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    • 1. 发明授权
    • Method for preparing yttrium 66 boride crystal for soft x-ray
monochromator
    • 制备用于软X射线单色仪的钇66硼化物晶体的方法
    • US5336362A
    • 1994-08-09
    • US962871
    • 1992-10-19
    • Takaho TanakaYutaka KamimuraShigeki OtaniYoshio Ishizawa
    • Takaho TanakaYutaka KamimuraShigeki OtaniYoshio Ishizawa
    • C30B13/00C30B29/10C30B13/04
    • C30B13/00C30B29/10
    • It is an object of the present invention to obtain a high quality YB66 crystal by lowering the temperature of the molten zone and growing a crystal by deposition growth under an incongruent condition. A method for preparing a yttrium 66 boride crystal by the floating zone method by use of a YB66 polycrystalline rod. A YB66 crystal having a composition with an atomic ratio B/Y within a range of from 50 to 75, is grown under such conditions that the melt has a composition (an atomic ratio B/Y) different from the raw YB66 polycrystalline rod and the growing YB66 crystal, and that an equilibrium is maintained at the growth interface. When the atomic ratio B/Y of the starting material is within the range of from 50 to 62 and the atomic ratio B/Y of the melt is within the range of from 40 to 62, it is possible to attain the atomic ratio B/Y of the growing crystal within the range of from 50 to 62. When the atomic ratio B/Y of the starting material is within the range of from 62 to 75 and the atomic ratio B/Y of the melt is within the range of from 62 to 93, it is possible to attain the atomic ratio B/Y of the growing crystal within the range of from 62 to 75.
    • 本发明的目的是通过降低熔融区的温度并在不一致的条件下通过沉积生长生长晶体来获得高质量的YB66晶体。 通过使用YB66多晶棒通过浮动区法制备钇66硼化物晶体的方法。 具有原子比B / Y在50至75范围内的组成的YB66晶体在使熔体具有与原始YB66多晶棒不同的组成(原子比B / Y)的条件下生长, 生长YB66晶体,并且在生长界面保持平衡。 当起始材料的原子比B / Y在50至62的范围内并且熔体的原子比B / Y在40至62的范围内时,可以获得原子比B / 生长晶体的Y在50至62的范围内。当原料的原子比B / Y在62至75的范围内时,熔体的原子比B / Y在 62〜93,可以使生长晶体的原子比B / Y在62〜75的范围内。
    • 2. 发明授权
    • Boride-based substrate for growing semiconducting layers thereon and a semiconductor device using the same
    • 用于在其上生长半导体层的基于硼化物的衬底和使用其的半导体器件
    • US06566218B2
    • 2003-05-20
    • US09917600
    • 2001-07-27
    • Shigeki OtaniJun SudaHiroyuki Kinoshita
    • Shigeki OtaniJun SudaHiroyuki Kinoshita
    • H01L2120
    • C30B23/02C30B13/00C30B29/10C30B29/403C30B29/406H01L21/0237H01L21/02433H01L21/02458H01L21/0254H01L33/007H01L33/32H01L2924/0002H01L2924/00
    • A substrate for forming a semiconducting layer is provided to grow the semiconducting layer on a major surface thereof, wherein the substrate comprises a single crystal of a chemical formula of XB2 where X contains one of Ti and Zr and the major surface may preferably be substantially parallel to plane (0001) of the single crystal because the plane (0001) of the boride substrate is highly coherent to the lattices of GaN and AlN layers grown eptaxially on the substrate. The single crystal of the substrate may be a solid solution containing impurities of not more than 5%, wherein at least one of the impurities is one selected from Cr, Hf, V, Ta and Nb. Further, a semiconductor device includes the substrate of a single crystal of a chemical formula of XB2 and at least one semiconducting layer which is grown epitaxially on the substrate, the semiconducting layer including a nitride semiconductor of a chemical formula of ZN where Z is one of gallium, aluminum and indium and boron. The device can be used for a light emission diode in which one or more connection electrodes are attached on the substrate.
    • 提供用于形成半导体层的衬底以在其主表面上生长半导体层,其中衬底包括XB2化学式的单晶,其中X包含Ti和Zr之一,并且主表面可以优选地基本上平行 (0001),因为硼化物衬底的平面(0001)与在衬底上正面生长的GaN和AlN层的晶格高度一致。 衬底的单晶可以是含有不超过5%的杂质的固溶体,其中至少一种杂质是选自Cr,Hf,V,Ta和Nb中的一种。 此外,半导体器件包括化学式为XB2的单晶的衬底和在衬底上外延生长的至少一个半导体层,所述半导体层包括化学式ZN的氮化物半导体,其中Z是 镓,铝和铟和硼。 该器件可用于其中一个或多个连接电极附着在衬底上的发光二极管。