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1. 发明授权

US5317153A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US5317153A
公开(公告)日：1994-05-31
申请号：US922505
申请日：1992-07-31
申请人： Hiroyuki Matsushiro , Tetsuji Onuki , Masaya Miyazaki , Yasushi Fukutomi
发明人： Hiroyuki Matsushiro , Tetsuji Onuki , Masaya Miyazaki , Yasushi Fukutomi
IPC分类号： G01Q20/02 , G01Q30/02 , G01Q30/18 , G01Q60/18 , G02B21/00 , H01J37/02 , H01J37/26
CPC分类号： G01Q30/18 , B82Y35/00 , H01J37/02 , Y10S977/86 , Y10S977/869 , Y10S977/871
摘要： A scanning probe microscope, capable of achieving a resolving power of atomic level, is provided with a probe microscope unit 5, 6, 17 for measuring a fine constitution of sample surface with a probe 5, and with an optical microscope unit 8, 10-16 for observing an optical image of sample, in which the probe microscope unit is encased in a box 9 shielded against external noises and electromagnetic waves. The box has a shape of a cone such as triangular cone, which is placed on a triangular surface plate.
摘要翻译：具有能够实现原子水平分辨能力的扫描探针显微镜设置有用于利用探针5测量样品表面的微细结构的探针显微镜单元5,6,17，并且用光学显微镜单元8,10， 16，用于观察样品的光学图像，其中探针显微镜单元被封装在屏蔽外部噪声和电磁波的箱体9中。该盒具有锥形的形状，例如三角形圆锥体，其被放置在三角形表面板上。

2. 发明授权

US5508517A Scanning probe type microscope apparatus 失效
标题翻译：扫描式显微镜装置
公开(公告)号：US5508517A
公开(公告)日：1996-04-16
申请号：US461142
申请日：1995-06-05
申请人： Tetsuji Onuki , Masatoshi Suzuki , Toru Fujii , Hiroyuki Matsushiro , Hideaki Ohkubo
发明人： Tetsuji Onuki , Masatoshi Suzuki , Toru Fujii , Hiroyuki Matsushiro , Hideaki Ohkubo
IPC分类号： G01Q20/02 , G01N27/00 , G01Q30/02 , G01Q30/18 , G01Q60/00 , G01Q70/02 , G02B21/00 , H01J37/26
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , Y10S977/869
摘要： A high resolution scanning probe type microscope capable for simultaneous observation of the optical images of a sample and the probe tip. The microscope has a construction in which the probe and the optical microscope are supported with separate supporting members and the probe is disposed inside the visual field of the optical microscope. The supporting members of the probe and the optical microscope are installed on a vibration-proof table, and the supporting member for the probe has a double-end-supported type beam construction.
摘要翻译：一种高分辨率扫描探针型显微镜，能够同时观察样品的光学图像和探针尖端。显微镜具有其中探针和光学显微镜由分开的支撑构件支撑的结构，并且探针设置在光学显微镜的视野内。探头的支撑构件和光学显微镜安装在防振台上，用于探针的支撑构件具有双端支撑梁结构。

3. 发明授权

US5360977A Compound type microscope 失效
标题翻译：复合型显微镜
公开(公告)号：US5360977A
公开(公告)日：1994-11-01
申请号：US921129
申请日：1992-07-29
申请人： Tetsuji Onuki , Masatoshi Suzuki , Hiroyuki Matsushiro
发明人： Tetsuji Onuki , Masatoshi Suzuki , Hiroyuki Matsushiro
IPC分类号： G01B21/30 , G01B7/34 , G01N37/00 , G01Q20/02 , G01Q30/02 , G01Q60/24 , G02B21/00 , H01J37/28 , H01J37/26
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/025 , G01Q60/04 , G01Q60/38 , G02B21/00 , B82Y20/00 , Y10S977/869
摘要： A compound type microscope is provided which can observe the measurement sample of an atomic force microscope (AFM) by means of an optical microscope. This compound type microscope is comprised of an optical microscope having an objective and an observation optical system, a cantilever having a reflecting surface and detecting an atomic force, an irradiating optical system for applying a spotlight to the cantilver, a detector for detecting the displacement of reflected light caused by the displacement of the cantilever, and a sample stage for placing a sample thereon. The arrangement can be designed to accommodate the use of a scanning tunnel type microscope (STM) interchangeably with the AFM so that the sample can be measured by the STM instead of by the AFM. To this end, the probe of the STM can be detachably mountable coaxially with respect to the objective of the optical microscope, whereby the probe of the STM and the cantilever of the AFM can be selectively disposed below the objective.
摘要翻译：提供一种复合型显微镜，可以通过光学显微镜观察原子力显微镜（AFM）的测量样品。该复合型显微镜由具有物镜和观察光学系统的光学显微镜，具有反射面的悬臂和检测原子力组成，用于将光束施加到悬臂的照射光学系统，用于检测位移的检测器由悬臂的位移引起的反射光和用于在其上放置样品的样品台。可以将该装置设计成可以与AFM互换地使用扫描隧道型显微镜（STM），以便可以通过STM而不是AFM来测量样品。为此，STM的探针可以相对于光学显微镜的目的可同轴地可拆卸地安装，由此STM的探针和AFM的悬臂可以选择性地设置在物镜下方。

