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    • 8. 发明授权
    • Silicon carbide single crystal, silicon carbide substrate and manufacturing method for silicon carbide single crystal
    • 碳化硅单晶,碳化硅基板和碳化硅单晶的制造方法
    • US08013343B2
    • 2011-09-06
    • US11258998
    • 2005-10-27
    • Hiromu ShiomiHiroyuki Kinoshita
    • Hiromu ShiomiHiroyuki Kinoshita
    • H01L29/36C30B23/02C01B31/36
    • C30B29/36C30B23/00Y10S438/931
    • SiC single crystal that includes a first dopant functioning as an acceptor, and a second dopant functioning as a donor is provided, where the content of the first dopant is no less than 5×1015 atoms/cm3, the content of the second dopant is no less than 5×1015 atoms/cm3, and the content of the first dopant is greater than the content of the second dopant. A manufacturing method for silicon carbide single crystal is provided with the steps of: fabricating a raw material by mixing a metal boride with a material that includes carbon and silicon; vaporizing the raw material; generating a mixed gas that includes carbon, silicon, boron and nitride; and growing silicon carbide single crystal that includes boron and nitrogen on a surface of a seed crystal substrate by re-crystallizing the mixed gas on the surface of the seed crystal substrate.
    • 提供了包含作为受体发挥作用的第一掺杂剂的SiC单晶和作为供体的第二掺杂剂,其中第一掺杂剂的含量不小于5×1015原子/ cm3,第二掺杂剂的含量不为 小于5×1015原子/ cm3,第一掺杂剂的含量大于第二掺杂剂的含量。 提供了一种碳化硅单晶的制造方法,其特征在于:通过将金属硼化物与包含碳和硅的材料混合来制造原料; 蒸发原料; 产生包括碳,硅,硼和氮化物的混合气体; 以及通过使晶种基板的表面上的混合气体再结晶,在晶种基板的表面上生长包含硼和氮的碳化硅单晶。
    • 9. 发明申请
    • Silicon carbide single crystal, silicon carbide substrate and manufacturing method for silicon carbide single crystal
    • 碳化硅单晶,碳化硅基板和碳化硅单晶的制造方法
    • US20060091402A1
    • 2006-05-04
    • US11258998
    • 2005-10-27
    • Hiromu ShiomiHiroyuki Kinoshita
    • Hiromu ShiomiHiroyuki Kinoshita
    • H01L31/0312
    • C30B29/36C30B23/00Y10S438/931
    • SiC single crystal that includes a first dopant functioning as an acceptor, and a second dopant functioning as a donor is provided, where the content of the first dopant is no less than 5×1015 atoms/cm3, the content of the second dopant is no less than 5×1015 atoms/cm3, and the content of the first dopant is greater than the content of the second dopant. A manufacturing method for silicon carbide single crystal is provided with the steps of: fabricating a raw material by mixing a metal boride with a material that includes carbon and silicon; vaporizing the raw material; generating a mixed gas that includes carbon, silicon, boron and nitride; and growing silicon carbide single crystal that includes boron and nitrogen on a surface of a seed crystal substrate by re-crystallizing the mixed gas on the surface of the seed crystal substrate.
    • 提供包括用作受体的第一掺杂剂和用作供体的第二掺杂剂的SiC单晶,其中第一掺杂剂的含量不小于5×10 15原子/ 3,第二掺杂剂的含量不小于5×10 15原子/ cm 3,第一掺杂剂的含量大于 第二掺杂剂。 提供了一种碳化硅单晶的制造方法,其特征在于:通过将金属硼化物与包含碳和硅的材料混合来制造原料; 蒸发原料; 产生包括碳,硅,硼和氮化物的混合气体; 以及通过使晶种基板的表面上的混合气体再结晶,在晶种基板的表面上生长包含硼和氮的碳化硅单晶。