Epshteyn , Frank Krupa , Ellis Harvey
IPC分类号： B08B100
CPC分类号： H01L21/67046 , Y10S134/902
摘要： The cleaning pads (102, 104) that are used to clean work pieces (200), such as semiconductor wafers, are cyclically compressed against one another and rinsed with a rinsing fluid. By cyclically compressing the cleaning pads (102, 104) together and rinsing them, the debris that the cleaning pads remove from the work pieces (200) and that becomes embedded in, and adhered to, the cleaning pads (102, 104) is subsequently removed therefrom.
摘要翻译：用于清洁诸如半导体晶片的工件（200）的清洁垫（102,104）彼此循环地压缩并用冲洗流体冲洗。随后将清洁垫（102,104）周期性地压缩在一起并将其清洗，随后将清洁垫从工件（200）上移除并嵌入清洁垫（102,104）中并粘附到清洁垫（102,104）上的碎屑从中移除。

3. 发明授权

US08507090B2 Spherical molybdenum disulfide powders, molybdenum disulfide coatings, and methods for producing same 有权
标题翻译：球形二硫化钼粉末，二硫化钼涂层及其制造方法
公开(公告)号：US08507090B2
公开(公告)日：2013-08-13
申请号：US13095161
申请日：2011-04-27
申请人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
发明人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
IPC分类号： B05D1/08 , B05D1/10 , B05D1/12
CPC分类号： C10M125/22 , C01G39/06 , C01P2004/03 , C01P2004/32 , C01P2006/10 , C01P2006/11 , C01P2006/22 , C01P2006/80 , C04B35/58092 , C04B35/6263 , C04B35/62655 , C04B35/62695 , C04B35/62802 , C04B35/63416 , C04B2235/3891 , C04B2235/528 , C04B2235/5292 , C04B2235/5427 , C04B2235/5436 , C04B2235/5472 , C04B2235/72 , C04B2235/721 , C08K7/18 , C08K2003/3009 , C09D5/028 , C09D7/70 , C23C4/04 , C23C4/06 , C23C24/04 , F16C33/1095 , Y10T428/2982
摘要： Molybdenum disulfide powders include substantially spherically-shaped particles of molybdenum disulfide that are formed from agglomerations of generally flake-like sub-particles. The molybdenum disulfide powders are flowable and exhibit uniform densities. Methods for producing a molybdenum disulfide powder may include the steps of: Providing a supply of molybdenum disulfide precursor material; providing a supply of a liquid; providing a supply of a binder; combining the molybdenum disulfide precursor material with the liquid and the binder to form a slurry; feeding the slurry into a stream of hot gas; and recovering the molybdenum disulfide powder, the molybdenum disulfide powder including substantially spherically-shaped particles of molybdenum disulfide formed from agglomerations of generally flake-like sub-particles.
摘要翻译：二硫化钼粉末包括由通常为片状亚颗粒的聚集形成的基本上球形的二硫化钼颗粒。二硫化钼粉末是可流动的并且表现出均匀的密度。制备二硫化钼粉末的方法可包括以下步骤：提供二硫化钼前体材料; 提供液体供应; 提供粘合剂供应; 将二硫化钼前体材料与液体和粘合剂组合以形成浆料; 将浆料送入热气流中; 并回收二硫化钼粉末，二硫化钼粉末包括由通常为片状亚颗粒的聚集形成的基本上球形的二硫化钼颗粒。

4. 发明授权

US08038760B1 Molybdenum/molybdenum disulfide metal articles and methods for producing same 有权
标题翻译：钼/二硫化钼金属制品及其制造方法
公开(公告)号：US08038760B1
公开(公告)日：2011-10-18
申请号：US12833458
申请日：2010-07-09
申请人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
发明人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
IPC分类号： B22F1/00 , B22F3/00
CPC分类号： C22C32/0089 , B22F2998/00 , Y10T428/12181 , B22F2303/01 , B22F2301/20
摘要： A method for producing a metal article according to one embodiment may involve the steps of: Providing a composite metal powder including a substantially homogeneous dispersion of molybdenum and molybdenum disulfide sub-particles that are fused together to form individual particles of the composite metal powder; and compressing the molybdenum/molybdenum disulfide composite metal powder under sufficient pressure to cause the mixture to behave as a nearly solid mass.
摘要翻译：根据一个实施方案的金属制品的制造方法可以包括以下步骤：提供包含熔融在一起以形成复合金属粉末的单个颗粒的钼和二硫化钼亚颗粒的基本上均匀的分散体的复合金属粉末; 并在足够的压力下压制钼/二硫化钼复合金属粉末，使混合物表现为接近固体的质量。