4. 发明授权

US5929438A Cantilever and measuring apparatus using it 失效
标题翻译：悬臂和使用它的测量仪器
公开(公告)号：US5929438A
公开(公告)日：1999-07-27
申请号：US783951
申请日：1997-01-16
申请人： Yoshihiko Suzuki , Miyuki Niikura , Tetsuji Onuki
发明人： Yoshihiko Suzuki , Miyuki Niikura , Tetsuji Onuki
IPC分类号： G01B7/34 , G01K3/14 , G01Q60/40 , G01Q60/58 , G01Q70/08 , G01Q70/10 , G01B7/00
CPC分类号： G01Q60/40 , B82Y35/00 , G01K3/14 , G01Q60/58 , Y10S977/867 , Y10S977/873
摘要： The present invention relates to a cantilever for separately observing a temperature profile of a surface of a sample and the topography thereof. The cantilever of the present invention comprises a support, a flexible plate one end of which is supported by the support, and a probe provided at the tip of the flexible plate, in which a thermocouple is provided in the probe.
摘要翻译：本发明涉及用于分别观察样品表面的温度分布及其形貌的悬臂。本发明的悬臂包括支撑件，柔性板的一端由支撑件支撑，以及设置在柔性板的尖端处的探针，其中在探针中设置热电偶。

5. 发明授权

US5986760A Shape measurement method and high-precision lens manufacturing process 失效
标题翻译：形状测量方法和高精度镜头制造工艺
公开(公告)号：US5986760A
公开(公告)日：1999-11-16
申请号：US97578
申请日：1998-06-12
申请人： Shigeru Nakayama , Takashi Genma , Tetsuji Onuki , Masami Ebi , Hajime Ichikawa
发明人： Shigeru Nakayama , Takashi Genma , Tetsuji Onuki , Masami Ebi , Hajime Ichikawa
IPC分类号： G01B9/02 , G01B11/24 , G01B11/255 , G01M11/00 , G01M11/02 , G02B3/00 , G02B3/02
CPC分类号： G01M11/025 , G01B11/2441 , G01B11/255 , G01M11/0271
摘要： A method of measuring a surface shape of a target surface, and a lens manufacturing process for manufacturing a lens having a surface shape figured to high-precision. The method and process includes the steps of first, interferometrically measuring the surface shape of the target surface or the lens surface. Then second, measuring a surface shape of a prototype target surface. Then third, determining a rotationally symmetric error component of the difference between the target surface shape or the lens surface shape and the prototype target surface shape. Then fourth, expressing the rotationally symmetric error as a sum of two components, one being slowly varying and the other being a remainder. The slowly varying component is at least determined by performing the third step, while the remainder component is determined by performing the first step.
摘要翻译：测量目标表面的表面形状的方法以及制造具有高精度的表面形状的透镜的透镜制造工艺。该方法和方法包括以下步骤：首先干涉测量目标表面或透镜表面的表面形状。然后第二，测量原型目标表面的表面形状。然后，第三，确定目标表面形状或透镜表面形状与原型目标表面形状之间的差异的旋转对称误差分量。然后第四，将旋转对称误差表示为两个分量的和，一个是缓慢变化的，另一个是余数。至少通过执行第三步来确定缓慢变化的分量，而通过执行第一步来确定剩余分量。

6. 发明授权

US5656769A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US5656769A
公开(公告)日：1997-08-12
申请号：US513650
申请日：1995-08-10
申请人： Katsushi Nakano , Tetsuji Onuki
发明人： Katsushi Nakano , Tetsuji Onuki
IPC分类号： G01Q20/04 , G01B5/28
CPC分类号： G01Q10/04 , G01Q70/04 , Y10S977/87 , Y10S977/872
摘要： An apparatus includes an X-direction piezoelectric driving member expandable in the X direction upon application of a voltage, and a Y-direction piezoelectric driving member expandable in the Y direction upon application of a voltage. One end of the X-direction piezoelectric driving member is flexibly connected to a frame via a hinge, and the other end of the member is firmly connected to a block. One end of the Y-direction piezoelectric driving member is flexibly connected to the frame via a hinge, and the other end of the member is flexibly connected to the block via a hinge. A probe can be scanned by using this scanning mechanism without causing much fluctuations of the optical axis of a light beam used for the atomic force microscope.
摘要翻译：一种装置包括：施加电压时沿X方向扩展的X方向压电驱动构件和在施加电压时在Y方向上可扩展的Y方向压电驱动构件。 X方向压电驱动构件的一端通过铰链而柔性地连接到框架，并且构件的另一端牢固地连接到块体。 Y方向压电驱动构件的一端通过铰链而柔性地连接到框架，并且构件的另一端经由铰链挠曲地连接到块体。可以通过使用该扫描机构扫描探针，而不会引起用于原子力显微镜的光束的光轴的很大波动。

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