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    • 3. 发明授权
    • Two-core optical fiber magnetic field sensor
    • 双芯光纤磁场传感器
    • US09285435B2
    • 2016-03-15
    • US13805031
    • 2011-06-23
    • Yoshihiro KonnoMasaru Sasaki
    • Yoshihiro KonnoMasaru Sasaki
    • G01R33/02G01R33/032
    • G01R33/032
    • A two-core optical fiber magnetic field sensor is configured from at least a light incidence/emission unit; a lens; a magnetic garnet; and a reflector, wherein the lens and the magnetic garnet are disposed between the light incidence/emission end of the light incidence/emission unit and the reflector; a light beam is emitted from one optical fiber; the light beam is reflected by the reflector after being transmitted through the lens and the magnetic garnet; the light beam is transmitted again through the magnetic garnet and the lens after the reflection; and incident on the other optical fiber, the light beam is emitted again from the other optical fiber, and reflected by the reflector after being transmitted through the lens and the magnetic garnet; and the light beam is transmitted again through the magnetic garnet and the lens after the reflection and incident again on the one optical fiber.
    • 两芯光纤磁场传感器由至少一个入射/发射单元构成; 镜头 磁石榴石 以及反射器,其中所述透镜和所述磁性石榴石设置在所述光入射/发射单元的光入射/发射端与所述反射器之间; 从一根光纤射出光束; 光束在透射透镜和磁性石榴石后被反射器反射; 反射后光束再次通过磁石榴石和透镜传播; 入射到另一根光纤上时,光束再次从另一根光纤发射,并被反射器透射后通过透镜和磁性石榴石反射; 并且在反射之后光束再次通过磁性石榴石和透镜再次传输到一根光纤上。
    • 5. 发明授权
    • Etching method and device
    • 蚀刻方法和装置
    • US09218983B2
    • 2015-12-22
    • US14131713
    • 2012-07-12
    • Takashi DokanMasaru SasakiHikaru Kamata
    • Takashi DokanMasaru SasakiHikaru Kamata
    • H01L21/302H01L21/3065H01L21/02H01L21/311H01L21/3213H01L21/67H01L21/033
    • H01L21/3065H01J2237/334H01L21/0206H01L21/0337H01L21/31116H01L21/31144H01L21/32137H01L21/67069
    • The etching method of the present invention comprises first and second etching steps (S1, S3) having different types of films to be etched and different types of process gases. During a transition from the first etching step (S1) to the second etching step (S3), a first switching process step (S2) is performed in which the process container is filled with a cleaning gas and the cleaning gas is turned into a plasma to remove the reaction product deposited in the process container in the first etching step. During a transition from the second etching step (S3) to the first etching step (S1), a second switching process step (S4) is performed in which the process container is filled with a cleaning gas and the cleaning gas is turned into a plasma to remove the reaction product deposited in the process container in the second etching step.
    • 本发明的蚀刻方法包括具有不同类型的被蚀刻膜和不同类型的工艺气体的第一和第二蚀刻步骤(S1,S3)。 在从第一蚀刻步骤(S1)到第二蚀刻步骤(S3)的转变期间,执行第一切换处理步骤(S2),其中处理容器填充有清洁气体,并且清洁气体变成等离子体 以在第一蚀刻步骤中除去沉积在处理容器中的反应产物。 在从第二蚀刻步骤(S3)到第一蚀刻步骤(S1)的转变期间,执行第二切换处理步骤(S4),其中处理容器填充有清洁气体,并且清洁气体变成等离子体 以在第二蚀刻步骤中除去沉积在处理容器中的反应产物。
    • 6. 发明授权
    • Electric current measuring apparatus
    • 电流测量仪
    • US08957667B2
    • 2015-02-17
    • US13321396
    • 2010-05-18
    • Yoshihiro KonnoMasaru Sasaki
    • Yoshihiro KonnoMasaru Sasaki
    • G01R19/00G01R15/24G01R19/32
    • G01R15/246G01R15/245G01R19/32
    • An electric measuring apparatus is constructed in such a way as to include a signal processing circuit equipped with at least a polarized light separating unit, Faraday rotators, a light source, a photoelectric conversion element, and optical fibers for a sensor. The optical fibers for the sensor are placed around the periphery of an electrical conductor through which electric current to be measured flows. Furthermore, the rotation angle of each Faraday rotator at the time when the magnetism of each Faraday rotator is saturated is set to 22.5°+α° at a temperature of 23° C., thereby changing the rotation angle of each Faraday rotator by α° from 22.5°.
    • 电测量装置的构成包括:至少配备有偏振光分离单元,法拉第旋转器,光源,光电转换元件和用于传感器的光纤的信号处理电路。 用于传感器的光纤被放置在要测量的电流流过的电导体的周围。 此外,每个法拉第旋转器的磁性饱和时的每个法拉第旋转器的旋转角度在23℃的温度下设定为22.5°+α°,从而将每个法拉第旋转器的旋转角度改变α° 从22.5°。
    • 9. 发明申请
    • OPTICAL FIBRE BIREFRINGENCE COMPENSATION MIRROR AND CURRENT SENSOR
    • 光纤激光补偿镜和电流传感器
    • US20130069628A1
    • 2013-03-21
    • US13699772
    • 2011-05-25
    • Yoshihiro KonnoMasaru Sasaki
    • Yoshihiro KonnoMasaru Sasaki
    • G01R19/00G02B6/27
    • G01R19/00G01R15/246G02B6/274G02B27/283G02B27/288
    • Disclosed is an optical fibre birefringence compensation mirror. Also disclosed is a current sensor wherein vibration resistance has been increased due to the optical connection of the optical fibre birefringence compensation mirror. The optical fibre birefringence compensation mirror includes: an optical fibre, a birefringence element, a lens, a magnet, a Faraday rotator, and a mirror. From the light incidence/emission end surface of the optical fibre, the birefringence element, Faraday rotator, and mirror are arranged in said order. Light comes in from the optical fibre, and is separated into two linearly polarised lights by the birefringence element. The polarisation planes of the two linearly polarised lights are rotated by the Faraday rotator, and the two linearly polarised lights are point-symmetrically reflected at one point by the mirror, then again rotated by the Faraday rotator, then re-combined into one light by the birefringence element and made to enter the optical fibre.
    • 公开了一种光纤双折射补偿镜。 还公开了一种电流传感器,其中由于光纤双折射补偿反射镜的光学连接而使振动阻力增加。 光纤双折射补偿镜包括:光纤,双折射元件,透镜,磁体,法拉第旋转器和反射镜。 从光纤的光入射/发射端面,双折射元件,法拉第旋转器和反射镜按照顺序排列。 光从光纤入射,并通过双折射元件分离为两个线偏振光。 两个直线偏振光的偏振面由法拉第旋转器旋转,两个直线偏振光在一个点上被镜子点对称地反射,然后由法拉第旋转器再次旋转,然后通过 双折射元件并使其进入光纤。