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    • 3. 发明申请
    • Method and apparatus for assembling a conformal chip carrier to a flip chip
    • 用于将保形芯片载体组装到倒装芯片的方法和装置
    • US20020096746A1
    • 2002-07-25
    • US10037536
    • 2002-01-04
    • INTERNATIONAL BUSINESS MACHINES CORPORATION
    • David N. CokelyThomas M. CulnaneLisa J. JimarezMiguel A. JimarezLi LiDonald I. Mead
    • H01L023/495
    • H01L24/81H01L21/6835H01L24/75H01L2224/75H01L2224/75755H01L2224/7598H01L2224/75983H01L2224/81801H01L2924/01005H01L2924/01006H01L2924/01033H01L2924/014
    • Fixtures for attaching a semiconductor chip to a substrate. The semiconductor chip has an array of joining material bumps, such as C4 solder balls. The substrate has an array of conductive pads corresponding to the array of joining material bumps. In a first embodiment the fixture has a body having a first cavity for containing the semiconductor chip and a second cavity in communication with the first cavity for containing the substrate. Whereby the substrate is placed over the semiconductor chip with the conductive pads opposing and in contact with the joining material bumps, such that during reflow of the joining material bumps, the weight of the substrate acts against the joining material bumps and aids in the attachment of the semiconductor chip to the substrate to form electrical connections therebetween. In a second embodiment the fixture has a first plate having a first opening for disposal of the semiconductor chip therein, a second plate stacked below the first plate and having a thickness substantially equal to the thickness of the substrate, the second plate further having a second opening opposing the first opening for disposal of the substrate therein, and a third plate stacked below the second plate such that the substrate is flattened in the second opening under the weight of the first plate thereby aiding in the attachment of the joining material bumps to their corresponding conductive pads during solder reflow to form electrical connections therebetween. Methods for use of the fixtures is also provided.
    • 用于将半导体芯片附接到基板的夹具。 半导体芯片具有连接材料凸块的阵列,例如C4焊球。 衬底具有对应于接合材料凸块阵列的导电焊盘阵列。 在第一实施例中,固定装置具有主体,该主体具有用于容纳半导体芯片的第一空腔和与第一空腔连通以容纳基板的第二空腔。 由此将衬底放置在半导体芯片上,其中导电焊盘与接合材料凸块相对并接触,使得在接合材料凸块的回流期间,衬底的重量抵抗接合材料凸起并且有助于附接 半导体芯片到基板以在它们之间形成电连接。 在第二实施例中,固定装置具有第一板,其具有用于在其中处理半导体芯片的第一开口,堆叠在第一板下方并且具有基本上等于衬底厚度的厚度的第二板,第二板还具有第二板 与第一开口相对地打开以处理其中的基板;以及第三板,堆叠在第二板下方,使得基板在第一板的重量下在第二开口中变平,由此辅助将接合材料凸块附接到它们 焊料回流期间相应的导电焊盘在其间形成电连接。 还提供了使用固定装置的方法。