5. 发明授权

US06875087B2 Method for chemical mechanical planarization (CMP) and chemical mechanical cleaning (CMC) of a work piece 失效
标题翻译：工件的化学机械平面化（CMP）和化学机械清洁（CMC）的方法
公开(公告)号：US06875087B2
公开(公告)日：2005-04-05
申请号：US10438030
申请日：2003-05-13
申请人： Marie Mitchel , John L. Shartel, II , Yakov Epshteyn
发明人： Marie Mitchel , John L. Shartel, II , Yakov Epshteyn
IPC分类号： B08B1/04 , B24B37/04 , B24B1/00
CPC分类号： B08B1/04 , B24B37/042
摘要： A method is provided for planarizing/polishing and subsequently in situ cleaning a surface of a work piece such as a semiconductor wafer. The method includes the steps of planarizing/polishing the surface of a work piece by subjecting a work piece surface to a chemical mechanical planarization/polishing (CMP) process on a chemical mechanical planarization/polishing platen such that the planarization/polishing process leaves the surface of the work piece hydrophobic. The planarization/polishing process is followed by a chemical mechanical cleaning (CMC) process in which the planarized/polished surface of the work piece is subjected to the cleaning process on the same chemical mechanical planarization/polishing platen such that the cleaning process leaves the surface of the work piece hydrophilic.
摘要翻译：提供了一种用于平面化/抛光和随后原位清洁诸如半导体晶片的工件的表面的方法。该方法包括以下步骤：通过在化学机械平面化/抛光台板上对工件表面进行化学机械平面化/抛光（CMP）工艺来平坦化/抛光工件的表面，使得平面化/抛光工艺离开表面的工件疏水。平面化/抛光过程之后是化学机械清洁（CMC）工艺，其中工件的平面化/抛光表面在相同的化学机械平面化/抛光台板上进行清洁处理，使得清洁过程离开表面的工件亲水。

6. 发明授权

US06502271B1 Method and apparatus for cleaning workpieces with uniform relative velocity 有权
标题翻译：用于以均匀相对速度清洁工件的方法和设备
公开(公告)号：US06502271B1
公开(公告)日：2003-01-07
申请号：US09492020
申请日：2000-01-26
申请人： Yakov Epshteyn
发明人： Yakov Epshteyn
IPC分类号： A46B1302
CPC分类号： H01L21/67046 , B08B1/04
摘要： A method and apparatus for cleaning a wafer in a dual brush cleaning system is disclosed. Two brushes, preferably made of PVA and wetted by cleaning fluids, are positioned opposite one another and spaced apart enough to allow a portion of a wafer to be inserted between their working surfaces and make frictional engagement with them. The top brush is rotated at a first speed and the bottom brush is rotated at a second faster speed sufficient for the freely rotating wafer to rotate at the same speed and in the same direction as the top brush. The bottom brush may have raised areas on its surface to assist in efficiently gripping and rotating the wafer. A common rotation speed and direction causes a uniform relative velocity between the top brush and the wafer that results in an improved cleaning operation.
摘要翻译：公开了一种在双刷清洁系统中清洁晶片的方法和装置。优选由PVA制成并用清洁液润湿的两个刷子彼此相对设置并间隔开，以允许晶片的一部分插入在其工作表面之间并与它们摩擦接合。顶部刷子以第一速度旋转，并且底部刷子以足以使自由旋转的晶片以与顶部刷子相同的速度和相同的方向旋转的第二更快的速度旋转。底部刷可能在其表面上具有凸起区域以帮助有效地夹紧和旋转晶片。常见的旋转速度和方向导致顶刷和晶片之间的均匀的相对速度导致改进的清洁操作。

7. 发明授权

US08834785B2 Methods for producing molybdenum/molybdenum disulfide metal articles 有权
标题翻译：生产钼/钼二硫化物金属制品的方法
公开(公告)号：US08834785B2
公开(公告)日：2014-09-16
申请号：US13180217
申请日：2011-07-11
申请人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
发明人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
IPC分类号： C22C32/00 , B22F1/00 , B22F3/02 , B22F3/12
CPC分类号： C22C32/0089 , B22F2998/00 , Y10T428/12181 , B22F2303/01 , B22F2301/20
摘要： A method for producing a metal article according to one embodiment may involve the steps of: Providing a composite metal powder including a substantially homogeneous dispersion of molybdenum and molybdenum disulfide sub-particles that are fused together to form individual particles of the composite metal powder; and compressing the molybdenum/molybdenum disulfide composite metal powder under sufficient pressure to cause the mixture to behave as a nearly solid mass.
摘要翻译：根据一个实施方案的金属制品的制造方法可以包括以下步骤：提供包含熔融在一起以形成复合金属粉末的单个颗粒的钼和二硫化钼亚颗粒的基本上均匀的分散体的复合金属粉末; 并在足够的压力下压制钼/二硫化钼复合金属粉末，使混合物表现为接近固体的质量。

