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    • 1. 发明授权
    • Nitride-based semiconductor light emitting device and manufacturing method therefor
    • 氮化物系半导体发光元件及其制造方法
    • US06442184B1
    • 2002-08-27
    • US09459471
    • 1999-12-13
    • Hiroyuki OtaAtsushi WatanabeToshiyuki Tanaka
    • Hiroyuki OtaAtsushi WatanabeToshiyuki Tanaka
    • H01S500
    • H01L33/007H01L33/22H01S5/0213H01S5/3202H01S5/32341
    • A semiconductor light emitting device having multi-layer structure of group-3 nitride-based semiconductors is disclosed. The light emitting device has lower density of threading dislocation extending from a boundary of a crystal substrate through the multi-layer structure, thereby obtaining good luminescence characteristics. The nitride semiconductor light emitting device has the multi-layer structure. The multi-layer structure comprises a first crystal layer containing substantially pyramidal crystal grains, each of grains has a crystal face non-parallel to a surface of the substrate, and the pyramidal crystal grains are distributed at random like islands. The structure further comprises a second crystal layer formed on the first crystal layer with a compound having a different lattice constant from that of the first crystal layer. The second crystal layer smoothes a surface of the first crystal layer parallel to the surface of the substrate.
    • 公开了一种具有III族氮化物基半导体的多层结构的半导体发光器件。 发光器件具有从晶体衬底的边界通过多层结构延伸的穿透位错的较低密度,从而获得良好的发光特性。 氮化物半导体发光器件具有多层结构。 多层结构包括含有大致锥形晶粒的第一晶体层,每个晶粒具有不平行于衬底表面的晶面,并且金字塔形晶粒以岛状随机分布。 该结构还包括在第一晶体层上形成具有与第一晶体层不同的晶格常数的化合物的第二晶体层。 第二晶体层使平行于衬底表面的第一晶体层的表面平滑。
    • 5. 发明授权
    • Group III nitride semiconductor light-emitting device having anticracking feature
    • III族氮化物半导体发光器件具有抗撬性能
    • US06259122B1
    • 2001-07-10
    • US09368535
    • 1999-08-04
    • Hiroyuki OtaToshiyuki TanakaAtsushi Watanabe
    • Hiroyuki OtaToshiyuki TanakaAtsushi Watanabe
    • H01L3300
    • H01L33/32H01S5/32341
    • In a semiconductor light-emitting device having a multilayered structure which consists essentially of layers of Group III nitride semiconductors (AlxGa1−x) 1−yInyN (0≦x≦1, 0≦y≦1) which are different from each other in chemical composition ratio, generation of cracks at an interface propagating from an interface between adjacent layers is prevented. Two adjacent layers within the multilayered structure, which include a lower layer having a lattice constant larger than a lattice constant of an upper layer of the two adjacent layers, have a portion close to the interface of the two adjacent layers doped such that an element different from the Group III nitride semiconductors is added in a higher concentration, i.e. in a higher distribution density than in other portions thereof.
    • 在具有多层结构的半导体发光器件中,其基本上由III族氮化物半导体(Al x Ga 1-x)1-y In y N(0 <= x <= 1,0 <= y <= 1) 彼此之间的化学组成比,防止了从相邻层之间的界面传播的界面产生裂纹。 多层结构中的两个相邻层,其包括具有大于两个相邻层的上层的晶格常数的晶格常数的下层,具有靠近所述两个相邻层的界面的部分,所述界面被掺杂,使得元件不同 从III族氮化物半导体中加入更高的浓度,即比其它部分更高的分布密度。