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    • 8. 发明申请
    • THROUGH-HOLE FORMING METHOD, INKJET HEAD, AND SILICON SUBSTRATE
    • 通孔形成方法,喷头和硅基板
    • US20090073228A1
    • 2009-03-19
    • US12197499
    • 2008-08-25
    • Keiichi SasakiYukihiro Hayakawa
    • Keiichi SasakiYukihiro Hayakawa
    • B41J2/015H01L21/00H01L23/58
    • H01L21/308B41J2/1603B41J2/1629B41J2/1631B41J2/1642B41J2202/13H01L29/06
    • A through-hole forming method includes steps of forming a first impurity region (102a) around a region where a through-hole is to be formed in the first surface of a silicon substrate (101), the first impurity region (102) being higher in impurity concentration than the silicon substrate (101), forming a second impurity region (102b) at a position adjacent to the first impurity region (102a) in the depth direction of the silicon substrate (101), the second impurity region (102b) being higher in impurity concentration than the first impurity region (102a), forming an etch stop layer (103) on the first surface, forming an etch mask layer (104) having an opening on the second surface of the silicon substrate (101) opposite to the first surface, and etching the silicon substrate (101) until at least the etch stop layer (103) is exposed via the opening.
    • 通孔形成方法包括以下步骤:在硅衬底(101)的第一表面中形成在要形成通孔的区域周围的第一杂质区域(102a),第一杂质区域(102)更高 在所述硅衬底(101)的深度方向上与所述第一杂质区(102a)相邻的位置形成第二杂质区(102b),所述第二杂质区(102b) 杂质浓度高于第一杂质区(102a),在第一表面上形成蚀刻停止层(103),形成在硅衬底(101)的第二表面上具有开口的蚀刻掩模层(104) 并且蚀刻硅衬底(101),直到至少蚀刻停止层(103)经由开口露出。
    • 10. 发明授权
    • Substrate unit for liquid discharging head, method for producing the same, liquid discharging head, cartridge, and image forming apparatus
    • 液体排放头用基板单元,其制造方法,排液头,筒和图像形成装置
    • US06467884B1
    • 2002-10-22
    • US09643931
    • 2000-08-23
    • Fumio MurookaKei FujitaYukihiro HayakawaMakoto Terui
    • Fumio MurookaKei FujitaYukihiro HayakawaMakoto Terui
    • B41J205
    • B41J2/14129B41J2/1601B41J2/1623B41J2/1628B41J2/1629B41J2/1631H05K3/28
    • To provide a substrate unit for liquid discharging head, a method for producing the same, a liquid discharging head, a cartridge, and an image forming apparatus. The substrate unit for liquid discharging head is for a head which gives thermal energy to the liquid for film boiling, to discharge droplets of the liquid from its discharge port. The substrate unit includes an electrothermal transducer provided on the substrate surface to generate thermal energy, a pair of electrode wiring circuits provided on the substrate surface and connected to the transducer, first protective layer formed over the substantially entire surface of the substrate to cover a pair of the electrode wiring circuits and transducer, and second protective layer formed over the first protective layer to cover the transducer and the area where the transducer is connected to the wiring circuit, in which a pair of the electrode wiring circuits are 1800 to 2400 Å thick, and the portion of the first protective layer covered by the second protective layer is 2600 to 3400 Å thick and thicker than the portion of the first protective layer not covered by the second protective layer.
    • 提供一种用于排液头的基板单元,其制造方法,液体排放头,盒和图像形成装置。 用于喷液头的基板单元用于向液体进行薄膜沸腾的热能,以从其排出口排出液体的液滴。 基板单元包括设置在基板表面上以产生热能的电热换能器,设置在基板表面上并连接到换能器的一对电极布线电路,形成在基板的基本整个表面上以覆盖一对的第一保护层 的电极布线电路和传感器;以及第二保护层,形成在第一保护层上以覆盖换能器和传感器连接到布线电路的区域,其中一对电极布线电路的厚度为1800至2400埃 并且由第二保护层覆盖的第一保护层的部分比未被第二保护层覆盖的第一保护层的部分厚2600至3400。