8. 发明授权

US08389129B2 Low-friction surface coatings and methods for producing same 有权
公开(公告)号：US08389129B2
公开(公告)日：2013-03-05
申请号：US12833507
申请日：2010-07-09
申请人： Carl V. Cox , Matthew C. Shaw , Yakov Epshteyn
发明人： Carl V. Cox , Matthew C. Shaw , Yakov Epshteyn
IPC分类号： B32B15/01 , C23C4/06 , C23C4/12
CPC分类号： B32B15/16 , B05D5/00 , B22F7/08 , B22F9/026 , B32B15/01 , C10M125/22 , C10M2201/066 , C10M2209/04 , C10N2210/06 , C10N2230/06 , C10N2250/121 , C22C32/0089 , C23C4/08 , C23C4/10 , C23C4/129 , C23C4/134 , C23C24/04 , F16C2202/54 , Y10T428/12056 , Y10T428/12063 , Y10T428/12146 , Y10T428/12174 , Y10T428/12826 , Y10T428/24413 , Y10T428/256 , Y10T428/26 , Y10T428/31678
摘要： A coated article system includes a substrate and a surface coating on the substrate. The surface coating is formed by depositing individual particles of a composite metal powder with sufficient energy to cause the composite metal powder to bond with the substrate and form the surface coating. The composite metal powder includes a substantially homogeneous dispersion of molybdenum and molybdenum disulfide sub-particles that are fused together to form the individual particles of the composite metal powder.

9. 发明申请

US20120272869A1 SPHERICAL MOLYBDENUM DISULFIDE POWDERS, MOLYBDENUM DISULFIDE COATINGS, AND METHODS FOR PRODUCING SAME 有权
标题翻译：球形多晶硅粉末，莫来石分散涂料及其制造方法
公开(公告)号：US20120272869A1
公开(公告)日：2012-11-01
申请号：US13095161
申请日：2011-04-27
申请人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
发明人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
IPC分类号： C09D7/00 , C23C4/00 , C01G39/06 , B05D1/12 , B32B5/00 , C08K3/10
CPC分类号： C10M125/22 , C01G39/06 , C01P2004/03 , C01P2004/32 , C01P2006/10 , C01P2006/11 , C01P2006/22 , C01P2006/80 , C04B35/58092 , C04B35/6263 , C04B35/62655 , C04B35/62695 , C04B35/62802 , C04B35/63416 , C04B2235/3891 , C04B2235/528 , C04B2235/5292 , C04B2235/5427 , C04B2235/5436 , C04B2235/5472 , C04B2235/72 , C04B2235/721 , C08K7/18 , C08K2003/3009 , C09D5/028 , C09D7/70 , C23C4/04 , C23C4/06 , C23C24/04 , F16C33/1095 , Y10T428/2982
摘要： Molybdenum disulfide powders include substantially spherically-shaped particles of molybdenum disulfide that are formed from agglomerations of generally flake-like sub-particles. The molybdenum disulfide powders are flowable and exhibit uniform densities. Methods for producing a molybdenum disulfide powder may include the steps of: Providing a supply of molybdenum disulfide precursor material; providing a supply of a liquid; providing a supply of a binder; combining the molybdenum disulfide precursor material with the liquid and the binder to form a slurry; feeding the slurry into a stream of hot gas; and recovering the molybdenum disulfide powder, the molybdenum disulfide powder including substantially spherically-shaped particles of molybdenum disulfide formed from agglomerations of generally flake-like sub-particles.
摘要翻译：二硫化钼粉末包括由通常为片状亚颗粒的聚集形成的基本上球形的二硫化钼颗粒。二硫化钼粉末是可流动的并且表现出均匀的密度。制备二硫化钼粉末的方法可包括以下步骤：提供二硫化钼前体材料; 提供液体供应; 提供粘合剂供应; 将二硫化钼前体材料与液体和粘合剂组合以形成浆料; 将浆料送入热气流中; 并回收二硫化钼粉末，二硫化钼粉末包括由通常为片状亚颗粒的聚集形成的基本上球形的二硫化钼颗粒。

10. 发明申请

US20120009080A1 METHODS FOR PRODUCING MOLYBDENUM/MOLYBDENUM DISULFIDE METAL ARTICLES 有权
标题翻译：生产莫氏/钼酸盐金属制品的方法
公开(公告)号：US20120009080A1
公开(公告)日：2012-01-12
申请号：US13180217
申请日：2011-07-11
申请人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
发明人： Matthew C. Shaw , Carl V. Cox , Yakov Epshteyn
IPC分类号： B22F3/12 , B05D1/12 , B22F9/00 , B22F1/00 , B22F3/02 , B22F3/15
CPC分类号： C22C32/0089 , B22F2998/00 , Y10T428/12181 , B22F2303/01 , B22F2301/20
摘要： A method for producing a metal article according to one embodiment may involve the steps of: Providing a composite metal powder including a substantially homogeneous dispersion of molybdenum and molybdenum disulfide sub-particles that are fused together to form individual particles of the composite metal powder; and compressing the molybdenum/molybdenum disulfide composite metal powder under sufficient pressure to cause the mixture to behave as a nearly solid mass.
摘要翻译：根据一个实施方案的金属制品的制造方法可以包括以下步骤：提供包含熔融在一起以形成复合金属粉末的单个颗粒的钼和二硫化钼亚颗粒的基本上均匀的分散体的复合金属粉末; 并在足够的压力下压制钼/二硫化钼复合金属粉末，使混合物表现为接近固体的质量。

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